SiC Seed Coating–Bonding–Sintering Integrated Solution
Dhayagiramu Yakadzama
Kuputira Spray Yakakodzera • Kubatanidza Pakati • Kubvisa Vacuum Debubbling • Kubatanidza Carbonization/Sintering
Shandura kubatana kwembeu yeSiC kubva pakushanda kunoenderana nemushandi kuita maitiro anodzokororwa, anotungamirwa nema parameter: ukobvu hwechikamu cheglue chinodzorwa, kurongeka pakati nekudzvanywa kwe airbag, kubvisa vacuum bubble, uye kusimbiswa kwe carbonization inogadziriswa tembiricha/pressure. Yakagadzirirwa zviitiko zvekugadzira zve 6/8/12-inch.
Pfupiso yeChigadzirwa
Chii ichocho
Mhinduro iyi yakabatanidzwa yakagadzirirwa danho rekumusoro rekukura kwekristaro yeSiC uko mbeu/wafer zvinobatanidzwa nepepa regraphite/graphite plate (uye ma interfaces akafanana). Inovhara process loop inoyambuka:
Kuputira (spray adhesive) → Kubatanidza (kurongeka + kudzvanya + kubvisa mabhubhu emuchina) → Kupisa/Kuisa carbonization (kubatanidza & kupukuta)
Nekudzora kuumbwa kwenamira, kubviswa kwemabubble, uye kusimbiswa kwekupedzisira secheni imwe chete, mhinduro inovandudza kuenderana, kugadzirwa, uye kukura.
Sarudzo dzekugadzirisa
A. Mutsetse we semi-otomatiki
Muchina weSiC Spray Coating → Muchina weSiC Bonding → SiC Sintering Furnace
B. Mutsetse unozvigadzira wega zvizere
Muchina weKuputira & Kusunga otomatiki → SiC Sintering Furnace
Kubatanidzwa kwesarudzo: kubata marobhoti, kugadzirisa/kurongeka, kuverenga ID, kuona mabubble
Mabhenefiti Akakosha
• Ukobvu hwerukoko rwekunamira hunodzorwa uye kufukidza kwahwo kuti zvikwanisike kudzokorora
• Kurongeka pakati uye kudzvanya airbag kuti ibatane zvakanaka uye iparadzire kumanikidzwa nguva dzose
• Kubvisa maburi mu vacuum kuderedza maburi/maburi mukati me glue rinonamira
• Kubatanidzwa kwecarbonization inogadziriswa yekupisa/kumanikidzwa kuti isimbise chisungo chekupedzisira
• Sarudzo dze otomatiki dzenguva yakagadzikana yekutenderera, kuteverwa, uye kudzora mhando mukati memutsara
Nheyo
Sei nzira dzechivanhu dzichinetsa
Kushanda kwekubatana kwembeu kunowanzo deredzwa nezvikamu zvitatu zvakabatana:
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Kuenderana kwerukoko rwekunamira (ukobvu uye kufanana)
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Kudzora kwebubble/void (mhepo yakavharirwa muchikamu chinonamira)
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Kugadzikana kwemashure mekubatana mushure mekugadziriswa/kugadziriswa kwecarbonization
Kupfeka nemaoko kunowanzo konzera kusawirirana kweukobvu, kuoma kubvisa mabhubhu, njodzi yakakura yemukati mevhu, kukwenya kwenzvimbo dzegraphite, uye kusakwanisa kukura zvakanaka kuti dzigadzirwe zvakawanda.
Kupenda kwespin kunogona kukonzera ukobvu husina kugadzikana nekuda kwemafambiro ekunamira, kusimba kwenzvimbo, uye simba re centrifugal. Inogonawo kusangana nekusvibiswa kwemativi uye zvipingamupinyi zvekugadzirisa papepa/maplate e graphite, uye zvinogona kuoma kuti manamati ane huwandu hwakasimba apfeke zvakaenzana.
Mashandiro anoita nzira iyi yakabatanidzwa
Kuputira: Kuputira kwespray kunoita kuti pave nekukobvu kwerukoko rwekunamira uye kufukidza nzvimbo dzinenge dzashandiswa (mbeu/wafer, graphite paper/plate).
Kubatana: Kurongeka pakati + kudzvanya airbag kunotsigira kubatana nguva dzose; kubvisa vacuum cleaner kunoderedza mhepo yakavharirwa, mabubble, uye mavoid mu adhesive layer.
Kupisa/Kuisa Kabhoni: Kubatanidzwa kwekupisa kwakanyanya nekupisa kunogadziriswa uye kumanikidzwa kunosimbisa interface yekupedzisira yakabatana, ichinanga mhedzisiro yekudzvanya isina mabubble uye yakafanana.
Chirevo chekushanda kwenyaya
Kuwanda kwezvibodzwa zvecarbonization kunogona kusvika 90%+ (chirevo chemaitiro). Mareferensi ezvibodzwa zvezvibodzwa zvemabond akanyorwa muchikamu cheClassic Cases.
Maitiro
A. Kufamba kweSemi-otomatiki
Danho 1 — Kupfapfaidza (Kuputira)
Isa namatidza uchishandisa spray coating panzvimbo dzakatarwa kuti ukobvu hwacho huve hwakagadzikana uye hufukidzwe zvakaenzana.
Danho rechipiri — Kurongeka & Kubatanidza (Kubatanidza)
Ita kuti pave nekuenderana pakati, shandisa airbag pressing, uye shandisa vacuum debubbling kubvisa mhepo yakavharirwa mu adhesive layer.
Danho rechitatu — Kubatanidzwa kweCarbonization (Kugadzira/Kugadzira Carbonization)
Tumira zvikamu zvakasungwa muchoto chinopisa wobva watanga kusanganisa carbonization nekupisa kwakanyanya nekupisa kunogadziriswa uye kumanikidzwa kuti usimbise chisungo chekupedzisira.
B. Kufamba Kwebasa Zvizere Otomatiki
Muchina wekuisa machira otomatiki uye wekubatanidza unobatanidza zviito zvekuvhara nekubatanidza uye unogona kusanganisira kubata nemarobhoti uye kugadzirisa. Sarudzo dziri mumutsara dzinogona kusanganisira kuverenga ID uye kuona mabubble kuti aonekwe kuti aonekwe zvakanaka uye kuti mhando yacho inodzorwa sei. Zvikamu zvinoenderera mberi kuenda kuchoto chekupisa kuti zvisanganiswe necarbonization.
Kuchinjika kwenzira yemaitiro
Zvichienderana nezvinhu zvinoshandiswa pakubatanidza uye maitiro anodiwa, sisitimu iyi inogona kutsigira nzira dzakasiyana dzekuputira uye nzira dzekupfapfaidza dziri padivi rimwe chete kana kuti mbiri uku ichichengetedza chinangwa chimwe chete: danda rekunamatira rakasimba → kubvisa mabhubhu zvinobudirira → kusanganiswa kwakafanana.
Mashandisirwo
Chikumbiro chikuru
Kukura kweSiC crystal seed bonding upstream: bonding seed/wafer to graphite paper/graphite plate nezvimwe zvinoenderana, zvichiteverwa ne carbonization combination.
Zviitiko zvehukuru
Inotsigira mashandisirwo ekubatanidza 6/8/12-inch kuburikidza nekusarudza magadzirirwo uye nzira yekufambisa yakagadziriswa.
Zviratidzo zvekukwana kwemuviri
• Kuputira nemaoko kunokonzera kusiyana kweukobvu, maburi/maburi, kukwenya, uye kubereka kusingaenderane
• Ukobvu hwekumonera kwespini hauna kugadzikana kana kuti hwakaoma pamapepa/maplate egirafiti; pane zvipingamupinyi zvekusvibiswa/kugadziriswa kwemativi
• Unoda kugadzirwa kunokwanisika kukwidziridzwa uye kunodzokororwa zvakanyanya uye kusavimba nevashandisi zvakanyanya
• Unoda otomatiki, kutevedza, uye sarudzo dzeQC dziri mu-line (ID + bubble detection)
Nyaya dzekare (Mhedzisiro Yakajairika)
Cherechedza: Izvi zvinotevera ndizvo zvinoratidzwa padata reference/process references. Kushanda chaiko kunoenderana ne namatidziro system, mamiriro ezvinhu anouya, process window yakasimbiswa, uye mwero wekuongorora.
Chikamu 1 — 6/8-inch Seed Bonding (Kuburikidza neKuwedzera Kwembeu)
Hapana girafu yegirafu: 6 pcs/yuniti/zuva
Neplate yegrafiti: 2.5 pcs/yuniti/zuva
Mugove wekubatana: ≥95%
Chikamu 2 — Kubatanidza Mbeu Yakareba masendimita 12 (Kuburikidza Nekuburitsa & Kuburitsa)
Hapana girafu yegirafu: 5 pcs/yuniti/zuva
Neplate yegraphite: 2 pcs/yuniti/zuva
Mugove wekubatana: ≥95%
Nyaya 3 — Kubatanidzwa kweCarbonization Goho Reference
Mugove wekubatanidza carbonization: 90%+ (chirevo chemaitiro)
Mhedzisiro yechinangwa: mhedzisiro isina mabara uye yakaenzana yekudzvanya (zvichienderana nezvinodiwa zvekusimbisa uye zvekuongorora)
Mibvunzo Inowanzo bvunzwa
Mubvunzo 1: Dambudziko guru riri kugadziriswa nemhinduro iyi nderei?
A: Inosimbisa kubatana kwembeu nekudzora ukobvu/kufukidzwa kwenamira, kugadzirisa mashandiro, uye kubatanidzwa mushure mekubatanidza—zvichishandura danho rinotsamira paunyanzvi kuita maitiro ekugadzira anodzokororwa.
Mubvunzo wechipiri: Sei kuputira nemaoko kuchiwanzokonzera maburi/maburi?
A: Nzira dzekushandisa nemaoko dzinonetsa kuchengetedza ukobvu hwakafanana, zvichiita kuti kubvisa mabhubhu kuve kwakaoma uye kuwedzera njodzi yemhepo yakavharirwa. Dzinogonawo kukwenya pamusoro pegirafiti uye zvakaoma kuyera vhoriyamu.
Mubvunzo wechitatu: Sei kupeta kwepombi kuchigona kusagadzikana pakushandisa uku?
A: Ukobvu hunoenderana nemafambiro ekunamira, kusimba kwenzvimbo, uye simba re centrifugal. Kuvhara kwepepa/plate yegirafu kunogona kudziviswa nekugadzira uye njodzi yekusvibiswa padivi, uye manamati ane huwandu hwakasimba anogona kuoma kutenderedza zvakafanana.
Nezvedu
XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.
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