LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° Ukobvu 250-500um
Magadzirirwo ehunyanzvi
| Zita | LiTaO3 yemhando yepamusoro | Tafura yeruzha LiTaO3 |
| Axial | Z yakachekwa + / - 0.2 ° | 36 ° Y yakachekwa / 42 ° Y yakachekwa / X yakachekwa(+ / - 0.2 °) |
| Dhayamita | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm |
| Ndege yeDatum | 22mm + / - 2mm | 22mm + /-2mm32mm + /-2mm |
| Ukobvu | 500um + /-5mm1000um + /-5mm | 500um + /-20mm350um + /-20mm |
| TTV | ≤ 10um | ≤ 10um |
| Tembiricha yeCurie | 605 °C + / - 0.7 °C (DTAnzira) | 605 °C + / -3 °C (DTAnzira |
| Hunhu hwepamusoro | Kupukuta kwemativi maviri | Kupukuta kwemativi maviri |
| Micheto ine chamfered | kutenderera kwemucheto | kutenderera kwemucheto |
Hunhu Hunokosha
1. Crystal Structure uye Magetsi Performance
· Kugadzikana kweCrystallographic: 100% 4H-SiC polytype dominance, hapana multicrystalline inclusions (semuenzaniso, 6H/15R), ine XRD rocking curve yakazara pahafu yepamusoro (FWHM) ≤32.7 arcsec.
· Kufamba Kwepamusoro: Kufamba kwemaerekitironi e5,400 cm²/V·s (4H-SiC) uye kufamba kwemaburi e380 cm²/V·s, zvichigonesa dhizaini yemidziyo ine mafrequency akakwira.
·Kuomarara kweRadiation: Inodzivirira 1 MeV neutron irradiation ine muganhu wekukanganisika kwe1×10¹⁵ n/cm², yakakodzera kushandiswa mundege nenyukireya.
2. Zvivakwa zveThermal neMechanical
· Kufambisa Kunopisa Kunoshamisa: 4.9 W/cm·K (4H-SiC), katatu kupfuura silicon, inotsigira kushanda pamusoro pe200°C.
· Kuwedzerwa kweThermal Low: CTE ye4.0×10⁻⁶/K (25–1000°C), zvichiita kuti pave nekuenderana ne silicon-based packaging uye kuderedza kushushikana kwethermal.
3. Kudzora Kwakakwana uye Kugadzirisa Kwakarurama
.
· Kuwanda kweMicropipe: <0.3 cm⁻² (mawafers e-inch 8), kusimba kwedislocation <1,000 cm⁻² (zvakasimbiswa kuburikidza neKOH etching).
· Hunhu Hwepamusoro: CMP-yakapetwa kusvika Ra <0.2 nm, ichizadzisa zvinodiwa zveEUV lithography-grade flatness.
Zvishandiso Zvikuru
| Domain | Maitiro Ekushandisa | Zvakanakira Zvehunyanzvi |
| Kutaurirana kweOptical | 100G/400G lasers, silicon photonics hybrid modules | Zvigadziko zvembeu zveInP zvinogonesa direct bandgap (1.34 eV) uye Si-based heteroepitaxy, zvichideredza kurasikirwa kwe optical coupling. |
| Mota Itsva dzeSimba | Ma inverter emagetsi ane 800V, machaja ari mubhodhi (OBC) | Zvishandiso zve4H-SiC zvinotsungirira >1,200 V, zvichideredza kurasikirwa kwemhepo ne50% uye vhoriyamu yesystem ne40%. |
| Kutaurirana kwe5G | Midziyo yeRF yemafungu emagetsi eMillimeter-wave (PA/LNA), maamplifiers emagetsi ebase station | Zvishandiso zveSiC zvinodzivirira kupisa zvishoma (resistivity >10⁵ Ω·cm) zvinogonesa kubatanidzwa kwe "high-frequency" (60 GHz+). |
| Midziyo yeIndasitiri | Masensa ekupisa kwakanyanya, matransformer emagetsi, mamonita enyukireya | Zvishandiso zveInSb seed substrates (0.17 eV bandgap) zvinopa simba remagineti rinosvika 300% @ 10 T. |
MaWafer eLiTaO₃ - Hunhu Hukuru
1. Kushanda Kwepamusoro KwemaPiezoelectric
· Ma piezoelectric coefficients akakwira (d₃₃~8-10 pC/N, K²~0.5%) anogonesa michina yeSAW/BAW ine frequency yakakwira ine kurasikirwa kwekuisa <1.5dB kwemafirita e5G RF
· Kubatana kwakanaka kwazvo kwemagetsi kunotsigira magadzirirwo efirita ebandwidth yakafara (≥5%) ezvishandiso zve sub-6GHz ne mmWave
2. Zvimiro zveOptical
· Kujeka kweBroadband (>70% transmission kubva ku400-5000nm) kune electro-optic modulators inosvika ku>40GHz bandwidth
· Kukwanisa kushanda zvakanaka kwemaziso kusingatsvedzereki (χ⁽²⁾~30pm/V) kunoita kuti pave nekukwanisa kugadzira second harmonic (SHG) zvakanaka muma laser systems
3. Kugadzikana Kwezvakatipoteredza
· Tembiricha yepamusoro yeCurie (600°C) inochengetedza mhinduro yepiezoelectric munzvimbo dzemotokari (-40°C kusvika 150°C)
· Kusashanda kwemakemikari anopesana neacids/alkalies (pH1-13) kunoita kuti zvive nyore kushandisa sensor yemaindasitiri.
4. Kugona Kwekugadzirisa
· Uinjiniya hwekutungamira: X-cut (51°), Y-cut (0°), Z-cut (36°) yemhinduro dzepiezoelectric dzakagadzirwa
· Sarudzo dzekushandisa mushonga weMg-doped (kudzivisa kukuvara kwemaziso), Zn-doped (yakawedzerwa d₃₃)
· Kupedzwa kwepamusoro: Kuporishwa kweEpitaxial-ready (Ra<0.5nm), ITO/Au metallization
MaWafer eLiTaO₃ - Mashandisirwo Akakosha
1. Mamodule eRF Front-End
· Mafirita e5G NR SAW (Band n77/n79) ane frequency yekupisa (TCF) <|-15ppm/°C|
· Ma resonator eBAW ane wideband yakawanda kwazvo eWiFi 6E/7 (5.925-7.125GHz)
2. Mifananidzo Yakabatanidzwa
· Mach-Zehnder modulators dzinomhanya zvakanyanya (>100Gbps) dzekutaurirana kwakabatana kwemaziso
· Zviyereso zveQWIP infrared zvine marefu enguva anogona kugadziriswa kubva pa3-14μm
3. Zvigadzirwa zvemagetsi zveMotokari
· Masensa ekupaka eUltrasonic ane frequency yekushanda >200kHz
· Matransducer eTPMS piezoelectric ari kurarama kupisa kwe -40°C kusvika 125°C
4. Masisitimu ekudzivirira
· Mafirita eEW receiver ane >60dB out-of-band relamp
· Mahwindo eIR anotsvaga zvombo anotumira mwaranzi ye3-5μm MWIR
5. Matekinoroji Ari Kubudirira
· Ma transducer e optomechanical quantum ekushandura kubva ku microwave kuenda ku optical
· PMUT arrays yekurapa ultrasound imaging (>20MHz resolution)
MaWafers eLiTaO₃ - Masevhisi eXKH
1. Kutarisirwa kweKutengeswa kweZvigadzirwa
· Kugadziriswa kweboule-to-wafer nemavhiki mana ekutarisira zvinodiwa zvakajairwa
· Kugadzirwa kwakagadziridzwa nemutengo unopa mukana we10-15% wemutengo uchienzaniswa nevanokwikwidza
2. Mhinduro Dzakagadzirwa Nemunhu
· Kuchekerera kwakanangana nekutarisa: 36°±0.5° Y-cut kuti SAW ishande zvakanaka
· Mishonga yakasanganiswa: MgO (5mol%) inoshandiswa pakushandisa ma optical applications
Masevhisi esimbi: Cr/Au (100/1000Å) electrode patterning
3. Rutsigiro rwehunyanzvi
· Kutsanangurwa kwezvinhu: XRD rocking curves (FWHM<0.01°), AFM surface analysis
· Kutevedzera mudziyo: FEM modeling yeSAW filter design optimization
Mhedziso
Mawafer eLiTaO₃ anoramba achigonesa kufambira mberi kwetekinoroji mukutaurirana kweRF, mafotoniki akabatanidzwa, uye masensa ezvakatipoteredza akaomarara. Hunyanzvi hweXKH hwezvinhu, kunyatsogadzira, uye rutsigiro rweinjiniya yemashandisirwo zvinobatsira vatengi kukunda matambudziko ekugadzira mumasisitimu emagetsi echizvarwa chinotevera.









