Silicon Carbide (SiC) Yakatsetseka Furnace Tube

Silicon Carbide (SiC) Horizontal Furnace Tube Mufananidzo Wakaratidzwa

Tsananguro pfupi:

Tubhu reSilicon Carbide (SiC) Horizontal Furnace rinoshanda senzvimbo huru yekugadzira zvinhu uye muganhu wekumanikidzwa kwemaitiro ekupisa kwakanyanya uye kurapwa kwekupisa kunoshandiswa mukugadzira semiconductor, kugadzira photovoltaic, uye kugadzirisa zvinhu zvepamusoro.

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Zvinhu zvirimo

Dhayagiramu Yakadzama

Kuisa Chigadzirwa Pachinzvimbo & Kukosha Kwechigadzirwa

Yakagadzirwa nechimiro cheSiC chimwe chete, chakagadzirwa pamwe chete nechikamu chekudzivirira cheCVD-SiC chakakora, chubhu iyi inopa kufambisa kwekupisa kwakanyanya, kusvibiswa kushoma, kusimba kwakasimba kwemuchina, uye kuramba makemikari zvakanyanya.
Dhizaini yayo inoita kuti tembiricha ifanane zvakanyanya, nguva dzekushanda dzakareba, uye kushanda kwayo kwenguva refu kwakasimba.

Zvakanakira Zvikuru

Inowedzera kugadzikana kwekushisa kwemuchina, kuchena, uye kushanda zvakanaka kwemidziyo yese (OEE).
Inoderedza nguva yekushanda kwekuchenesa uye inowedzera nguva yekutsiva, ichideredza mari yese yekuva muridzi (TCO).
Inopa kamuri rinogara kwenguva refu rinokwanisa kubata makemikari anodziya zvakanyanya uye ane chlorine yakawanda pasina njodzi yakawanda.

Nzvimbo Dzinoshanda & Hwindo Remaitiro

Magasi anokonzera simba: okisijeni (O₂) nemimwe misanganiswa inooxidiza
Magasi anotakura/anodzivirira: nitrogen (N₂) uye magasi asina kuchena zvakanyanya
Mhando dzinoenderana: magasi ane chlorine (maitiro ekugadzirisa kuzara kwemvura uye kugara kwenguva refu anodzorwa)

Maitiro Akajairika: kuoma/kunyorova, annealing, diffusion, LPCVD/CVD deposition, surface activation, photovoltaic passivation, functional thin-film growth, carbonization, nitridation, nezvimwewo.

Mamiriro Ekushanda

Tembiricha: tembiricha yemukamuri kusvika 1250 °C (bvumira 10–15% yekuchengetedzwa zvichienderana nedhizaini yehita uye ΔT)
Kumanikidzwa: kubva pamazinga evacuum ane pressure yakaderera/LPCVD kusvika padanho rakanaka riri pedyo nemhepo (spec yekupedzisira pakutenga kwekutenga)

Zvishandiso & Magadzirirwo Ezvinhu

Monolithic SiC Body (Yakagadzirwa Nekuwedzera)

β-SiC yakakura kana kuti SiC ine zvikamu zvakawanda, yakavakwa sechinhu chimwe chete—hapana majoini akasungirirwa kana misono inogona kudonha kana kugadzira nzvimbo dzekushushikana.
Kupisa kwakanyanya kunogonesa kukurumidza kupindura kwekupisa uye kuenzana kwakanaka kwekushisa kweaxial/radial.
Kuwanda kwekupisa kwakaderera uye kwakasimba (CTE) kunovimbisa kugadzikana kwehukuru uye zvisimbiso zvakavimbika pakupisa kwakakwira.

Kuputira kweCVD SiC Kunoshanda

Nzvimbo yacho yakachengetwa yakachena kwazvo (tsvina yepamusoro/yekuputira < 5 ppm) kudzivirira kugadzirwa kwezvikamu uye kuburitswa kwemaion esimbi.
Kusashanda zvakanaka kwemakemikari pakurwisa magasi ane chlorine uye oxidizing, zvichidzivirira kurwiswa kana kudzoserwa kwenzvimbo pamadziro.
Sarudzo dzehukobvu hwenzvimbo dzakasiyana kuti dzienzane nekusagadzikana kwengura uye kugadzikana kwekupisa.

Kubatsirwa Kwakabatana: muviri weSiC wakasimba unopa simba rekuvaka uye kupisa, ukuwo CVD layer ichivimbisa kuchena uye kuramba ngura kuti ive yakavimbika uye ishande zvakanaka.

Zvinangwa Zvikuru Zvekushanda

Kupisa kwekushandisa nguva dzose:≤ 1250 °C
Tsvina ye substrate yakawanda:< 300 ppm
Tsvina yeCVD-SiC pamusoro:< 5 ppm
Kushivirira kwehukuru: OD ± 0.3–0.5 mm; coaxiality ≤ 0.3 mm/m (yakasimba inowanikwa)
Kukombama kwemadziro emukati: Ra ≤ 0.8–1.6 µm (inosarudzwa kupedzwa kwakakweshwa kana kuti pedyo negirazi)
Mwero wekubuda kwemvura muHelium: ≤ 1 × 10⁻⁹ Pa·m³/s
Kutsungirira kupisa-kuvhunduka: inopona kupisa/kutonhora kakawanda pasina kutsemuka kana kupwanyika
Kugadzirwa kwenzvimbo yekugezera: ISO Kirasi 5–6 ine mazinga echinyakare cheparticle/metal-ion akasimbiswa

Magadzirirwo & Sarudzo

Jiometri: OD 50–400 mm (yakakura kana tichitarisa ongororo) ine chivakwa chakareba chechidimbu chimwe chete; ukobvu hwemadziro hwakagadzirirwa simba remakanika, huremu, uye kupisa.
Magadzirirwo ekupedzisira: flanges, bell-mouth, bayonet, locating rings, O-ring grooves, uye custom pump-out kana pressure ports.
Zviteshi zvinoshanda: nzira dzekufambisa zvinhu mu thermocouple, zvigaro zvegirazi, nzira dzekupinda negasi dzinopfuura nepakati—zvese zvakagadzirwa kuti zvishande zvakanaka uye zvisingadhuri kana mvura ichidonha.
Zvirongwa zvekuputira: rusvingo rwemukati (rwakajairwa), rusvingo rwekunze, kana kufukidza kwakazara; dziviriro yakanangwa kana ukobvu hwakarongwa munzvimbo dzine njodzi huru.
Kucheneswa uye kurapwa pamusoro: magiredhi akawanda ekuoma, kuchenesa kwe ultrasonic/DI, uye maitiro ekubika/kuomesa akagadzirwa nemaoko.
Zvishongedzo: graphite/ceramic/metal flanges, zvisimbiso, nzvimbo dzinoshandiswa, maoko ekubata, uye machira ekuchengetera zvinhu.

Kuenzanisa Kwekushanda

Chiyero	Chubhu yeSiC	Chubhu yeQuartz	Chubhu yeAlumina	Graphite Chubhu
Kufambisa kwekupisa	Yakakwirira, yunifomu	Zvakaderera	Zvakaderera	Yakakwirira
Simba/kukwira kwemhepo zvakanyanya	Zvakanakisa	Zvakanaka	Kugona	Yakanaka (inonzwa kuoxidation)
Kuvhunduka kwekupisa	Zvakanakisa	Kusasimba	Zviri pakati nepakati	Zvakanakisa
Kuchena / maayoni esimbi	Yakanaka kwazvo (yakaderera)	Zviri pakati nepakati	Zviri pakati nepakati	Murombo
Kuoxidation & Cl-chemistry	Zvakanakisa	Zvakanaka	Kugona	Hurombo (hunooxidisa)
Mutengo uchienzaniswa nebasa renguva dzose	Hupenyu hwepakati / hurefu	Yakaderera / pfupi	Pakati nepakati / pakati nepakati	Pakati nepakati / nharaunda ine muganho

Mibvunzo Inowanzo bvunzwa (Mibvunzo Inowanzo bvunzwa)

Mubvunzo 1. Sei uchifanira kusarudza muviri weSiC wakadhindwa ne3D?
A. Inobvisa misono nemabhureki anogona kudonhedza kana kudzikamisa kushushikana, uye inotsigira majometri akaomarara nekururama kwakafanana.

Mubvunzo wechipiri. Ko SiC inodzivirira magasi ane chlorine here?
A. Hongu. CVD-SiC haina simba rakawanda mukati memiganhu yakatarwa yekupisa nekumanikidzwa. Kune nzvimbo dzine njodzi huru, machira akakora ari munzvimbo iyoyo uye masisitimu ekubvisa/kuburitsa ekisipoti anokurudzirwa.

Mubvunzo 3. Inoshanda sei kupfuura machubhu e quartz?
A. SiC inopa hupenyu hurefu hwekushanda, tembiricha yakafanana zviri nani, kusvibiswa kwezvikamu/simbi-ion kwakaderera, uye TCO yakagadziridzwa—kunyanya kupfuura ~900 °C kana mumhepo ine oxidizing/chlorinated.

Mubvunzo wechina. Chubhu inogona here kubata kupisa kunokurumidza?
A. Ehe, kana ΔT yakanyanya uye nhungamiro dze ramp-rate zvikacherechedzwa. Kubatanidza muviri weSiC wakakwira neCVD yakatetepa kunotsigira kuchinja kwekupisa nekukurumidza.

Mubvunzo 5. Kutsiva kunodiwa riini?
A. Dzorera chubhu kana ukaona kuputika kweflange kana kumucheto, makomba ekufukidza kana kupararira kwemvura, kuwedzera kwehuwandu hwekudonha kwemvura, kudonha kwakanyanya kweprofile yekupisa, kana kugadzirwa kwezvikamu zvisina kujairika.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.