Chitofu cheSiC crystal growth SiC Ingot growing 4inch 6inch 8inch PTV Lely TSSG LPE growth method

Chitofu cheSiC crystal growth SiC Ingot growth 4inch 6inch 8inch PTV Lely TSSG LPE growth method Mufananidzo Wakatariswa

Tsananguro pfupi:

Kukura kwekristaro yeSilicon carbide (SiC) idanho guru mukugadzirira zvinhu zve semiconductor zvinoshanda zvakanyanya. Nekuda kwekunyunguduka kwakanyanya kweSiC (inenge 2700°C) uye chimiro chakaoma chepolytypic (semuenzaniso 4H-SiC, 6H-SiC), tekinoroji yekukura kwekristaro ine dambudziko guru. Parizvino, nzira huru dzekukura dzinosanganisira nzira yekufambisa vapor physical (PTV), nzira yeLely, nzira yekukura kwembeu yepamusoro (TSSG) uye nzira ye liquid phase epitaxy (LPE). Nzira yega yega ine zvayakanakira nezvayakaipira uye yakakodzera zvinodiwa zvakasiyana zvekushandisa.

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Zvinhu zvirimo

Nzira huru dzekukura kwekristaro uye hunhu hwadzo

(1) Nzira Yekufambisa Utsi Hwemuviri (PTV)
Musimboti: Pakupisa kwakanyanya, zvinhu zveSiC zvinoshanduka kuita gasi, izvo zvinozodzokororwa pakristaro yembeu.
Zvinhu zvikuru:
Kupisa kukuru kwekukura (2000-2500°C).
Makristasi makuru emhando yepamusoro, ane saizi huru ye4H-SiC uye 6H-SiC anogona kurimwa.
Kukura kwemiti kunonoka, asi kunaka kwayo kwakakwirira.
Mashandisirwo: Inonyanya kushandiswa mumagetsi e semiconductor, RF zvishandiso uye mimwe minda yepamusoro-soro.

(2) Nzira yeLely
Musimboti: Makristasi anorimwa nekuisa pasi pemvura uye kudzokorodza hupfu hweSiC pakupisa kwakanyanya.
Zvinhu zvikuru:
Maitiro ekukura haadi mbeu, uye saizi yekristaro idiki.
Hunhu hwekristaro hwakakwira, asi kugona kukura kwacho kwakaderera.
Yakakodzera kutsvagurudza murabhoritari uye kugadzirwa kwezvikamu zvidiki.
Mashandisirwo: Inonyanya kushandiswa mukutsvagisa kwesainzi uye kugadzira makristaro madiki eSiC.

(3) Nzira yekukura kwemvura inosanganiswa nembeu yepamusoro (TSSG)
Pfungwa huru: Mumushonga unodziya zvakanyanya, zvinhu zveSiC zvinonyunguduka uye zvinogomera pakristaro yembeu.
Zvinhu zvikuru:
Kupisa kwekukura kwacho kwakaderera (1500-1800°C).
Makristaro eSiC emhando yepamusoro uye asina kuremara anogona kurimwa.
Kukura kwemiti kunonoka, asi kufanana kwayo kwakanaka.
Mashandisirwo: Yakakodzera kugadzirwa kwemakristaro eSiC emhando yepamusoro, akadai semidziyo ye optoelectronic.

(4) Liquid Phase epitaxy (LPE)
Nheyo: Mumvura yesimbi, kukura kweSiC zvinhu zvisina kucheneswa mu epitaxial pa substrate.
Zvinhu zvikuru:
Kupisa kwekukura kwacho kwakaderera (1000-1500°C).
Kukura nekukurumidza, kwakakodzera kukura kwefirimu.
Hunhu hwekristaro hwakakwira, asi ukobvu hwacho hwakaganhurirwa.
Mashandisirwo: Inonyanya kushandiswa pakukura kwemafirimu eSiC, akadai semasensa nemidziyo ye optoelectronic.

Nzira huru dzekushandisa silicon carbide crystal furnace

SiC crystal furnace ndiyo midziyo mikuru yekugadzira sic crystals, uye nzira huru dzekushandisa dzinosanganisira:
Kugadzira michina yemagetsi inonzi semiconductor: Inoshandiswa kukura makristaro emhando yepamusoro e4H-SiC ne6H-SiC sezvinhu zvekushandisa pakugadzira michina yemagetsi (senge MOSFETs, diodes).
Mashandisirwo: mota dzemagetsi, ma inverter e photovoltaic, magetsi emumaindasitiri, nezvimwewo.

Kugadzira michina yeRF: Inoshandiswa kukudza makristaro eSiC asina kuremara zvakanyanya sezvinhu zvinoshandisa michina yeRF kuti ikwanise kuzadzisa zvinodiwa zve5G kutaurirana, radar uye satellite kutaurirana.

Kugadzira michina yemagetsi: Inoshandiswa kukudza makristaro eSiC emhando yepamusoro sezvinhu zvekushandisa maLED, ma ultraviolet detectors nema lasers.

Tsvagiridzo yesainzi uye kugadzirwa kwezvikamu zvidiki: yekutsvagisa murabhoritari nekugadzirwa kwezvinhu zvitsva kutsigira hunyanzvi uye kugadzirisa tekinoroji yekukura kwekristaro yeSiC.

Kugadzira michina inodziya zvakanyanya: Inoshandiswa kukudza makristaro eSiC anodzivirira kupisa kwakanyanya sezvinhu zvekutanga zvekuongorora mhepo nekupisa kwakanyanya.

Midziyo yeSiC furnace uye mabasa anopiwa nekambani

XKH inotarisa pakugadzira nekugadzira michina yeSIC crystal furnace, ichipa mabasa anotevera:

Midziyo yakagadzirirwa: XKH inopa maovheni ekukura akagadzirirwa iwe nenzira dzakasiyana-siyana dzekukura dzakadai sePTV neTSSG zvichienderana nezvinodiwa nevatengi.

Rutsigiro rwehunyanzvi: XKH inopa vatengi rutsigiro rwehunyanzvi hwese kubva pakuvandudza mashandiro ekugadzira kristalo kusvika pakugadzirisa michina.

Mabasa Ekudzidzisa: XKH inopa kudzidziswa kwekushanda uye nhungamiro yehunyanzvi kuvatengi kuitira kuti michina ishande zvakanaka.

Basa rekutengesa mushure mekutengesa: XKH inopa basa rekukurumidza kupindura mushure mekutengesa uye kuvandudza michina kuitira kuti kugadzirwa kwevatengi kurambe kuripo.

Tekinoroji yekukura kwesilicon carbide crystal (yakadai sePTV, Lely, TSSG, LPE) ine mashandisirwo akakosha mumunda wemagetsi emagetsi, zvishandiso zveRF uye optoelectronics. XKH inopa michina yepamusoro yeSiC furnace uye masevhisi akasiyana-siyana ekutsigira vatengi mukugadzirwa kukuru kwemakristaro eSiC emhando yepamusoro uye kubatsira kusimudzira indasitiri yesemiconductor.