4H/6H-P 6inch SiC wafer Zero MPD giredhi rekugadzira Giredhi Dummy Giredhi
4H/6H-P Rudzi rweSiC Composite Substrates Tafura yeparamende yakajairika
6 dhayamita ye inch Silicon Carbide (SiC) Substrate Tsanangudzo
| Giredhi | Kugadzirwa kweMPD kusinaGiredhi (Z) Giredhi) | Kugadzirwa KwakajairikaGiredhi (P) Giredhi) | Giredhi reDummy (D Giredhi) | ||
| Dhayamita | 145.5 mm~150.0 mm | ||||
| Ukobvu | 350 μm ± 25 μm | ||||
| Kudzidziswa kweWafer | -Offaxis: 2.0°-4.0°kunanga [1120] ± 0.5° ye4H/6H-P, Pa axis:〈111〉± 0.5° ye3C-N | ||||
| Kuwanda kwepombi dze micropombi | 0 cm-2 | ||||
| Kuramba | p-type 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| n-rudzi 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Kutungamira Kwakatsetseka Kwepakutanga | 4H/6H-P | -{1010} ± 5.0° | |||
| 3C-N | -{110} ± 5.0° | ||||
| Hurefu Hwepamusoro-soro | 32.5 mm ± 2.0 mm | ||||
| Kureba Kwechipiri Kwakatsetseka | 18.0 mm ± 2.0 mm | ||||
| Kudzidziswa kwechipiri kwakadzikama | Silicon yakatarisana mudenga: 90° CW. kubva kuPrime flat ± 5.0° | ||||
| Kusabatanidzwa kweMupendero | 3 mm | 6 mm | |||
| LTV/TTV/Uta /Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
| Kuomarara | ChiPolish Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Mipata yemucheto nechiedza chakasimba | Hapana | Kureba kwakaunganidzwa ≤ 10 mm, kureba kumwe chete ≤2 mm | |||
| Hex Plates Nechiedza Chakanyanya Kusimba | Nzvimbo yakaunganidzwa ≤0.05% | Nzvimbo yakaunganidzwa ≤0.1% | |||
| Nzvimbo dzePolytype Nechiedza Chakanyanya Kusimba | Hapana | Nzvimbo yakaunganidzwa ≤3% | |||
| Kubatanidzwa kweKabhoni Inoonekwa | Nzvimbo yakaunganidzwa ≤0.05% | Nzvimbo yakaunganidzwa ≤3% | |||
| Kukwenya Kwepamusoro peSilicon Nechiedza Chakanyanya Kusimba | Hapana | Kureba kwakawedzerwa ≤1 × dhayamita yechinwiwa | |||
| Edge Chips High By Intensity Light | Hapana chinobvumidzwa ≥0.2mm upamhi uye kudzika | 5 inobvumirwa, ≤1 mm imwe neimwe | |||
| Kusvibiswa kweSilicon pamusoro Nesimba Rakanyanya | Hapana | ||||
| Kurongedza | Kaseti yewafer yakawanda kana mudziyo wewafer mumwe chete | ||||
Zvinyorwa:
※ Miganhu yekukanganisika inoshanda pamusoro pewafer yese kunze kwenzvimbo isina kuvharwa nemupendero. # Mavanga acho anofanira kutariswa pachiso cheSi o
Wafer yemhando ye4H/6H-P ine 6-inch SiC ine Zero MPD grade uye kugadzirwa kwayo kana dummy grade inoshandiswa zvakanyanya mumashandisirwo emagetsi epamusoro. Kufambisa kwayo kwakanaka kwekupisa, voltage yakanyanya kupwanyika, uye kuramba nharaunda dzakaoma kunoita kuti ive yakakodzera kune magetsi emagetsi, akadai semaswichi ane voltage yakawanda uye ma inverter. Zero MPD grade inoita kuti ive nezvikanganiso zvishoma, zvakakosha kune michina inovimbika zvakanyanya. Wafer dzemhando yepamusoro dzinoshandiswa mukugadzira michina yemagetsi nemashandisirwo eRF, uko kushanda kwayo nekunyatsojeka kwakakosha. Wafer dzemhando yepamusoro, kune rumwe rutivi, dzinoshandiswa pakugadzirisa maitiro, kuyedza michina, uye prototyping, zvichiita kuti hunhu hurambe huripo munzvimbo dzekugadzira semiconductor.
Zvakanakira zveN-type SiC composite substrates zvinosanganisira
- Kufambisa Kwekupisa Kwakanyanya: Wafer ye4H/6H-P SiC inoderedza kupisa zvinobudirira, zvichiita kuti ive yakakodzera kushandiswa kwemagetsi pakupisa kwakanyanya uye nesimba guru.
- Kuparara Kwemagetsi Kwakanyanya: Kukwanisa kwayo kubata ma voltage akakwira pasina kukanganisa kunoita kuti ive yakakodzera kushandiswa kwemagetsi emagetsi uye mashandisirwo ekushandura ma voltage akakwira.
- Giredhi reZero MPD (Micro Pipe Defect): Kuwanda kwezvikanganiso zvishoma kunoita kuti zvive zvakavimbika uye zvinoshanda zvakanyanya, zvakakosha pakushandisa michina yemagetsi inoda kushanda zvakanyanya.
- Giredhi reKugadzira Zvinhu Zvakawanda: Yakakodzera kugadzirwa kukuru kwemidziyo ye semiconductor inoshanda zvakanyanya ine mwero wakasimba wehunhu.
- Giredhi reDummy rekuyedza uye kugadzirisa: Inogonesa kugadzirisa mashandiro, kuyedza michina, uye kuita prototyping pasina kushandisa mawafer anodhura zvakanyanya ekugadzira.
Zvose pamwe chete, mawafer e4H/6H-P 6-inch SiC ane Zero MPD grade, giredhi rekugadzira, uye dummy grade anopa mabhenefiti makuru ekugadzira zvishandiso zvemagetsi zvinoshanda zvakanyanya. Mawafer aya anobatsira zvikuru mukushandiswa kunoda kushanda pakupisa kwakanyanya, simba rakawanda, uye kushandurwa kwesimba zvinobudirira. Zero MPD grade inoita kuti pave nekukanganisika kudiki pakushanda kwemidziyo kwakavimbika uye kwakasimba, nepo mawafer emhando yekugadzira achitsigira kugadzirwa kukuru nekudzora kwakasimba kwemhando. Mawafer emhando yedummy anopa mhinduro inodhura yekuvandudza maitiro uye kugadzirisa michina, zvichiita kuti ive yakakosha pakugadzirwa kwema semiconductor kwakanyatsojeka.
Dhayagiramu Yakadzama
