Silicon Carbide Ceramic End Effector (Forogo Ruoko/Rudzi rweRuoko)

Tsananguro pfupi:

Iyo Silicon Carbide Ceramic End Effector imhando yekubata zvinhu nemazvo yakagadzirwa kuti igadzire semiconductor, photonics, automation robotics, uye processing yepamusoro yezvinhu. Yakagadzirwa nenzira yeforogo/ruoko, iyo Silicon Carbide Ceramic End Effector inopa kugadzikana kwakanyanya, kuomarara kwakanyanya, uye kugadzira zvidimbu zvishoma, zvichiita kuti ive yakakodzera kune wafer uye substrate transfer operations.


Zvinhu zvirimo

Pfupiso yeGirazi reQuartz

IyoSilicon Carbide Ceramic End Effectorchikamu chekubata chakagadzirwa nemazvo chekugadzira semiconductor, photonics, automation robotics, uye processing yepamusoro yezvinhu. Yakagadzirwa muforogo/ruoko,Silicon Carbide Ceramic End Effectorinopa kugadzikana kwakanyanya, kuomarara kwakanyanya, uye kugadzirwa kwezvikamu zvishoma, zvichiita kuti ive yakakodzera kushandiswa kwewafer uye substrate transfer.

Kusiyana nezvishandiso zvesimbi zvechinyakare kana zvepolymer,Silicon Carbide Ceramic End Effectorinogona kuchengetedza chimiro chakarurama mumamiriro ekunze ekupisa kwakanyanya, makemikari, uye nzvimbo dzinopisa. Nzvimbo yayo inotsigira yakatetepa kwazvo inoita kuti silicon wafers, girazi substrates, sapphire optics, SiC wafers, nezvimwe zvinhu zvisina kusimba zvibatike zvakanaka. Nechimiro chakareruka asi chakasimba,Silicon Carbide Ceramic End Effectorinoderedza kudedera, inowedzera simba remagetsi, uye inoderedza kushushikana kwemuchina panguva yekumhanya nekukurumidza kwerobhoti.

Yakagadzirwa kuti isasvibise zvachose, iyoSilicon Carbide Ceramic End Effectorinoshandiswa zvakanyanya muFOUP load ports, EFEM modules, lithography systems, vacuum transfer tools, uye metrology stations—zvichipa mukana wakavimbika uye wakachena pakati pemichina ye automation nezvinhu zvinokosha.

Nheyo yekugadzira

IyoSilicon Carbide Ceramic End Effectorinogadzirwa kuburikidza nehunyanzvi hwekugadzira ceramic hunovimbisa kuchena kwakanyanya, huwandu hwakawanda, uye kuvimbika kwenguva refu. Mukati mekugadzirwa, kutonga kwakasimba kwemhando kunoita kuti chimwe nechimwe chive nechokwadi chekutiSilicon Carbide Ceramic End Effectorinosangana nezvinodiwa zvakasimba zvemasisitimu emagetsi emhando ye semiconductor.

1. Kugadzirira Zvinhu

Kugadzira kunotanga nekusarudza upfu hweSiC hwakachena kwazvo. Upfu uhwu hunosarudza simba remuchina uye kuchena kweSilicon Carbide Ceramic End Effector. Zvisungo zvakakosha uye zvimwe zvinowedzerwa zvinosanganiswa kuti zvikwanise kurongedza zvinhu zvakanaka uye kukurudzira kusimba kwakafanana.

2. Kuumba uye Kugadzira Pamberi

Muviri wegirini weSilicon Carbide Ceramic End Effectorinoumbwa uchishandisa isostatic pressing kana ceramic injection molding. Izvi zvinoita kuti chimiro chive chakaenzana nekushushikana uye chisina kukanganisa mukati. Geometry yeforogo yakagadzirwa padanho rino kuti ienderane nedhayamita dzewafer uye marobhoti ekubatanidza.

3. Kupisa Kunopisa Nekupisa Kwakanyanya

Chikamu chakaita sechinopiswa chinopiswa pamusoro pe2000°C mumhepo isina kuchena kana kuti isina kuchena. Munguva iyi,Silicon Carbide Ceramic End Effectorinosvika pedyo nepfungwa, zvichipa kuomarara kwakanaka, kuramba kupisa, uye kugadzikana kwemakemikari. Danho iri rinotsanangura kusimba kwemuchina wechinhu ichi.

4. CNC Magadzirirwo Akarurama

Mushure mekupiswa, kukuya kwedhaimani uye kugadzira CNC ine axis yakawanda kunonatsa hunyanzvi hweSilicon Carbide Ceramic End EffectorZvinhu zvakakosha zvakaita senzvimbo dzekubata wafer, maburi ekukwirisa, makomba ekururamisa, uye nzvimbo yekuparadzanisa forogo zvinogadzirwa kuti zvikwanise kusimba kusvika ±0.01 mm.

5. Kupedzisa uye Kuchenesa Pamusoro

Pakupedzisira,Silicon Carbide Ceramic End Effectorinopetwa nekukweshwa kwakanyanya uye kucheneswa kwe ultrasonic kwakachena. Danho iri rinoderedza kuomarara kwenzvimbo uye rinobvisa tunhu tudiki, zvichiita kuti imba ishande zvakanaka. Kupfeka kweCVD-SiC kana layers dzinodzivirira plasma zvinogona kuwedzera kugara kwenguva refu.

Iyi nzira yekugadzira ine hungwaru inoita kuti zveseSilicon Carbide Ceramic End Effectorinoshanda zvakanaka munzvimbo dzinoshanda otomatiki nemazvo.

Mashandisirwo

IyoSilicon Carbide Ceramic End EffectorYakagadzirirwa maindasitiri uko kuchena, kunyatsorongeka, uye kuvimbika zvisingakurukurwi. Dhizaini yayo yeruwoko/ruoko inoita kuti ive yakakodzera maoko erobhoti, masisitimu ekutora nekuisa, maturusi ekufambisa vacuum, uye mapuratifomu ekuongorora epamusoro.

1. Kugadzira Semiconductor

Muzvinhu zve semiconductor fabs,Silicon Carbide Ceramic End Effectorinoshandiswa zvakanyanya mu:

  • Kurodha/kuburitsa wafer

  • Kuronga FOUP

  • Kutakurwa kwekamuri revacuum

  • Kucheka, lithography, uye maitiro ekuisa zvidimbu

Yakachena zvakanyanya uye yakaomaSilicon Carbide Ceramic End Effectorinodzivirira kutsvedza kwewafer, uta, uye kusvibiswa, ichitsigira wafers kubva pa150 mm kusvika 300 mm.

2. Photonics neOptoelectronics

Pakubata malenzi asina kusimba, zvishandiso zve optical, GaN substrates, uye photonic chips,Silicon Carbide Ceramic End Effectorinoita kuti igare isina kudedera. Haisi simbi inodzivirira kukanganiswa kwemagineti uye kusvibiswa kwemaziso.

3. Kugadzira Zviratidziro & Mapaneru

Mukugadzirwa kwepaneru dzeOLED, QLED, uye LCD,Silicon Carbide Ceramic End EffectorInotamisa magirazi matete uye zvinhu zvakakosha. Pamusoro payo pasina makemikari inodzivirira kubva kumasara uye kukuvara pamusoro.

4. Marobhoti emuchadenga neasina kuvharwa

Mumakamuri ane vacuum yakawanda uye mumitsetse yekuunganidza ndege,Silicon Carbide Ceramic End Effectorinotsungirira tembiricha yakakwira, kuratidzwa nemwaranzi, uye magasi anoparadza uku ichiramba iine mativi akarurama.

Mumaindasitiri ese aya,Silicon Carbide Ceramic End Effectorinogara ichiita zvakanaka kupfuura dzimwe nzira dzesimbi nepolymer.

Mibvunzo Inowanzo bvunzwa - Mibvunzo Inowanzo bvunzwa

Mubvunzo 1: Ko Silicon Carbide Ceramic End Effector inogona kutsigira saizi dzakagadzirwa here?

Ehe. IyoSilicon Carbide Ceramic End Effectorinogona kugadzirwa kuti ikwane chero saizi yewafer, panel, kana substrate. Nzvimbo yeforogo, ukobvu, huremu, uye mapatani emaburi ekuisa zvinogona kugadziriswa zvizere.

Mubvunzo wechipiri: Ko Silicon Carbide Ceramic End Effector yakakodzera here munzvimbo dzisina vacuum?

Zvechokwadi.Silicon Carbide Ceramic End Effectorine gasi shoma uye haina kusvibiswa kwesimbi, zvichiita kuti ive yakakodzera UHV nenzvimbo dzakachena.

Mubvunzo wechitatu: Ndezvipi zvakanakira SiC end effect pane aruminiyamu kana simbi?

A Silicon Carbide Ceramic End Effectorzvinopa:

  • Chiyero chepamusoro chekuomarara-kuhuremu

  • Kuwedzera kwekupisa kwakaderera

  • Kudzivirira kupfeka kwepamusoro

  • Kudzivirira plasma nemakemikari kuri nani

  • Kuora kweZero

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.

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