12 inch sic super
Hunhu hwechigadzirwa
1. Yakakwirira inobata
2. Yakanyanya kuputsa munda simba: Iyo breakown munda Simba pane kagumi iyo yeSilicon, yakakodzera kune yakakwirira-yekumanikidza yekumanikidza.
3.Kunyorwa Kwako Bandgap: Iyo Bandgap ndeye 3.26ev (4h-sic), yakakodzera kupisa kwakanyanya uye yakakwira frequency application.
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5. Kugadzikana kwemakemikari: Yakasimba corrosion kuramba, yakagadzikana kuita mune yakanyanya tembiricha uye yakaoma nharaunda.
6. Saizi yakakura: 12 inch (300mm) Substrate, kugadzirisa kugadzirwa kwekugadzira, kuderedza unit mutengo.
7.wiyo urema density: Yakakwirira mhando yekristaro kukura tekinoroji yekukura kuti ive yakaderera kuremara kwehurema uye kukwirira kwakanyanya.
Chigadzirwa chikuru application nzira
1. Simba Magetsi:
Mosfets: Inoshandiswa mumotokari dzemagetsi, motor endhusamo anotyaira uye mashanduri ane simba.
Diodes: yakadai seyinchetky diodes (SBD), inoshandiswa kunyatsoita zvekunyorera uye kuchinjisa zvinhu zvekushandisa.
2. RF zvishandiso:
RF Simba Anifier: Inoshandiswa mu 5G kutaurirana zvigadziko uye Satellite kutaurirana.
Microwave midziyo: yakakodzera kune radar uye isina waya yekutaurirana masisitimu.
3. Mota nyowani idzva:
Magetsi ekufambisa masisitimu: vatambi vepamota uye vabati vemagetsi mota.
Kuchaja Pile: Magetsi Module ekukurumidza kubhadharisa michina.
4. Maindasitiri ekushandisa:
Yakakwira Voltage Inverter: Zvekushandisa maindasitiri ekudzora uye simba manejimendi.
Smart Grid: yeHVDC Kuendesa uye Simba Magetsi Shanduko.
5. Aerospace:
Yakakwira tembiricha yemagetsi: yakakodzera nzvimbo dzakanyanya tembiricha dzemidziyo yeaerospace.
6. Tsamba yekutsvaga:
Wide Bandgap Semiconductor Tsvaga: Kukura kwezvinhu zvitsva zvemukati zvemukati zvemhando uye zvishandiso.
Iyo 12-inch silicon carbide subbide rudzi rwekukwira-masevhisi emhando yepamusoro substrate nezvinhu zvakakwirira zvekutora Inoshandiswa zvakanyanya mune zvemagetsi zvigadzirwa, radio mashiripiti, mota nyowani, kudzora kwemaindasitiri uye kushushikana, uye zvinhu zvakakosha kusimudzira kusimudzira kwechizvarwa chinotevera uye chakakwirira-simba zvemagetsi midziyo yemagetsi.
Nepo Silicon Carbide parizvino ane mashoma ekushandisa magetsi akadai seAR magetsi, miniaturine emagetsi ekutsigira marimi, akanyanya-masimba masimba ekupa mari yekugadzirisa Parizvino, kukura kukuru kweSilicon Carbide Subbide
XKH yakazvipira kupa mhando yepamusoro 12 "SIC subsrates ine yakazara technical tsigiro uye masevhisi, kusanganisira:
1. Yakagadzirirwa kugadzirwa: Zvinoenderana neVatengi inoda kupa basa rakasiyana, Crystal kutarisisa uye pamusoro pehurumende yerevi.
2. Kugadzirisa Optimization: Ipa vatengi nerutsigiro rwehunyanzvi rwekukura kwe epitaxial, mudziyo wekugadzira uye mamwe maitiro ekugadzirisa zvigadzirwa zvechigadzirwa.
3. Kuedza uye Certification: Ipa zvakasimba kuremara kutarisa uye mhando yemhando yeCertification kuve nechokwadi chekuti substrate inosangana neindasitiri zviyero.
4.R & D Kubatana: Joinly Kukudziridza Nyowani Silicon Cardide zvishandiso neVatengi kusimudzira hunyanzvi hwekuvandudzwa kwehunyanzvi.
Data chati
1 2 inch silicon carbide (sic) substrate kutaurisa | |||||
Giredhi | Zoromvd Production Giredhi (Z giredhi) | Kugadzirwa kwakajairika Giredhi (P Giredhi) | Dummy giredhi (D giredhi) | ||
Diameter | 3 0 0 mm ~ 1305mm | ||||
Ukobvu | 4h-n | 750μm ± 15 μm | 750μm ± 25 μm | ||
4H -SI | 750μm ± 15 μm | 750μm ± 25 μm | |||
Wafer kutarisisa | Off axis: 4.0 ° kusvika ku <1120> ± 0.5 ° ye4h-n, pa Axis: <0001> 00 0.5 ° | ||||
Micropipe density | 4h-n | ≤0.4CM-2 | ≤4cm-2 | ≤25cm-2 | |
4H -SI | ≤5CM-2 | ≤10cm-2 | ≤25cm-2 | ||
Kuramba | 4h-n | 0.015 ~ 0.024 ω · cm | 0.015 ~ 0.028 ω · cm | ||
4H -SI | ≥1E10 ω · cm | ≥1E5 · cm cm | |||
Primary flat the testation | {10-10} ± 5.0 ° | ||||
Yekutanga Flat Kureba | 4h-n | N / a | |||
4H -SI | Notch | ||||
Kutsamisa kusarudzika | 3 mm | ||||
LTV / TTV / Bow / Warp | ≤5μm / ≤15μm / ≤35 ≤M / ≤55 μm | ≤5μm / ≤15μm / ≤35 □ μM / ≤55 □ μM | |||
Roughness | Poland ra≤1 nm | ||||
Cmp ra≤0.2 nm | Ra00.5 nm | ||||
Mupendero makatsemuka neyekupedzisira mwenje mwenje Hex mahwendefa nemwenje wakanyanya kujeka Polytype nzvimbo neyekupedzisira mwenje mwenje Kuonekwa kwekuona carbon Silicon Surven Scatches neKhakava Chiedza Chiedza | Hapana Inharaunda yeCumulative ≤0.05% Hapana Inharaunda yeCumulative ≤0.05% Hapana | Kureba kufudza ± 20 mm, imwe chete kureba≤2 mm Nzvimbo yekukwira ≤0.1% Cumulative Area≤3% Cumulative Area ≤3% Kuwanda kureba≤1 × Wafer Dinamita | |||
Edge machipisi neyekupedzisira kuwanda kwechiedza | Hapana anotenderwa ≥0.2mm upamhi uye kudzika | 7 Inotenderwa, ≤1 mm imwe neimwe | |||
(Tsd) kurongedza screw dislocation | ≤500 cm-2 | N / a | |||
(BPD) base ndege dislocation | ≤1000 cm-2 | N / a | |||
Silicon Surpain Kusvibiswa neKhadzikidzo Yakanyanya Chiedza | Hapana | ||||
Kurongedza | Multi-wafer cassette kana single wafer mudziyo | ||||
Zvinyorwa: | |||||
1 Kuremara miganhu inoshanda kune yakazara chifukidzo kunze kwekunze kwemupendero wekunze nzvimbo. 2Makaravha anofanirwa kuongororwa nechiso chete chete. 3 Dhivha dislocation data inongobva kuna Koh isina kuchinjiswa. |
Xkh icharamba ichishandiswa pakutsvaga nekuvandudza kusimudzira babamunhurume gumi nevaviri. Nekuderedza mari uye kuwedzera kugona, Xkh kuchaunza budiriro kune Semiconductor Indasitiri.
Dhigiramu Rakakurisa


