100mm 4inch GaN paSapphire Epi-layer wafer Gallium nitride epitaxial wafer
Iyo yekukura maitiro eGaN yebhuruu LED quantum tsime chimiro.Detailed process flow irikutevera
(1) Kupisa kwekushisa kwepamusoro, sapphire substrate inotanga kupisa kusvika 1050 ℃ mumhepo yehydrogen, chinangwa ndechekuchenesa pasi pevhu;
(2) Kana iyo substrate tembiricha inodonha kusvika 510 ℃, yakaderera-tembiricha GaN/AlN buffer layer ine ukobvu hwe30nm inoiswa pamusoro pesafire substrate;
(3) Tembiricha inokwira kusvika ku10 ℃, iyo reaction gas ammonia, trimethylgallium uye silane inojoinwa, zvichiteerana inodzora inoenderana yekuyerera mwero, uye iyo silicon-doped N-mhando GaN ye4um ukobvu inokura;
(4) The reaction gas ye trimethyl aluminium uye trimethyl gallium yakashandiswa kugadzirira silicon-doped N-type A-makondinendi ane hutema hwe 0.15um;
(5) 50nm Zn-doped InGaN yakagadzirirwa nejekiseni trimethylgallium, trimethylindium, diethylzinc uye ammonia pakupisa kwe8O0 ℃ uye kutonga kuyerera kwakasiyana-siyana maererano;
(6) Kupisa kwakawedzera kusvika ku1020 ℃, trimethylaluminum, trimethylgallium uye bis (cyclopentadienyl) magnesium yakaiswa kugadzirira 0.15um Mg doped P-type AlGaN uye 0.5um Mg doped P-type G ropa glucose;
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(8) Etching paP-mhando G stasis pamusoro kuratidza N-mhando G stasis pamusoro;
(9) Evaporation yeNi/A inobata ma plates pa p-GaNI pamusoro, evaporation ye △/Al contact plates pa ll-GaN surface kuti iite ma electrode.
Zvinotsanangurwa
| Item | GaN-TCU-C100 | GaN-TCN-C100 |
| Dimensions | e 100 mm ± 0.1 mm | |
| Ukobvu | 4.5±0.5 um Inogona kugadzirwa | |
| Orientation | C-ndege(0001) ±0.5° | |
| Conduction Type | N-mhando (isina kuvharwa) | N-mhando (Si-doped) |
| Resistivity (300K) | <0.5 Q・cm | <0.05 Q・cm |
| Carrier Concentration | <5x1017cm-3 | > 1x1018cm-3 |
| Mobility | ~ 300 cm2/Vs | ~ 200 cm2/Vs |
| Dislocation Density | Zvisingasviki 5x108cm-2(yakaverengerwa neFWHMs yeXRD) | |
| Substrate chimiro | GaN paSapphire(Standard: SSP Option: DSP) | |
| Inoshandiswa Surface Area | > 90% | |
| Package | Yakaputirwa mukirasi 100 yakachena kamuri nharaunda, mumakaseti e25pcs kana imwechete wafer midziyo, pasi pemhepo yenitrogen. | |
Detailed Diagram
