Silicon Carbide Ceramic Tray Sucker Silicon Carride Ceramic Tembera Supply Tembiricha Sinture Kuchinjisa Tsika Kuchinjika
Main Main:
1. Silicon carbide ceramic tray
- Kuomarara kwakakwirira uye kupfeka kurwisa: kuomarara kuri pedyo nedhaimani, uye kunogona kutsungirira pakukasira mumvura mune wafer kugadzirisa kwenguva yakareba.
- High Thermal Distrive uye Low Formal Expansion Coefficient: Kukurumidza kupisa kusvibisa uye kudzikisira kudzikisira, kudzivisa kusvibiswa kunokonzerwa nekunetseka kwekuuraya.
- Kukwira kwepamhepo uye kupedzisa kwepamhepo kuri kusvika kune iyo micron
Kumakemikari Kugadzikana: Yakasimba Corrosion Rishance, yakakodzera kune yakanyorova kuchenesa uye maitiro ekuchema mumicemononductor kugadzira.
2. Silicon carbide ceramic tube
- Yakanyanya kupisa kudzikisira: Inogona kushanda mumamiriro ekunze epamusoro pamusoro pe1 1600 ° C kwenguva yakareba, yakakodzera semicononductor yakakwira tembiricha.
Yakanakisa Corrosion Rishance: Kurwisa Acids, Alkalis uye akasiyana emakemikari sol sol sol sol sol sol sol, yakakodzera kune vane hutsinye maitiro emamiriro ezvinhu.
- Kuomarara kwakakwirira uye kupfeka kurwisa: dzivisa kujekesa kwemukati uye nemuchina wakapfeka, wedzera hupenyu hwebasa.
- High Thermal Discount uye Low Coefficient yeKuwedzera Kuwedzera: Kukurumidza Kubata Kwekupisa uye Dimensional Kugadzikana, kuderedza kuremara kana kupaza kwakakonzerwa nekumanikidza kwekuuraya.
Chigadzirwa paramende:
Silicon carbide ceramic tray paramende:
(Zvinhu zvivakwa) | (Unit) | (SSIC) | |
(SIC Zvemukati) | (Wt)% | > 99 | |
(Avhareji yeiyo size size) | Micron | 4-10 | |
(Density) | kg / dm3 | > 3.14 | |
(Fungidziro iripo) | VO1% | <0.5 | |
(Vickers kuomesa) | HV 0.5 | GPA | 28 |
* () Simba rinosindimara * (matatu mapoinzi) | 208c | MPA | 450 |
(Simba Rekumanikidza) | 208c | MPA | 3900 |
(Elastic Modulus) | 208c | GPA | 420 |
(Kupunzika kuoma) | MPA / M '% | 3.5 | |
(Thermal Discover) | 20 ° ºc | W / (m * k) | 160 |
(Kuramba) | 20 ° ºc | Sohm.cm | 106-108 |
(Inowedzera yekuwedzera inoenderana) | A (RT ** ... 80ºC) | K-1 * 10-6 | 4.3 |
(Maximum anoshanda tembiricha) | oºc | 1700 |
Silicon carbide ceramic tube paramende:
Zvinhu | Index |
α-sic | 99% min |
Kuparadzwa kunooneka | 16% max |
Bulk density | 2.7g / cm3 min |
Kukotama Simba pakudziya kwakanyanya | 100 MPA Minin |
Coefficient yekuwedzera kwekuwedzera | K-1 4.7x10 -6 |
Coefficient yeTermal Discount (1400ºc) | 24 w / mk |
Max. Kushanda tembiricha | 1650ºC |
Zvikuru zvikumbiro:
1. Silicon carbide ceramic ndiro
- Wafer kucheka uye kupukuta: anoshanda sechikuva chekubereka kuve nechokwadi chekunyatsojeka uye kugadzikana panguva yekucheka uye kupukuta.
- Lithography process: Iyo wafer yakatemwa muLithography muchina kuti ive nechokwadi chekunyora pakakwirira panguva yekuratidzwa.
- Chemical Mechanic Polising (CMP): inoita sechikuva chimbiso chekupukuta mapuru, kupa yunifomu kudzvinyirira uye kupisa kugovera.
2. Silicon carbide ceramic tube
- Yakanyanya kupisa chimbo Tube: Inoshandiswa kune yakanyanya kupisa michina yakadai seyakadzika michina yemoto uye oxidation choto kuti utakure wafer for high tembiricha yekuisa tembiricha.
- CVD / PVD process: sekubereka tube mune reaction kamuri, inodzivirira kupisa kwakanyanya uye magasi anokosheswa.
- Semiconductor Equipment zvigadziriso: Kune Tsinhendi yekushambadzira, gasi pipi mari, nezvimwe, kugadzirisa iyo yekunyora manejimendi ekushandisa michero yemidziyo.
Xkh inopa huwandu hwakazara hwemagariro eSilicon Carbide Caramic Trays, makapu ekutora uye Silicon Carride carride caramic tubes. Silicon carbide caramic trays uye quction makapu, xkh inogona kuve yakagadziriswa maererano nezvinodiwa nevatengi zvemhando dzakasiyana, uye tsigira kurapwa kwakakosha, kusimudzira kupfeka kuramba uye kuramba kupokana; For Silicon carbide caramic tubes, xkh inogona kugadzirisa akasiyana-siyana emukati mehudyu, kureba uye yakaomarara tube kana porous tube), uye ipa kupukuta, antiidation yekubatanidza maitiro uye mamwe maratidziro ekurapa. Xkh anovimbisa kuti vatengi vanogona kutora mukana wakazara wekushandisa kweSilicon Cardide zvigadzirwa kuti vasangane nezvinodiwa zvekugadzira minda yakadai se semiconducductors, leds uye phdevoltaics.
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