Patterned Sapphire Substrate PSS 2inch 4inch 6inch ICP yakaoma etching inogona kushandiswa ku LED machipisi.
Hunhu hwakakosha
1. Mamiriro ezvinhu: The substrate material is one crystal sapphire (Al₂O₃), ine kuoma kwakanyanya, kupisa kwakanyanya uye kugadzikana kwemakemikari.
2. Surface structure: Iyo yepamusoro inoumbwa ne photolithography uye etching mu periodic micro-nano zvivako, zvakadai semakoni, mapiramidhi kana hexagonal arrays.
3. Optical performance: Kuburikidza nekugadzirwa kwepamusoro pekugadzirisa, kuratidzwa kwechiedza pamusangano kunoderedzwa, uye chiedza chekubudisa chiedza chinovandudzwa.
4. Thermal performance: Sapphire substrate ine yakanakisa thermal conductivity, yakakodzera kune yakakwirira simba LED application.
5. Saizi yekutsanangurwa: Hukuru hwakajairika 2 inches (50.8mm), 4 inches (100mm) uye 6 inches (150mm).
Main application nzvimbo
1. Kugadzirwa kwe LED:
Kuvandudzwa kwechiedza chekubvisa mwenje: PSS inoderedza kurasikirwa kwechiedza kuburikidza nekugadzira maitiro, zvakanyanya kunatsiridza kupenya kwe LED uye kupenya kwakanaka.
Yakavandudzwa epitaxial kukura kwemhando: Chimiro chakamisikidzwa chinopa hwaro huri nani hwekukura kweGaN epitaxial layers uye inovandudza mashandiro e LED.
2. Laser Diode (LD) :
High power lasers: Iyo yakakwira yekupisa conductivity uye kugadzikana kwePSS yakakodzera kune yakakwira simba laser diode, inovandudza kupisa kupisa kuita uye kuvimbika.
Yakaderera chikumbaridzo ikozvino: Natsiridza epitaxial kukura, kuderedza chikumbaridzo ikozvino che laser diode, uye kunatsiridza kugona.
3. Photodetector:
High senitivity: The high light transmission uye low defect density yePSS inovandudza kunzwisiswa uye kupindura kwekukurumidza kwephotodetector.
Wide spectral mhinduro: yakakodzera kuona mafotoelectric mu ultraviolet kune inooneka renji.
4. Magetsi emagetsi:
High voltage resistance: Sapphire's high insulation uye kugadzikana kwekupisa kwakakodzera kune yakakwira magetsi magetsi.
Kunyatsopisa kupisa: Kupisa kwekushisa kwepamusoro kunovandudza kupisa kwekuita kwemagetsi emagetsi uye kunowedzera hupenyu hwebasa.
5. Rf zvishandiso:
High frequency performance: Iyo yakaderera dielectric kurasikirwa uye yakanyanya kugadzikana yekupisa kwePSS yakakodzera kune yakakwira frequency RF zvishandiso.
Ruzha rwakaderera: Kudzika kwepamusoro uye kuderera kwehurema kunoderedza ruzha rwechishandiso uye kunatsiridza mhando yechiratidzo.
6. Biosensors:
High senitivity yekuona: Iyo yakakwira mwenje kuendesa uye kugadzikana kwekemikari yePSS yakakodzera kune yakakwira senitivity biosensors.
Biocompatibility: Iyo biocompatibility yesafire inoita kuti ive yakakodzera kune zvekurapa uye biodetection application.
Yakagadzirwa sapphire substrate (PSS) ine GaN epitaxial material:
Patterned sapphire substrate (PSS) ndiyo yakanaka substrate yeGaN (gallium nitride) epitaxial kukura. Iyo lattice inogara yesafire iri padyo neGaN, iyo inogona kuderedza lattice mismatches uye hurema mukukura epitaxial. Iyo micro-nano chimiro chePSS pamusoro haingogadzirisi chiedza chekuwedzera kwechiedza, asiwo inovandudza kristall quality yeGaN epitaxial layer, nokudaro inovandudza kushanda uye kuvimbika kwe LED.
Technical parameters
| Item | Yakagadzirwa Sapphire Substrate (2~6inch) | ||
| Diameter | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Ukobvu | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Surface Oientation | C-ndege (0001) kure-kukona yakananga kuM-axis (10-10) 0.2 ± 0.1° | ||
| C-ndege (0001) kure-kukona yakananga A-akisi (11-20) 0 ± 0.1° | |||
| Yekutanga Flat Oriental | A-Ndege (11-20) ± 1.0° | ||
| Primary Flat Length | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Ndege | 9-o'clock | ||
| Front Surface Pedzisa | Patterned | ||
| Back Surface Finish | SSP:Fine-ground,Ra=0.8-1.2um; DSP: Epi-yakakwenenzverwa, Ra <0.3nm | ||
| Laser Mark | Rutivi rwekuseri | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| BOW | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Kusabatanidzwa kumucheto | ≤2 mm | ||
| Tsanangudzo yePateni | Chimiro Chimiro | Dome, Koni, Piramidhi | |
| Pattern Height | 1.6~1.8μm | ||
| Muenzaniso Diameter | 2.75~2.85μm | ||
| Pattern Space | 0.1~0.3μm | ||
XKH inyanzvi mukupa emhando yepamusoro, yakagadziridzwa yakagadziridzwa sapphire substrates (PSS) nerutsigiro rwehunyanzvi uye mushure mekutengesa sevhisi kubatsira vatengi kuwana hunyanzvi hutsva mumunda we LED, kuratidza uye optoelectronics.
1. High quality PSS supply: Patterned sapphire substrates mumhando dzakasiyana-siyana (2 ", 4", 6 ") kuti isangane nezvinodiwa zve LED, kuratidza uye optoelectronic madivayiri.
2. Customized design: Gadzirisa pamusoro pe micro-nano structure (yakadai sekoni, piramidi kana hexagonal array) maererano nezvinodiwa nemutengi kuti uwedzere chiedza chekubudisa chiedza.
3. Tsigiro yehunyanzvi: Ipa PSS application design, process optimization uye technical consultation kubatsira vatengi kuvandudza chigadzirwa.
4. Epitaxial kukura rutsigiro: PSS inofananidzwa neGaN epitaxial zvinhu inopiwa kuti ive nechokwadi chepamusoro-soro epitaxial layer kukura.
5. Kuedza uye certification: Ipa PSS yemhando yekuongorora mushumo kuti uone kuti zvigadzirwa zvinosangana neindasitiri zviyero.
Detailed Diagram
