Muchina weIon Beam Polishing wesafire SiC Si

Muchina weIon Beam Polishing weSapphire SiC Si Mufananidzo Unoratidzwa

Tsananguro pfupi:

Muchina weIon Beam Figuring and Polishing wakavakirwa papfungwa ye ion sputtering. Mukati mekamuri rine vacuum yakawanda, sosi yeion inogadzira plasma, iyo inokurumidziswa kuita ion beam ine simba rakawanda. Danda iri rinoputira pamusoro pechinhu che optical, richibvisa zvinhu paatomu scale kuti rigadziriswe uye ripedzwe nemazvo.

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Dhayagiramu Yakadzama

Pfupiso yeChigadzirwa cheIon Beam Polishing Machine

Senzira isingabatanidzi vanhu, kupolisha mwenje weion kunobvisa kushushikana kwemuchina uye kudzivirira kukuvara kwepasi pevhu, zvichiita kuti ive yakanaka pakugadzira ma optics anonyatsoshandiswa mukuongorora nyeredzi, mundege, muma semiconductors, uye muzvidzidzo zvepamusoro-soro.

Nheyo yekushanda yeIon Beam Polishing Machine

Kuzvarwa kweIon
Gasi risina simba (semuenzaniso, argon) rinopinzwa mukamuri re vacuum uye rinoiswa ion kuburikidza nemagetsi anobuda kuti rigadzire plasma.

Kukurumidzisa & Kuumbwa kweMatanda
Maion anokurumidziswa kusvika kumazana kana zviuru zvema electron volts (eV) uye anoumbwa kuita nzvimbo yakagadzikana, yakatarisana nemwaranzi.

Kubviswa Kwezvinhu
Danda remaion rinoburitsa maatomu kubva pamusoro pasina kutanga maitiro emakemikari.

Kuona Zvikanganiso & Kuronga Nzira
Kutsauka kwechimiro chepamusoro kunoyerwa ne interferometry. Mabasa ekubvisa anoshandiswa kuona nguva yekugara uye kugadzira nzira dzezvishandiso dzakagadziriswa.

Kugadziriswa kweLoop Yakavharwa
Kudzokorora kwekugadzirisa nekuyera kunoenderera mberi kusvika zvinangwa zveRMS/PV zvakarurama zvazadzikiswa.

Zvinhu Zvikuru zveIon Beam Polishing Machine

Kuenderana Kwese Kwese- Inoshanda pamusoro pakatwasuka, pakaita denderedzwa, pakaita sedenderedzwa, uye pakaita sepachena

Mwero wekubvisa wakagadzikana zvakanyanya- Inogonesa kugadzirisa chimiro che sub-nanometer

Kugadzirisa Pasina Kukuvara- Hapana zvikanganiso zvepasi pevhu kana shanduko dzechimiro

Kushanda Kwakafanana- Inoshanda zvakanaka zvakaenzana pazvinhu zvine kuoma kwakasiyana-siyana

Kugadziriswa Kwakaderera/Kwepakati Nepakati- Inobvisa zvikanganiso pasina kugadzira zvigadzirwa zvepakati nepamusoro

Chinodiwa Chekugadzirisa Chakaderera- Kushanda kwenguva refu kwenguva refu uye nguva shoma yekuzorora

Magadzirirwo Makuru Ehunyanzvi eIon Beam Polishing Machine

Chinhu	Tsanangudzo
Nzira Yokugadzirisa	Ion ichibuda munzvimbo ine vacuum yakawanda
Rudzi rwekugadzirisa	Kuchenesa nekupukuta pamusoro pasina kubata
Saizi Yebasa Rakakura	Φ4000 mm
Matemo Ekufamba	3-axis / 5-axis
Kugadzikana kweKubviswa	≥95%
Kururama Kwepamusoro	PV < 10 nm; RMS ≤ 0.5 nm (yakajairika RMS < 1 nm; PV < 15 nm)
Kugona Kugadzirisa Kakawanda	Inobvisa zvikanganiso zvema frequency ari pakati nepakati pasina kuisa zvikanganiso zvema frequency ari pakati nepakati
Kushanda Kusingaperi	Mavhiki matatu kusvika mashanu pasina kugadziriswa kwevacuum
Mari Yekugadzirisa	Zvakaderera

Kugadzirisa Kugona kweIon Beam Polishing Machine

Mhando dzepamusoro dzinotsigirwa

Zviri nyore: Yakatsetseka, yakatenderera, prism

Nzvimbo yakaoma: Asphere yakaenzana/isina kuenzana, Asphere isina divi, sirin'i

Zvinokosha: Maoptics akatetepa zvakanyanya, maoptics eslat, maoptics ehemispherical, maoptics econformal, maphase plates, nzvimbo dzakasununguka

Zvinhu Zvinotsigirwa

Girazi reOptical: Quartz, microcrystalline, K9, nezvimwewo.

Zvinhu zve infrared: Silicon, germanium, nezvimwewo.

Simbi: Aruminiyamu, simbi isina ngura, titanium alloy, nezvimwewo.

Makristasi: YAG, single-crystal silicon carbide, nezvimwewo.

Zvinhu zvakaoma/zvisina kunyatsosimba: Silicon carbide, nezvimwewo.

Hunhu Hwepamusoro / Kunyatsojeka

PV < 10 nm

RMS ≤ 0.5 nm

Kugadzirisa Zvidzidzo zveMuchina weIon Beam Polishing

Nyaya 1 - Girazi Rakatsetseka Rakajairika

Chishandiso: D630 mm quartz yakatsetseka

Mhedzisiro: PV 46.4 nm; RMS 4.63 nm

Nyaya 2 - Girazi Rinopenya reX-ray

Chishandiso chebasa: 150 × 30 mm silicon yakatsetseka

Mhedzisiro: PV 8.3 nm; RMS 0.379 nm; Kutsetseka 0.13 µrad

Nyaya 3 - Girazi Risingaonekwe Nedivi

Chigadziko chebasa: D326 mm girazi repasi risingapindi axis

Mhedzisiro: PV 35.9 nm; RMS 3.9 nm

Mibvunzo Inowanzo bvunzwa nezveMagirazi eQuartz

Mibvunzo Inowanzo bvunzwa - Muchina weIon Beam Polishing

Mubvunzo 1: Chii chinonzi ion beam polishing?
A1:Kupukuta danda reIon inzira isingabatanidzi iyo inoshandisa danda rakanangana remaion (senge ma-argon ions) kubvisa zvinhu kubva pamusoro pebasa. Maion anokurumidziswa uye anonangidzirwa pamusoro, zvichikonzera kubviswa kwezvinhu zvine mwero weatomu, zvichikonzera kupera kwakapfava zvakanyanya. Maitiro aya anobvisa kushushikana kwemuchina uye kukuvara kwepasi pevhu, zvichiita kuti ive yakakodzera zvikamu zveoptical zvakanyatsonaka.

Mubvunzo wechipiri: Ndeapi marudzi enzvimbo anogona kugadziriswa neIon Beam Polishing Machine?
A2:IyoMuchina weIon Beam Polishinginogona kugadzirisa nzvimbo dzakasiyana-siyana, kusanganisira zvinhu zviri nyore zvemaziso zvakaita sedzakati sandara, mabhora, uye maprism, pamwe chete nejometri dzakaoma dzakadai semadura, madura asina kurongekauyenzvimbo dzakasunungukaInonyanya kushanda pazvinhu zvakaita segirazi re optical, infrared optics, simbi, nezvimwe zvinhu zvakaoma/zvisina kusimba.

Mubvunzo wechitatu: Muchina weIon Beam Polishing Machine unogona kushanda nezvinhu zvipi?
A3:IyoMuchina weIon Beam Polishinginogona kupukuta zvinhu zvakasiyana-siyana, zvinosanganisira:

Girazi rekuona: Quartz, microcrystalline, K9, nezvimwewo.
Zvinhu zveinfrared: Silicon, germanium, nezvimwewo.
Simbi: Aruminiyamu, simbi isina ngura, titanium alloy, nezvimwewo.
Zvinhu zvekristaro: YAG, single-crystal silicon carbide, nezvimwewo.
Zvimwe zvinhu zvakaoma/zvisina kunyatsosimba: Silicon carbide, nezvimwewo.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.