Chidzitiro cheSilicon Carbide Cantilever (SiC Cantilever Paddle)
Dhayagiramu Yakadzama
Pfupiso yeChigadzirwa
Chigadziko chesilicon carbide cantilever, chakagadzirwa kubva kusilicon carbide ine reaction-bonded high-performance (RBSiC), chinhu chakakosha chinoshandiswa mukutakura nekubata mawafer systems ema semiconductor ne photovoltaic applications.
Zvichienzaniswa nemapaddle echinyakare equartz kana graphite, mapaddle eSiC cantilever ane simba repamusoro remakanika, kuomarara kwakanyanya, kuwedzera kupisa kwakaderera, uye kuramba ngura kwakanyanya. Anochengetedza kugadzikana kwakanaka kwechimiro pasi pekupisa kwakanyanya, achizadzisa zvinodiwa zvakanyanya zvewafer yakakura, hupenyu hwebasa hwakareba, uye kusvibiswa kwakaderera zvakanyanya.
Nekuvandudzwa kuri kuramba kuchiita maitiro e semiconductor kusvika pakukura kwema wafer diameter, bandwidth yakakwira, uye nzvimbo dzakachena dzekugadzirisa, ma paddle eSiC cantilever akatsiva zvishoma nezvishoma zvinhu zvechinyakare, zvichiva sarudzo inofarirwa yemidziyo yekupararira, LPCVD, nezvimwe zvishandiso zvine tembiricha yepamusoro.
Zvimiro zveChigadzirwa
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Kugadzikana Kwakanaka Kwekupisa Kwakakwirira
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Inoshanda zvakavimbika pa1000–1300℃ isina kuchinja.
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Tembiricha yepamusoro yebasa inosvika 1380℃.
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Kukwanisa Kutakura Mutoro Wakawanda
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Simba rekukombama rinosvika 250–280 MPa, rakakwirira kupfuura ma quartz paddles.
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Inokwanisa kubata mawafer ane dhayamita hombe (300 mm zvichikwira).
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Hupenyu Hwebasa Rakawedzerwa & Kugadzirisa Kushoma
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Kuwedzerwa kwemafuta kwakaderera (4.5 × 10⁻⁶ K⁻¹), kwakanyatsoenderana nezvinhu zvekuputira zveLPCVD.
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Inoderedza kutsemuka nekubviswa kweganda kunokonzerwa nekushushikana, zvichiita kuti kuchenesa nekugadzirisa zvinhu zviwedzere.
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Kuramba Kuora & Kuchena
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Kudzivirira kwakanaka kune acids uye alkalis.
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Magadzirirwo madiki madiki ane maburi akavhurika <0.1%, zvichideredza kugadzirwa kwezvimedu uye kuburitswa kwetsvina.
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Dhizaini Inoenderana Neotomatiki
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Geometry yakagadzikana ine mativi akasiyana-siyana ine kururama kwakakwirira.
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Inobatanidzwa zvakanaka nemarobhoti anorodha uye anoburitsa zvinhu mumidziyo yewafer, zvichiita kuti ikwanise kugadzirwa otomatiki.
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Zvimiro zvemuviri nemakemikari
| Chinhu | Chikamu | Data |
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| Tembiricha yepamusoro yebasa | ℃ | 1380 |
| Kuwanda kwevanhu | g/cm³ | 3.04 – 3.08 |
| Vhura Porosity | % | < 0.1 |
| Simba Rekukombama | MPa | 250 (20℃), 280 (1200℃) |
| Modulus yeElasticity | GPa | 330 (20℃), 300 (1200℃) |
| Kufambisa kwekupisa | W/m·K | 45 (1200℃) |
| Kuwedzerwa kweThermal Coefficient | K⁻¹×10⁻⁶ | 4.5 |
| Kuomarara kwaVickers | HV2 | ≥ 2100 |
| Kuramba kweAcid/Alkaline | - | Zvakanakisa |
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Hurefu hwakajairika:2378 mm, 2550 mm, 2660 mm
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Zviyero zvakagadzirwa zviripo kana zvakumbirwa
Mashandisirwo
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Indasitiri yeSemiconductor
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LPCVD (Kuderedzwa Kwesimba reMakemikari eUtsi)
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Maitiro ekupararira (phosphorus, boron, nezvimwewo)
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Kupisa kwemafuta
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Indasitiri yePhotovoltaic
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Kupararira uye kuputira kwePolysilicon ne monocrystalline wafer
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Kupisa kwakanyanya uye kupfava
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Mimwe Minda
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Nzvimbo dzinopisa zvakanyanya
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Masisitimu ekubata wafer nemazvo anoda kugara kwenguva refu uye kusvibiswa kwakaderera
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Mabhenefiti eVatengi
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Mari Dzekushanda Dzakaderedzwa- Nguva refu yehupenyu kana tichienzanisa nemapaddle e quartz, zvichideredza nguva yekushanda uye nguva yekutsiva.
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Goho Rakakwirira- Kusvibiswa kwakaderera zvikuru kunoita kuti pave nekuchena kwenzvimbo yewafer uye kunoderedza zvikanganiso.
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Humbowo hweramangwana- Inoenderana nehukuru hwewafer hwakakura uye maitiro e semiconductor echizvarwa chinotevera.
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Kubudirira Kwakawedzerwa- Inoenderana zvizere nemarobhoti otomatiki masisitimu, inotsigira kugadzirwa kwehuwandu hwakawanda.
Mibvunzo Inowanzo bvunzwa - Silicon Carbide Cantilever Paddle
Mubvunzo 1: Chii chinonzi paddle yesilicon carbide cantilever?
A: Ichinhu chinotsigira uye chinobata chakagadzirwa nesilicon carbide (RBSiC) inosanganiswa nereaction-bonded. Inoshandiswa zvakanyanya mumidziyo yekuparadzira, LPCVD, uye mamwe maitiro e semiconductor ne photovoltaic anodziya zvakanyanya.
Mubvunzo wechipiri: Sei uchifanira kusarudza SiC pane quartz paddles?
A: Zvichienzaniswa nemapaddle e quartz, mapaddle eSiC anopa:
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Simba repamusoro remakanika uye kugona kutakura mutoro
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Kugadzikana kwekupisa kuri nani pakupisa kusvika ku1380℃
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Hupenyu hwebasa hwakareba uye kuderedzwa kwemaitiro ekugadzirisa
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Kugadzirwa kwezvikamu zvishoma uye njodzi yekusvibiswa
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Inoenderana nehukuru hwewafer hwakakura (300 mm zvichikwira)
Mubvunzo wechitatu: Ko SiC cantilever paddle inogona kutsigira saizi dzipi dzewafer?
A: Mapaddle akajairwa anowanikwa kune masisitimu efurnace e2378 mm, 2550 mm, uye 2660 mm. Zviyero zvakagadzirwa zviripo kuti zvitsigire mawafer anosvika 300 mm zvichikwira.
Nezvedu
XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.
