12inch Fully Automatic Precision Dicing Saw Equipment Wafer Dedicated Cutting System yeSi/SiC & HBM (Al)
Technical parameters
Parameter | Tsanangudzo |
Saizi Yekushanda | Φ8", Φ12" |
Spindle | Dual-axis 1.2/1.8/2.4/3.0, Max 60000 rpm |
Blade Size | 2" ~ 3" |
Y1 / Y2 Axis
| Imwe-nhanho kuwedzera: 0.0001 mm |
Kumira kwechokwadi: <0.002 mm | |
Kucheka kureba: 310 mm | |
X Axis | Feed speed range: 0.1–600 mm/s |
Z1 / Z2 Axis
| Imwe-nhanho kuwedzera: 0.0001 mm |
Kumira kwechokwadi: ≤ 0.001 mm | |
θ Axis | Kumira kwechokwadi: ± 15" |
Yekuchenesa Station
| Kutenderera kumhanya: 100-3000 rpm |
Nzira yekuchenesa: Kusuka otomatiki & kupukuta-kuomesa | |
Kushanda Voltage | 3-chikamu 380V 50Hz |
Zviyero (W×D×H) | 1550×1255×1880 mm |
Kurema | 2100 kg |
Kushanda Nheyo
Iyo midziyo inowana yakakwirira-chaiyo yekucheka kuburikidza neanotevera matekinoroji:
1.High-Rigidity Spindle System: Kutenderera kunotenderera kusvika ku60,000 RPM, yakagadzirwa nedhaimondi blades kana laser yekucheka misoro kuti ienderane kune zvakasiyana-siyana zvinhu.
2.Multi-Axis Motion Control: X/Y/Z-axis positioning accuracy ye ± 1μm, yakabatanidzwa ne-high-precision grating scales kuti ive nechokwadi chekutsauka-kusina kucheka nzira.
3.Intelligent Visual Alignment: High-resolution CCD (5 megapixels) inoziva kamwe chete kucheka migwagwa uye inobhadhara kurwisana kwezvinhu kana kukanganisa.
4.Cooling & Dust Removal: Yakabatanidzwa yakachena mvura inotonhorera system uye vacuum suction guruva kubvisa kuderedza kupisa kwemafuta uye kusvibiswa kwechidimbu.
Kucheka Modes
1.Blade Dicing: Inokodzera zvechinyakare semiconductor zvinhu seSi neGaAs, ine kerf upamhi hwe50–100μm.
2.Stealth Laser Dicing: Inoshandiswa kune ultra-thin wafers (<100μm) kana zvinhu zvisina kusimba (eg, LT / LN), zvichiita kuti kupatsanurwa kusina kunetseka.
Typical Applications
Inowirirana Material | Munda Wekushandisa | Processing Zvinodiwa |
Silicon (Si) | ICs, MEMS sensors | Yakakwirira-chaiyo kucheka, kucheka <10μm |
Silicon Carbide (SiC) | Zvishandiso zvemagetsi (MOSFET/diode) | Yakaderera-kukuvadza kucheka, thermal manejimendi optimization |
Gallium Arsenide (GaAs) | RF zvishandiso, optoelectronic chips | Micro-crack kudzivirira, utsanana kudzora |
LT/LN Substrates | SAW mafirita, optical modulators | Kutemerwa-kusina kucheka, kuchengetedza piezoelectric zvivakwa |
Ceramic Substrates | Power modules, LED kurongedza | High-hardness material processing, mupendero flatness |
QFN/DFN Frames | Advanced kurongedza | Multi-chip panguva imwe chete yekucheka, kunyatsoita optimization |
WLCSP Wafers | Wafer-level kurongedza | Dicing-isina kukuvara kweakanyanya-mutete wafers (50μm) |
Zvakanakira
1. High-speed cassette frame scanning ine maaramu ekudzivirira kudhumhana, kukurumidza kutamisa nzvimbo, uye simba rakasimba rekugadzirisa kukanganisa.
2. Optimized dual-spindle cutting mode, kuvandudza kushanda kweinenge 80% kana ichienzaniswa ne-single-spindle systems.
3. Precision-imported ball screws, linear guides, uye Y-axis grating scale yakavharwa-loop control, inovimbisa kugadzikana kwenguva refu kwepamusoro-chaiyo machining.
4. Kunyatsogadzirisa kurodha / kusunungura, kuisa nzvimbo, kugadzirisa kutema, uye kuongorora kerf, zvakanyanya kuderedza mushandisi (OP) basa rekushanda.
5.Gantry-style spindle mounting structure, ine hushoma huviri-blade spacing ye 24mm, ichigonesa kuchinjika kuchinjika kune mbiri-spindle yekucheka maitiro.
Features
1.High-precision isiri-contact urefu chiyero.
2.Multi-wafer dual-blade kucheka pane imwe tray.
3.Automatic calibration, kerf inspection, uye blade breakage monitoring systems.
4.Inotsigira maitiro akasiyana-siyana ane selectable automatic alignment algorithms.
5.Fault self-correction performance uye real-time multi-position monitoring.
6.First-cut chekuongorora kukwanisa post-initial dicing.
7.Customizable factory automation modules uye mamwe mabasa ekusarudza.
Equipment Services
Isu tinopa rutsigiro rwakakwana kubva pakusarudzwa kwemidziyo kusvika pakugadzirisa kwenguva refu:
(1) Customized Development
Kurudzira blade/laser yekucheka mhinduro dzinobva pane zvinhu zvinhu (semuenzaniso, SiC kuoma, GaAs brittleness).
· Ipa yemahara sampuli yekuyedza kuona yekucheka mhando (inosanganisira chipping, kerf upamhi, kushata kwepamusoro, nezvimwewo).
(2) Kudzidzira Unyanzvi
· Basic Kudzidziswa: Equipment mashandiro, parameter gadziriso, yekugara kugadzirisa.
· Dzidzo dzepamberi: Maitiro optimization yezvinhu zvakaoma (semuenzaniso, kusagadzikana-yekucheka kucheka kweLT substrates).
(3) Mushure-Kutengesa Kutsigira
· 24/7 Mhinduro: Remote diagnostics kana pane-saiti rubatsiro.
· Spare Parts Supply: Yakachengetwa maspindles, blades, uye optical zvinhu zvekukurumidza kutsiva.
· Kuchengetedza Kuchengetedza: Kugaro gadzirisa kuchengetedza kurongeka uye kuwedzera hupenyu hwebasa.

Zvatiri Zvakanakira
✔ Chiitiko cheIndasitiri: Kubatira 300+ yepasirese semiconductor uye vagadziri vemagetsi.
✔ Cutting-Edge Tekinoroji: Yakanyatso mutsara madhairekitori uye servo masisitimu anovimbisa kugadzikana-inotungamira indasitiri.
✔ Global Service Network: Kuvharwa muAsia, Europe, uye North America kune rutsigiro rwenzvimbo.
Kuti uedze kana kubvunza, taura nesu!

