Danho reUltra-Precision SiC Air-Bearing

Mufananidzo Unoratidza Stage Inotakura Mhepo yeSiC Yakanyatsogadzirwa

Tsananguro pfupi:

Nekushanduka kuri kuramba kuchiita indasitiri ye semiconductor, michina yekugadzirisa nekuongorora inoda kushanda kwakawanda. Zvichibva pahunyanzvi hwakakura mukutonga kufamba uye nanometer-level positioning, takagadzira planar H-type dual-axis ultra-precision air-bearing stage.

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Zvinhu zvirimo

Dhayagiramu Yakadzama

Pfupiso

Yakagadzirwa nechimiro checeramic chesilicon carbide (SiC) chakagadziriswa uye tekinoroji yemhepo inokwana, dariro iri rinopa kururama kwakanyanya, kuomarara, uye kupindura kwakasimba. Yakakodzera zvikuru kune:

Kugadziriswa uye kuongororwa kwe semiconductor
Kugadzirwa kwe micro/nano uye metrology
Kucheka nekupukuta nhunzi pachikero chenanometer
Kutarisa nekukurumidza nekunyatsojeka

Zvinhu Zvikuru

Nzira yekufambisa mweya yeSiCkune kuomarara kwakanyanya uye kunyatsojeka
Simba guru: kumhanya kusvika 1 m/s, kumhanya kusvika 4 g, kugadzikana nekukurumidza
Gantry ine madhiraivha maviri eY-axisinovimbisa mutoro wakakwira uye kugadzikana
Sarudzo dzeEncoder: optical grating kana laser interferometer
Kurongeka kwenzvimbo: ± 0.15 μm;kudzokorora: ±75 nm
Kurongeka kwetambo kwakagadziridzwayekugadzirwa kwakachena uye kuvimbika kwenguva refu
Zvigadziriso zvinogoneka kugadziriswakune zvinodiwa zvinoenderana nezvinodiwa

Dhizaini Yakanyatsojeka & Magadzirirwo Akananga, Asina Kubatana

SiC Ceramic Furemu: ~5 × kuomarara kwearuminiyamu alloy uye ~5 × kuwedzera kupisa kwakaderera, zvichiita kuti kugadzikana kwekukurumidza uye kusimba kwekupisa kuvepo.
Mhepo Inobereka Inoripwa: Kugadzirwa kwechinhu chacho kunowedzera kuomarara, mutoro, uye kugadzikana kwekufamba.
Kushanda Kwakasimba: Inotsigira kumhanya kwe1 m/s uye kukurumidza kwe4 g, yakakodzera maitiro ekushandisa simba rakawanda.
Kubatanidzwa Kwakatsetseka: Inoenderana nemasisitimu ekuparadzanisa ma "vibration", ma "rotary stages", ma "tilt modules", uye mapuratifomu ekubata ma "wafer".
Kutarisira Cable: Radius yekukotama inodzorwa inoderedza kushushikana kwenguva yakareba yebasa.

Mota isina Core Linear: Kufamba kwakapfava pasina simba rekuvharira.
Kutyaira Kwemota Dzakawanda: Kuiswa kwemota mundege kunovandudza kutwasuka, kutsetseka, uye kurongeka kwekona.
Kuzviparadzanisa Nekupisa: Mota dzakaparadzaniswa nechimiro chedanho; dzimwe nguva dzinoda kutonhodzwa nemhepo kana mvura kuti dzishande nemavhiri makuru.

Magadzirirwo

Muenzaniso	400-400	500-500	600-600
Matemo	X (scan) / Y (danho)	X (scan) / Y (danho)	X (scan) / Y (danho)
Kufamba (mm)	400/400	500/500	600/600
Kururama (μm)	± 0.15	± 0.2	± 0.2
Kudzokorora (nm)	±75	±100	±100
Kugadziriswa (nm)	0.3	0.3	0.3
Kumhanya Kwakanyanya (m/s)	1	1	1
Kukurumidzisa (g)	4	4	4
Kutwasuka (μm)	± 0.2	± 0.3	± 0.4
Kugadzikana (nm)	±5	±5	±5
Mutoro Mukuru (kg)	20	20	20
Kukanda/Kutenderera/Kuyamwa (arc-sec)	±1	±1	±1

Mamiriro Ebvunzo:

Mhepo inobuda: yakachena, yakaoma; dova ≤ 0°F; kusefa kwezvikamu ≤ 0.25 μm; kana 99.99% nitrogen.
Kururama kwakayerwa 25 mm pamusoro penzvimbo yepakati pechikamu pa20±1 °C, 40–60% RH.

Mashandisirwo

Semiconductor lithography, kuongorora, uye kubata wafer
Kugadzirwa kweMicro/nano uye kuyera kwakarurama
Kugadzira ma optics emhando yepamusoro uye interferometry
Nyanzvi dzezvemuchadenga nesainzi yepamusoro-soro

Mibvunzo Inowanzo bvunzwa - Silicon Carbide Air-Bearing Stage

1. Chii chinonzi nhanho ine mhepo?

Danho rine mhepo rinoshandisa firimu rakatetepa remhepo yakamanikidzwa pakati pedanho negwara rekufambisa kuti ripeisingakweshe, haina kupfeka, uye kufamba kwakapfava zvakanyanyaKusiyana nemabheyaringi emakanika echinyakare, inobvisa kutsvedza kwetsvedza, inopa kururama kwemazinga e nanometer, uye inotsigira kuvimbika kwenguva refu.

2. Sei tichifanira kushandisa silicon carbide (SiC) pakugadzira chikuva?

Kuomarara kwakanyanya: ~5× iyo yearuminiyamu alloy, zvichideredza kushanduka panguva yekufamba kwesimba.
Kuwedzera kwekupisa kushoma: ~5× yakaderera pane aruminiyamu, zvichichengetedza kururama kana tembiricha yachinja.
Huremu hwakareruka: Kuwanda kwakaderera kana tichienzanisa nesimbi, zvichiita kuti ishande nekukurumidza uye nekukurumidza.
Kugadzikana kwakanaka kwazvo: Kunyorovesa kwepamusoro uye kuomarara kwenzvimbo yacho zvakanyatsonaka.

3. Danho rinoda mafuta here kana kugadziriswa?

Hapana mafuta echinyakare anodiwa sezvo painehapana kubatana kwemakanikaKugadziriswa kunokurudzirwa kunosanganisira:

Kupamhepo yakachena, yakaoma yakamanikidzwa kana nitrogen
Kuongororwa kwemafirita nemidziyo yekuomesa nguva nenguva
Kutarisa tambo uye masisitimu ekutonhodza

4. Ndezvipi zvinodiwa pakufambiswa kwemhepo?

Nzvimbo yedova: ≤ 0 °F (≈ –18 °C)
Kusefa kwezvikamu: ≤ 0.25 μm
Mhepo yakachena, yakaoma kana 99.99% nitrogen yakachena
Kumanikidzwa kwakagadzikana nekuchinja-chinja kushoma

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.