4 inch SiC Wafers 6H Semi-Insulating SiC Substrates prime, research, uye dummy giredhi.

Tsanangudzo Pfupi:

Semi-insulated silicon carbide substrate inoumbwa nekucheka, kukuya, kupukuta, kuchenesa uye imwe yekugadzira tekinoroji mushure mekukura kwesemi-insulated silicon carbide crystal. A layer kana multilayer crystal layer inokura pane substrate inosangana nemhando zvinodiwa se epitaxy, uye ipapo microwave RF mudziyo unogadzirwa nekubatanidza dhizaini yedunhu uye kurongedza. Inowanikwa se 2inch 3inch 4incgh 6inch 8 inch maindasitiri, tsvagiridzo uye bvunzo giredhi semi-insulated silicon carbide single crystal substrates.

Tumira email kwatiri

Product Detail

Product Tags

Chigadzirwa Specification

Giredhi			Zero MPD Yekugadzira Giredhi (Z Giredhi)			Standard Production Giredhi(P Giredhi)		Dummy Giredhi (D giredhi)
Diameter			99.5 mm ~ 100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Wafer Orientation			Kunze kweaxis : 4.0° yakananga<1120 > ±0.5° ye4H-N, Paaxis : <0001>±0.5° ye4H-SI
	4H-SI		≤1cm^-2			≤5 masendimita^-2		≤15 masendimita^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Yekutanga Flat Oriental		{10-10} ±5.0°
Primary Flat Length		32.5 mm±2.0 mm
Secondary Flat Length		18.0 mm±2.0 mm
Secondary Flat Orientation		Silicon yakatarisana kumusoro: 90° CW. kubva Prime flat ± 5.0 °
Kusabatanidzwa kumucheto		3 mm
LTV/TTV/Bow/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Kukasharara			C chiso				ChiPolish		Ra≤1 nm
			Si face	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Edge Cracks By High Intensity Chiedza		Hapana						Cumulative kureba ≤ 10 mm, imwe chete kureba≤2 mm
Hex Plates By High Intensity Chiedza		Cumulative area ≤0.05%						Cumulative area ≤0.1%
Polytype Nzvimbo NeKusimba Kwakanyanya Chiedza		Hapana						Cumulative area≤3%
Visual Carbon Inclusions		Cumulative area ≤0.05%						Yakawedzerwa nzvimbo ≤3%
Silicon Surface Scratches By High Intensity Chiedza		Hapana						Cumulative kureba≤1＊wafer dhayamita
Edge Chips High By Intensity Chiedza		Hapana anotenderwa ≥0.2 mm hupamhi nekudzika						5 inotenderwa, ≤1 mm imwe neimwe
Silicon Surface Kusvibiswa NeKunyanya Kusimba		Hapana
Packaging		Multi-wafer Cassette Kana Single Wafer Container