SIC Ceramic Chuck Tray Ceramic Suction Cont Cups Yakakodzera Chekutanga Machining Machining
Hunhu hwenyama:
1.Hwekurehanya kuomarara: kuomarara kweiyo silicon carbide ndeye 9.2-9.5, yechipiri chete kuDhaimani, ine simba rekupfeka.
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4. Kugadzikana kwemakemikari: Silicon carbide acid uye alkali corrosion kuramba, yakakodzera kushandiswa mumakemikari akaora nharaunda.
5. Simba rakakwirira rekusimba: Silicon Carbide ine yakakwira ichikweretesa simba uye simba rekumanikidza, uye rinogona kutsungirira kushushikana kukuru.
Zvimiro:
1.Mukati memiyero yeSemiconductor
2.SILICON Carbide Sucker ine yakanaka yekudhura kusawirirana, inogona kupfupisa nguva inobudirira nguva uye yakawandisa, kugadzirisa maitiro ekugadzira.
3.licon carbide vacuum sucker zvakare ine yakanaka acid uye alkali corrosion kuramba.
4.Ndare neiyo tsika yeCortum Carrier ndiro, ipfupise kurodha uye kusunungura kudzora uye kutonhorera nguva, kuvandudza kushanda kwebasa; Panguva imwecheteyo, inogona kuderedza kupfeka pakati pemapureti ekumusoro uye epasi, chengetedza yakanaka ndege chaiyo, uye wedzera hupenyu hwebasa panosvika 40%.
5.The chikamu chezvinhu chidiki, chiedza chehuremu. Zviri nyore kune vashandisi kutakura mapallet, kuderedza njodzi yekurovera kukuvara kunokonzerwa nematambudziko ekutakura ne 20%.
6.Ize: Maximum Diameter 640mm; Flatness: 3um kana zvishoma
Munda Unoshanda:
1. Semiconductor Kugadzira
● Wafer kugadzirisa:
Ye wafer gadziriro muPhotlithography, etching, yakaonda firimu dhiraivha uye mamwe maitiro, ichiverengera yakanyanya kurongeka uye kugadzirisa kusakwana. Kupisa kwaro uye kurwisa kwakashata kwakakodzera kune harsh semiconductor inogadzira nharaunda.
● Elitaxial kukura:
MuSIC kana Gan Epitaxial kukura, semutakuri kupisa uye kugadzirira maafers, anoverengera tembiricha kufanana uye crystal mhando pakudziya kwakanyanya, kugadzirisa mudziyo wekushandisa.
2. Photoadele Equipment
● Kutungamirwa Kugadzirwa:
Inoshandiswa kugadzirisa safiri kana sic substrate, uye seyekutakura kupisa mu mocved maitiro, kuve nechokwadi chekufanana kwekukura kwe epitaxial, kuvandudza kwakatungamirwa kuita uye kunaka.
● Laser Diode:
Semukati mechikuru-yakakwirira-prexture, kugadzirira uye kupisa substrate kuti uve nechokwadi chekuita kupisa tembiricha, kugadzirisa simba rekubuditsa uye kuvimbika kweiyo laser diode.
3. Precision machining
● Optical component kugadzirisa:
Iyo inoshandiswa kugadzirisa zvinhu zvakanyatsojeka seyakajeka nzvimbo uye mafirita kuti uve nechokwadi chekunyatsojeka uye kusvibiswa kwakaderera panguva yekugadzirisa, uye yakakodzera kumakwakuka zvakanyanya.
● Kugadziriswa kweCeramic:
Semunhu akanyanya kugadzikana, anokodzera kunyatsogadziriswa kwemamita e ceramic zvinhu kuti ave nechokwadi chekuchina checheche uye kusawirirana pasi pematare makuru uye zvakashata nharaunda.
4. Ongororo yesainzi
● Kuedza kwakanyanya.
Semudzidziso wekuenzanisira mune yakanyanya tembiricha nzvimbo, inotsigira yekuedza kwakanyanya kupisa pamusoro pegumi neshanu c kuti ive nechokwadi chekushisa kusaenzana uye kugadzikana kwemuenzaniso.
● vacuum test:
Semupendero wekuenzanisa uye kupisa kutakura mumatare eVa vacuum, kuve nechokwadi chekurongeka uye kudzokorora kwekuedzwa, zvakakodzera kuti vacating uye kurapwa kwekushata.
Nhoroondo yehunyanzvi:
(Zvinhu zvivakwa) | (Unit) | (SSIC) | |
(SIC Zvemukati) |
| (Wt)% | > 99 |
(Avhareji yeiyo size size) |
| Micron | 4-10 |
(Density) |
| kg / dm3 | > 3.14 |
(Fungidziro iripo) |
| VO1% | <0.5 |
(Vickers kuomesa) | HV 0.5 | GPA | 28 |
* (Simba rinosindimara) | 208c | MPA | 450 |
(Simba Rekumanikidza) | 208c | MPA | 3900 |
(Elastic Modulus) | 208c | GPA | 420 |
(Kupunzika kuoma) |
| MPA / M '% | 3.5 |
(Thermal Discover) | 20 ° ºc | W / (m * k) | 160 |
(Kuramba) | 20 ° ºc | Sohm.cm | 106-108 |
| A (RT ** ... 80ºC) | K-1 * 10-6 | 4.3 |
|
| oºc | 1700 |
Nemakore ekuunganidzwa kwehunyanzvi uye maindasitiri, Xkh anokwanisa kugadzirisa kiyi paramende eChune maererano nezvinodiwa zveMutengi, anoverengera kuti chigadzirwa chakanyatso shandurwa kune maitiro emutengi. SIC Silicon Carbide Caramic Chucks yakavezwa muWerfices muWery Kugadziriswa, Epitaxial kukura uye mamwe maitiro akakosha nekuda kweavo yakanakisa inobata Kunyanya mukugadzira yechitatu-General semiconductor zvinhu zvakadai seSIC uye Gan, kudiwa kweSilicon Carbide caramic chucks inoenderera. Mune ramangwana, kukurumidza kukura kwe5g, mota dzemagetsi, nehungwaru hwezvematongerwo enyika, tarisiro yekushandisa, iyo tarisiro yekushandisa yetiLICON Carride Chucks muindasitiri yeSemiconductor ichave yakawedzera.




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