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Sisitimu Yekuyera Magirazi eWafer Yekuyerwa Kwemakristaro

Sisitimu Yekuyera Magirazi eWafer Yekuyerwa Mufananidzo Wakatsanangurwa
  • Sisitimu Yekuyera Magirazi eWafer Yekuyerwa Kwemakristaro
  • Sisitimu Yekuyera Magirazi eWafer Yekuyerwa Kwemakristaro
  • Sisitimu Yekuyera Magirazi eWafer Yekuyerwa Kwemakristaro
  • Sisitimu Yekuyera Magirazi eWafer Yekuyerwa Kwemakristaro

Tsananguro pfupi:

Chishandiso chekutarisa wafer chishandiso chakanyatsogadzirwa chinoshandisa misimboti yeX-ray diffraction kuti ivandudze mashandiro ekugadzira semiconductor uye sainzi yezvinhu nekuona magadzirirwo ecrystallographic. Zvikamu zvayo zvikuru zvinosanganisira sosi yeX-ray (semuenzaniso, Cu-Kα, 0.154 nm wavelength), goniometer yekunyatsoongorora (angular resolution ≤0.001°), uye ma detectors (CCD kana scintillation counters). Nekutenderera masampuli uye kuongorora mapatani e diffraction, inoverenga ma crystallographic indices (semuenzaniso, 100, 111) uye lattice spacing ne ±30 arcsecond accuracy. Sisitimu iyi inotsigira mashandiro ega, vacuum fixation, uye multi-axis rotation, inoenderana nema wafers e 2-8-inch ekuyera nekukurumidza edges dzewafer, reference planes, uye epitaxial layer alignment. Mashandisirwo makuru anosanganisira cutting-oriented silicon carbide, sapphire wafers, uye turbine blade high-temperature performance validation, zvichiwedzera zvakananga chip electrical properties uye yield.


Zvinhu zvirimo

Nhanganyaya yeMidziyo

Zvishandiso zvekutungamira mawafer zvishandiso zvekugadzirisa zvinhu zvakanyatsogadzirwa zvichibva pamisimboti yeX-ray diffraction (XRD), zvinonyanya kushandiswa mukugadzira semiconductor, zvinhu zve optical, ceramics, uye mamwe maindasitiri e crystalline material.

Zvishandiso izvi zvinosarudza kurongeka kwekristaro uye zvinotungamira maitiro ekucheka kana kupukuta chaiwo. Zvinhu zvikuru zvinosanganisira:

  • Kuyera kwakanyatsojeka:Inokwanisa kugadzirisa mapuraneti ekristaro ane resolution yemakona kusvika ku0.001°.
  • Kuenderana kukuru kwemuenzaniso:Inotsigira mawafer anosvika 450 mm mudhayamita uye huremu hwe30 kg, yakakodzera zvinhu zvakaita sesilicon carbide (SiC), sapphire, uye silicon (Si).
  • Dhizaini yemodular:Mashandiro anokura anosanganisira ongororo yerocking curve, 3D surface defect mapping, uye midziyo yekurongedza zvinhu kuti ishandiswe mu multi-sample processing.

MaParameter Akakosha Ehunyanzvi​

Chikamu cheParamende

Maitiro/Magadzirirwo Akajairika

Chitubu cheX-ray​

Cu-Kα (0.4×1 mm focal spot), 30 kV acceleration voltage, 0–5 mA adjustable tube current

Nzvimbo yeAngular

θ: -10° kusvika +50°; 2θ: -10° kusvika +100°

Kururama​​

Kugadziriswa kwekona yekutsvedza: 0.001°, kuonekwa kwezvikanganiso pamusoro: ±30 arcseconds (kutenderera kwemupendero)

Kumhanya kweScanning

Omega scan inopedzisa kurongeka kwakazara kwe lattice mumasekondi mashanu; Theta scan inotora ~ 1 miniti

Danho remuenzaniso

V-groove, pneumatic suction, multi-angle rotation, inoenderana nemawafer ane 2–8-inch

Mabasa Anowedzera

Kuongorora makombama emudenga, kugadzira mamepu e3D, mudziyo wekuisa zvinhu mudenga, kuona zvikanganiso zvemaziso (kukwenya, maGB)

Nheyo yekushanda​

1. Nheyo yeDiffraction yeX-ray​

  • MaX-ray anosangana nemaatomu nuclei nemaerekitironi ari mukristaro lattice, zvichigadzira mapatani e diffraction. Mutemo waBragg (​nλ = 2d sinθ​​) unodzora hukama huripo pakati pemakona e diffraction (θ) uye lattice spacing (d).
    Ma detectors anobata mapatani aya, ayo anoongororwa kuti vagadzirezve chimiro che crystallographic.

2. Tekinoroji yeOmega Scanning​​

  • Kiristaro inotenderera nguva dzose yakatenderedza axis yakatarwa ukuwo X-ray ichiivhenekera.
  • Ma detector anounganidza masaini ekuparadzanisa pakati pema crystallographic planes akawanda, zvichiita kuti pave neruzivo rwakakwana rwekutenderera kwe lattice mumasekondi mashanu.

3. Kuongorora Kukombama Kwematombo​

  • Kona yekristaro yakagadziriswa ine maekisesaizi akasiyana-siyana eX-ray kuti ione upamhi hwepamusoro (FWHM), ichiongorora zvikanganiso zve lattice uye kusvuta.

4. Kudzora Otomatiki​

  • Ma PLC ne touchscreen interfaces zvinogonesa ma angle ekucheka akagadziriswa, mhinduro chaiyo, uye kubatanidzwa nemichina yekucheka kuti idzore closed-loop.

Chishandiso chekudzidzisa maWafer 7

Zvakanakira uye Zvimiro​

1. Kunyatsojeka uye Kushanda

  • Kururama kwekona ±0.001°, kugadziriswa kwekuona zvikanganiso <30 arcseconds.
  • Kumhanya kweOmega scan kunokurumidza 200× kupfuura Theta scans yechinyakare.

2. Kuchinja-chinja uye Kugona Kukura​

  • Inogona kuwedzerwa kushandiswa kune mamwe mashandisirwo akakosha (semuenzaniso, maSiC wafers, mashizha eturbine).
  • Inoshanda pamwe chete neMES systems kuti iongorore kugadzirwa kwezvigadzirwa panguva chaiyo.

3. Kuenderana uye Kugadzikana​

  • Inogamuchira mienzaniso isina chimiro chakasiyana (semuenzaniso, matombo esapphire akatsemuka).
  • Dhizaini inotonhodzwa nemhepo inoderedza zvinodiwa pakugadzirisa.

4. Kushanda kweUngwaru​

  • Kugadzirisa nekudzvanya kamwe chete uye kugadzirisa mabasa akawanda.
  • Kugadzirisa otomatiki nemakristaro ekutarisa kuderedza zvikanganiso zvevanhu.

Chishandiso Chekudzidzisa Wafer 5-5

Mashandisirwo

1. Kugadzira Semiconductor​​

  • Kurongeka kweWafer dicing: Kunosarudza marongero eSi, SiC, GaN wafer kuti zvikwanise kucheka zvakanaka.
  • Kugadzira mapaipi ezvikanganiso: Kunoona mavanga kana kutsemuka kwenzvimbo kuti zvikwanise kuwedzera kugona kwezvimedu.

2. Zvinhu zveOptical​

  • Makristasi asina kurongeka (semuenzaniso, LBO, BBO) ezvigadzirwa zve laser.
  • Chiratidzo chesafire wafer pamusoro pema LED substrates.

3. Zviumbwa zvesimbi nemakompositi

  • Inoongorora kurongeka kwezviyo muSi3N4 neZrO2 kuti zvishandiswe pakupisa kwakanyanya.

4. Tsvagiridzo uye Kudzora Hunhu​

  • Mayunivhesiti/marabhoritari ekuvandudza zvinhu zvitsva (semuenzaniso, ma alloys ane entropy yakawanda).
  • Industrial QC kuve nechokwadi chekuti batch inowirirana.

Mabasa eXKH

XKH inopa rutsigiro rwakakwana rwehunyanzvi hwekushandisa pakugadzira zvishandiso zve wafer orientation, kusanganisira kuisa, kugadzirisa ma process parameter, rocking curve analysis, uye 3D surface defect mapping. Mhinduro dzakagadzirirwa (semuenzaniso, ingot stacking technology) dzinopihwa kuti dziwedzere kushanda zvakanaka kwekugadzirwa kwezvinhu zve semiconductor uye optical neanopfuura 30%. Chikwata chakatsaurirwa chinodzidzisa panzvimbo yacho, ukuwo rutsigiro rwekureta 24/7 uye kutsiva zvikamu zvespare nekukurumidza kunoita kuti michina ive yakavimbika.

  • Yakapfuura:
  • Zvinotevera:

    • Zvigadzirwa Zvakabatana

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