SiC Ceramic Fork Arm / End Effector - Kubata Kwakanyatsonaka Kwekugadzira Semiconductor

Tsananguro pfupi:

SiC Ceramic Fork Arm, inowanzonzi Ceramic End Effector, chikamu chekubata nemazvo chakagadzirwa zvakanyanya kuti chifambiswe, kurongeka, uye kuiswa munzvimbo dzemaindasitiri epamusoro-soro, kunyanya mukati mekugadzirwa kwe semiconductor ne photovoltaic. Chigadzirwa ichi chakagadzirwa ne silicon carbide ceramics ine hunyoro hwakanyanya, chinobatanidza simba remakanika rakasiyana, kuwedzera kwekupisa kwakaderera zvakanyanya, uye kuramba kwakanyanya kupiswa nekupisa uye ngura.

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Zvinhu zvirimo

Dhayagiramu Yakadzama

Pfupiso yeChigadzirwa

Kusiyana nema "end effect" echinyakare akagadzirwa nearuminiyamu, simbi isingatsvi, kana kunyange quartz, ma "SiC ceramic end effect" anopa mashandiro asina kuenzana mumakamuri e "vacuum rooms", makamuri ekuchenesa, uye munzvimbo dzakaoma dzekugadzirisa, zvichiita kuti ave chikamu chakakosha chemarobhoti ekubata ma "wafer" echizvarwa chinotevera. Nekuwedzera kwekuda kwekugadzirwa kusina kusvibiswa uye kushivirira kwakasimba mukugadzira ma "chip", kushandiswa kwema "ceramic end effect" kuri kukurumidza kuve chiyero cheindasitiri.

Nheyo yekugadzira

Kugadzirwa kweSiC Ceramic End Effectsinosanganisira nzira dzakasiyana-siyana dzekuita zvinhu zvakanyatsonaka uye zvakachena kwazvo dzinoita kuti zvinhu zvishande zvakanaka uye zvigare kwenguva refu. Maitiro maviri makuru anowanzo shandiswa:

Silicon Carbide Yakasungirirwa neReaction-Bonded (RB-SiC)

Mukuita uku, preform yakagadzirwa nesilicon carbide powder nebinder inopinzwa nesilicon yakanyungudutswa pakupisa kwakanyanya (~1500°C), iyo inopindirana neresidual carbon kuti igadzire dense, rigid SiC-Si composite. Nzira iyi inopa kutonga kwakanaka kwazvo uye inodhura zvishoma pakugadzira zvinhu zvakakura.

Silicon Carbide Isina Kudzvinyirirwa (SSiC)

SSiC inogadzirwa nekubvisa upfu hweSiC hwakatsetseka, hwakachena zvakanyanya pakupisa kwakanyanya (>2000°C) pasina kushandisa zvimwe zvinowedzerwa kana chikamu chekusunga. Izvi zvinoguma nekugadzirwa kwechinhu chine huwandu hunosvika 100% uye hunhu hwepamusoro hwemakanika nekupisa hunowanikwa pakati pezvinhu zveSiC. Yakanakira kushandiswa kwekubata wafer zvakanyanya.

Kugadziriswa Mushure meKugadzirwa

Kugadzira CNC nemazvo: Inoita kuti zvinhu zvive zvakatsetseka uye zvakafanana.
Kupedzisa Pamusoro: Kupukuta kwedhaimani kunoderedza kuomarara kwenzvimbo kusvika <0.02 µm.
Kuongorora: Optical interferometry, CMM, uye bvunzo dzisingaparadze zvinoshandiswa kusimbisa chidimbu chimwe nechimwe.

Matanho aya anovimbisa kutiSiC magumo ekupedzisirainopa kunyatsorongeka kwekuisa wafer, kurongeka kwakanaka, uye kugadzirwa kwezvidimbu zvishoma.

Zvinhu Zvikuru uye Mabhenefiti

Chinhu	Tsananguro
Kuomarara Kwakanyanya	Kuomarara kweVickers > 2500 HV, kunodzivirira kusakara kana kupwanyika.
Kuwedzera Kwekupisa Kwakaderera	CTE ~4.5×10⁻⁶/K, zvichiita kuti pave nekugadzikana mukushanduka kwekupisa.
Kusashanda kwemakemikari	Haipindi muHF, HCl, magasi eplasma, nezvimwe zvinhu zvinoparadza.
Kurwisa Kupisa Kwakanaka Kwekupisa	Yakakodzera kupisa/kutonhodza nekukurumidza mumagetsi anodzima mhepo uye maovheni.
Kusimba Kwakanyanya uye Simba	Inotsigira maoko marefu eforogo asina kutsaukira.
Kuderedza Kupisa	Yakanakira nzvimbo dzine vacuum yakawanda (UHV).
ISO Kirasi 1 Yakagadzirira Kuchenesa	Kushanda kusina zvidimbu zvinovimbisa kuvimbika kwewafer.

Mashandisirwo

SiC Ceramic Fork Arm / End Effector inoshandiswa zvakanyanya mumaindasitiri anoda kunyatsorongeka, kuchena, uye kusabatwa nemakemikari. Mamiriro makuru ekushandisa anosanganisira:

Kugadzira Semiconductor

Kuisa/kuburitsa wafer mudura (CVD, PVD), kutema (RIE, DRIE), uye masisitimu ekuchenesa.
Kutakurwa kwewafer yemarobhoti pakati peFOUPs, makaseti, uye maturusi ekugadzirisa.
Kubata nekupisa kwakanyanya panguva yekupisa kana kupinza.

Kugadzirwa kweMasero ePhotovoltaic

Kutakurwa kwakasimba kwe silicon wafers dzisina kusimba kana solar substrates mumitsetse inogadzirwa otomatiki.

Indasitiri yeFlat Panel Display (FPD)

Kutamisa magirazi makuru kana ma substrate munzvimbo dzekugadzira dzeOLED/LCD.

Semiconductor yeCompound / MEMS

Inoshandiswa mumitsetse yekugadzira yeGaN, SiC, uye MEMS uko kudzora kusvibiswa uye kunyatsorongeka kwenzvimbo kwakakosha.

Basa rayo rekupedzisira rinokosha zvikuru pakuona kuti hapana chakaipa uye kubata kwakasimba panguva yekushanda kwakaoma.

Kugadzirisa Zvinangwa

Tinopa kugadzirisa kwakawanda kuti tisangane nezvinodiwa zvakasiyana-siyana zvemichina uye maitiro:

Dhizaini yeforogo: Marongerwo ane zvidimbu zviviri, minwe yakawanda, kana kuti nhanho dzakapatsanurwa.
Kuenderana kweSaizi yeWafer: Mawafer ane 2” kusvika 12”.
Nzvimbo dzeKuisa: Inoenderana nemaoko erobhoti eOEM.
Ukobvu & Kushivirira Pamusoro: Kureba kwe micron uye kutenderera kwemucheto zviripo.
Zvinhu Zvinodzivisa Kutsvedza: Magadzirirwo epamusoro kana machira ekudzivirira kuti ubate wafer zvakasimba.

Imwe neimwechinhu chinogadzirisa magumo eceramicYakagadzirwa pamwe chete nevatengi kuti ive nechokwadi chekuti inokwana nemazvo uye ine shanduko shoma pakushandisa maturusi.

Mibvunzo Inowanzo bvunzwa (Mibvunzo Inowanzo bvunzwa)

Mubvunzo 1: SiC iri nani sei pane quartz pakushandisa end effector?
A1:Kunyange zvazvo quartz ichiwanzo shandiswa nekuda kwekuchena kwayo, haina kusimba kwemuchina uye inogona kutyoka kana yabatwa nemutoro kana tembiricha. SiC inopa simba rakakura, inodzivirira kupera, uye kugadzikana kwekupisa, zvichideredza zvakanyanya njodzi yekusashanda kwenguva uye kukuvara kwewafer.

Mubvunzo wechipiri: Ruoko urwu rweforogo rweceramic runoenderana here nevashandi vese vemarobhoti vanobata mawafer?
A2:Ehe, ma "ceramic end effectors" edu anoenderana nemaitiro makuru ekubata ma "wafer" uye anogona kugadziriswa kuti aenderane nemarobhoti ako chaiwo ane madhirowa chaiwo einjiniya.

Mubvunzo wechitatu: Inogona kubata mawafer e300 mm isina kupoterera here?
A3:Zvechokwadi. Kusimba kwakanyanya kweSiC kunoita kuti maoko matete, marefu eforogo abate mawafer e300 mm zvakachengeteka pasina kutsvedza kana kutsauka panguva yekufamba.

Mubvunzo wechina: Ndeipi nguva yekushanda kweSiC ceramic end effect?
A4:Kana ikashandiswa nemazvo, SiC end effect inogona kugara kwenguva yakareba ka5 kusvika ku10 kupfuura quartz kana aruminiyamu, nekuda kwekudzivirira kwayo kupisa uye kushushikana kwemuchina.

Mubvunzo 5: Munopa mabasa ekutsiva kana ekukurumidza kuita prototyping here?
A5:Ehe, tinotsigira kugadzirwa kwesampuli nekukurumidza uye tinopa masevhisi ekutsiva zvichibva pamifananidzo yeCAD kana zvikamu zvakagadzirwa nereverse-engineered kubva kumidziyo iripo.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.