Zvishandiso zveKucheka Ring zveWafer zveOtomatiki Zvizere Saizi Yekushanda 8inch/12inch Kucheka Ring yeWafer

Tsananguro pfupi:

XKH yakagadzira yega sisitimu yekuchekerera wafer edge otomatiki, inomiririra mhinduro yepamusoro yakagadzirirwa maitiro ekugadzira semiconductor yepamberi. Midziyo iyi ine tekinoroji itsva ye multi-axis synchronous control uye ine sisitimu yespindle yakasimba (kumhanya kwakanyanya kwekutenderera: 60,000 RPM), ichipa kuchekerera kwemucheto kwakanyatsonaka nekuchekerera kwakarurama kusvika ±5μm. Sisitimu iyi inoratidza kushanda zvakanaka nezvikamu zvakasiyana-siyana zve semiconductor, kusanganisira asi kwete kugumira ku:
1. Zvidimbu zveSilicon (Si): Zvakakodzera kugadziriswa kwemucheto wemadimbu e8-12 inch;
2. Macompound semiconductors: Zvinhu zve semiconductor zvechizvarwa chechitatu zvakaita seGaAs neSiC；
3. Zvidimbu zvakakosha: Zvidimbu zve Piezoelectric zvinosanganisira LT/LN；

Dhizaini iyi inotsigira kukurumidza kutsiviwa kwezvinhu zvakawanda zvinodyiwa zvinosanganisira madhaimani nemisoro yekucheka nelaser, uye zvinoenderana nezvinodiwa neindasitiri. Kune zvinodiwa zvehunyanzvi, tinopa mhinduro dzakakwana dzinosanganisira:
· Zvishandiso zvekucheka zvakatsaurirwa zvinopihwa
· Mabasa ekugadzirisa zvinhu zvakagadzirwa nevatengi
· Mhinduro dzekugadzirisa ma parameter ekugadzirisa maitiro

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Zvinhu zvirimo

Magadzirirwo ehunyanzvi

Paramita	Chikamu	Tsanangudzo
Saizi Yepamusoro Yebasa	mm	ø12"
Chokurukisa	Kugadziriswa	Chokurukisa Chimwe Chete
	Kumhanya	3,000–60,000 rpm
	Simba Rekuburitsa	1.8 kW (2.4 sarudzo) pa30,000 min⁻¹
	Dhiya reMax Blade.	Ø58 mm
X-Axis	Kucheka Range	310 mm
Y-Axis	Kucheka Range	310 mm
	Kuwedzera kweNhanho	0.0001 mm
	Kururama Kwekuisa Nzvimbo	≤0.003 mm/310 mm, ≤0.002 mm/5 mm (chikanganiso chimwe chete)
Z-Axis	Kugadziriswa kweKufamba	0.00005 mm
Z-Axis	Kudzokorora	0.001 mm
θ-Axis	Kutenderera Kwakanyanya	380 madhigirii
Rudzi rweChinotenderera		Chidimbu chimwe chete, chakashongedzwa nebanga rakaomarara rekucheka mhete
Kururama Kwekucheka Mhete	μm	±50
Kururama Kwekuisa Wafer	μm	±50
Kushanda zvakanaka kweWafer imwe chete	min/wafer	8
Kushanda NemaWafer Akawanda		Kusvika mawafer mana akagadziriswa panguva imwe chete
Kurema kweMidziyo	kg	≈3,200
Zviyero zveMidziyo (W×D×H)	mm	2,730 × 1,550 × 2,070

Nheyo yekushanda

Sisitimu iyi inoita basa rakanaka rekugadzirisa zvinhu kuburikidza nematekinoroji aya makuru:

1.Sisitimu Yekudzora Kufamba Kwakangwara:
· Mota inotyaira nemota ine mutsetse wakanyatsorongeka (kunyatsorongeka kwenzvimbo: ± 0.5μm)
· Kudzora kwakabatana kwematanho matanhatu kunotsigira kuronga nzira dzakaoma
· Maalgorithms ekudzvinyirira vibration munguva chaiyo anovimbisa kugadzikana kwekucheka

2. Sisitimu Yekuongorora Yepamusoro:
· Sensor yekukwirira kwelaser ye3D yakabatanidzwa (kururama: 0.1μm)
· Nzvimbo yekuona yeCCD ine resolution yepamusoro (5 megapixels)
· Module yekuongorora mhando yepamhepo

3. Maitiro Ekugadzira Otomatiki Zvizere:
· Kurodha/kuburitsa otomatiki (FOUP standard interface inoenderana)
· Sisitimu yekuronga yakangwara
· Chishandiso chekuchenesa chakavharwa (kuchena: Kirasi 10)

Maitiro Akajairika

Midziyo iyi inopa kukosha kwakakosha mumashandisirwo ekugadzira semiconductor:

Munda weKunyorera	Zvinhu Zvekugadzirisa	Zvakanakira zvehunyanzvi
Kugadzira IC	8/12" Zvidimbu zveSilicon	Inovandudza kurongeka kwe lithography
Zvishandiso zveMagetsi	MaWafer eSiC/GaN	Inodzivirira zvikanganiso zvemucheto
Masensa eMEMS	MaWafer eSOI	Inovimbisa kuvimbika kwemudziyo
Zvishandiso zveRF	MaWafer eGaAs	Inovandudza mashandiro epamusoro-soro
Kurongedza Kwepamusoro	Mawafers Akagadzirwazve	Inowedzera goho rekurongedza

Zvinhu zvirimo

1. Four-station configuration yepamusoro yekugadzirisa kushanda zvakanaka ；
2. Kubvisa uye kubvisa mhete yeTAIKO yakagadzikana;
3. Kuenderana kwakanyanya nezvinhu zvinodyiwa zvakakosha ；
4. Tekinoroji yekuchekerera mucheto ine ma axis akawanda inoita kuti kucheka kwemucheto kuve kwakanyatsojeka;
5. Kuyerera kwemaitiro otomatiki zvizere kunoderedza mari yebasa ；
6. Dhizaini yetafura yekushanda yakagadzirwa inogonesa kugadziriswa kwakasimba kwezvivakwa zvakakosha;

Mabasa

1.Sisitimu yekuona mhete-donhwe;
2. Kuchenesa tafura yekushanda otomatiki ；
3. Sisitimu yekubvisa mabhondi yeUV yakangwara ；
4. Kurekodha kwerogi yekushanda ；
5. Kubatanidzwa kwemodule otomatiki yefekitori ；

Kuzvipira Kwebasa

XKH inopa rubatsiro rwakakwana, rwakazara rwebasa rakagadzirirwa kuwedzera mashandiro emidziyo uye kushanda zvakanaka mukati merwendo rwenyu rwekugadzira.
1. Mabasa Ekugadzirisa
· Kugadziriswa Kwemidziyo Yakagadzirirwa: Chikwata chedu cheinjiniya chinoshanda pamwe chete nevatengi kuti vagadzirise maparamita ehurongwa (kumhanya kwekucheka, kusarudzwa kwemapanga, nezvimwewo) zvichienderana nehunhu hwezvinhu (Si/SiC/GaAs) uye zvinodiwa pakuita.
· Rutsigiro rweKugadzira Maitiro: Tinopa sampuli dzekugadzirisa dzine mishumo yakadzama yekuongorora kusanganisira kuyerwa kwemiganhu uye kugadzira mapu ezvikanganiso.
· Kugadzira Pamwe Chete Zvekushandisa: Kune zvinhu zvitsva (semuenzaniso, Ga₂O₃), tinoshanda pamwe chete nevagadziri vanotungamira vezvigadzirwa zvinoshandiswa kugadzira mablades/laser optics anoenderana nezvinodiwa.

2. Rutsigiro rwehunyanzvi hwehunyanzvi
· Rutsigiro Rwakatsaurirwa Panzvimbo: Sarudza mainjiniya vane certification kuti vagadzirise zvinhu zvakakosha (zvinowanzoita mavhiki maviri kusvika mana), zvichisanganisira:
Kugadzirisa michina nekugadzirisa mashandiro ayo
Kudzidziswa kwehunyanzvi hwemushandisi
Gwaro rekubatanidza ISO Kirasi 5 yekuchenesa
· Kuchengetedza Zvinotarisirwa: Kuongorora hutano hwemwedzi mitatu nekuongorora vibration uye servo motor diagnostics kudzivirira kutadza kushanda zvakanaka pasina kurongwa.
· Kutarisa Kure: Kutevera mashandiro emidziyo munguva chaiyo kuburikidza nepuratifomu yedu yeIoT (JCFront Connect®) nealamu dzezviziviso zvisingawanzoitika otomatiki.

3. Mabasa Akawedzerwa Kukosha
· Ruzivo rweMaitiro: Tsvaga mabikirwo ekucheka akasimbiswa anopfuura mazana matatu ezvinhu zvakasiyana-siyana (anovandudzwa kota yega yega).
· Kurongeka kweTekinoroji: Kudzivirira mari yako mune ramangwana uchishandisa nzira dzekuvandudza hardware/software (semuenzaniso, module yekuona defect yakavakirwa paAI).
· Kubatsira Pakukurumidzira: Kuongororwa kwechirwere uri kure kwemaawa mana kwakavimbiswa uye kupindira kwechirwere kwemaawa makumi mana nemasere (kufukidza pasi rose).

4. Nzvimbo dzebasa
· Vimbiso Yekushanda: Kuzvipira kwechibvumirano kune ≥98% yenguva yekushanda kwemidziyo ine nguva dzekupindura dzinotsigirwa neSLA.

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