4inch 6inch Lithium niobate single crystal film LNOI wafer

Tsanangudzo Pfupi

Lithium niobate ine yakanakisa electro-optical, nonlinear uye piezoelectric zvivakwa.Nerubatsiro rwemhando yepamusoro diki uye nano processing tekinoroji, yakasanganiswa photonics michina yakavakirwa pa lithium niobate matete mafirimu (LNOI) pane insulators akagadzirwa zvakanyanya.Mune ramangwana, yakakwirira-inoshanda LNOI zvinhu zvichatsigira kuenderera mberi kweLNOI-based micro-nano optics, yakabatanidzwa photonics, uye microwave photonics.Kugadzirwa kwepamusoro-kushanda kweLNOI zvinhu kuchave danho rakakosha mukushandiswa kwemaindasitiri kwe lithium niobate optoelectronics zvishandiso.

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Iyo nzira yekugadzirira yeLNOI zvinhu inonyanya kukamurwa kuita matanho mana anotevera

(1) Iye maion akaiswa muX-cut lithium niobate material pane imwe simba, uye akaunzwa muchikamu chakaremara pane humwe hudzamu huri pasi pedenga re lithium niobate;

(2) Ion yakasimwa lithium niobate zvinhu inosungirirwa kune silicon substrate ine oxide layer kuti iite bonding chimiro;

(3) Chimiro chekubatanidza chakavharwa kuita kuti hurema hwakaunzwa neHe ion implantation ishanduke uye iunganidze kuita mitswe.Chekupedzisira, iyo lithium niobate yakapatsanurwa pamwe neyakaremara layer kuti iite yasara lithium niobate zvimedu uye LNOI wafers.

Zvishandiso uye zvakanakira zveLNOI wafer

1--Lithium niobate piezoelectric mafirimu (LNOI) ane yakakwirira piezoelectric coefficient uye dielectric constant, inogona kushandura simba remuchina kuita simba remagetsi kana simba remagetsi kuita simba remagetsi.Naizvozvo, inoshandiswa zvakanyanya mumunda we sensors, senge pressure sensors, acceleration sensors, tembiricha sensors uye zvichingodaro.Pamusoro pezvo, iyo lithium niobate piezoelectric firimu inogona zvakare kushandiswa mune acoustic zvishandiso uye vibration zvishandiso, senge piezoelectric ceramic transducer yakaoma piezoelectric ceramic sefa.

2-Kugadzikana kwelithium niobate piezoelectric firimu zvakare imwe yemabhenefiti ayo.Nekuda kwekugadzikana kwayo kwekristaro chimiro uye makemikari inertness, lithium niobate piezoelectric firimu inogona kushanda mukupisa kwepamusoro, hunyoro hwepamusoro, asidhi yakasimba, alkali yakasimba uye imwe nharaunda ine hutsinye, ine yakanaka corrosion resistance uye kusimba.

3-Lithium niobate piezoelectric firimu chinhu chitsva chepiezoelectric chine mashandiro akanaka uye kugadzikana, uye ine tarisiro yakakura yekushandisa.Nekuenderera mberi kwekuvandudzwa kwesainzi uye tekinoroji, lithium niobate piezoelectric firimu ichashandiswa mumaguta akawanda, zvichiunza kurerukirwa uye hunyanzvi muhupenyu hwevanhu.