Substrate yeSapphire ine mapatani PSS 2inch 4inch 6inch ICP dry etching inogona kushandiswa kumachipisi e LED
Hunhu hwepakati
1. Hunhu hwezvinhu: Chinhu chiri pasi pevhu ikristaro imwe chete yesafire (Al₂O₃), ine kuomarara kwakanyanya, inodzivirira kupisa zvakanyanya uye yakasimba pamakemikari.
2. Maumbirwo epamusoro: Pamusoro pacho pakagadzirwa ne photolithography uye pakagadzirwa ne periodic micro-nano structures, dzakadai sema cones, ma pyramid kana hexagonal arrays.
3. Kushanda kweOptical: Kuburikidza nekugadzirwa kwemapatani epamusoro, kuratidzwa kwechiedza chose panzvimbo yacho kunoderedzwa, uye kushanda zvakanaka kwekubvisa chiedza kunovandudzwa.
4. Kushanda kwekupisa: Sapphire substrate ine mafambiro akanaka ekupisa, yakakodzera kushandiswa kwe LED ine simba guru.
5. Magadzirirwo ehukuru: Saizi dzakajairika i2 inches (50.8mm), 4 inches (100mm) uye 6 inches (150mm).
Nzvimbo huru dzekushandisa
1. Kugadzirwa kwe LED:
Kubudirira kwekubvisa chiedza: PSS inoderedza kurasikirwa nechiedza kuburikidza nekugadzira mapatani, zvichivandudza zvikuru kupenya kwe LED uye kushanda zvakanaka kwechiedza.
Hunhu hwekukura kwe epitaxial hwakavandudzwa: Chimiro chakagadzirwa ne pattern chinopa hwaro huri nani hwekukura kweGaN epitaxial layers uye chinovandudza mashandiro e LED.
2. Laser Diode (LD):
Malaser ane simba guru: Kufamba kwemafuta zvakanyanya uye kugadzikana kwePSS kwakakodzera ma laser diode ane simba guru, zvichivandudza mashandiro ekupisa uye kuvimbika.
Low threshold current: Gadzirisa kukura kwe epitaxial, deredza threshold current ye laser diode, uye wedzera kushanda zvakanaka.
3. Chinoongorora mufananidzo:
Kunzwa kwakanyanya: Kutumirwa kwechiedza kwakanyanya uye density shoma yePSS inovandudza kunzwa uye kumhanya kwemhinduro ye photodetector.
Mhinduro ye wide spectral: yakakodzera kuonekwa kwe photoelectric mu ultraviolet kusvika pahuwandu hunoonekwa.
4. Magetsi emagetsi:
Kudzivirira magetsi akawanda: Kudzivirira kupisa kwakanyanya kweSapphire uye kugadzikana kwekupisa kwakakodzera michina yemagetsi ane magetsi akawanda.
Kupisa zvakanaka: Kupisa kwakanyanya kunovandudza mashandiro emagetsi emagetsi uye kunoita kuti nguva yekushanda iwedzere.
5. Midziyo yeRf:
Kushanda kwemafrequency akawanda: Kurasikirwa kwakaderera kwe dielectric uye kugadzikana kwakanyanya kwekupisa kwePSS zvakakodzera michina yeRF ine mafrequency akawanda.
Ruzha rwakaderera: Kusatsetseka kwakanyanya uye kurema kwakaderera kunoderedza ruzha rwechishandiso uye kunatsiridza kunaka kwemasaini.
6. Zvishandiso zveBiosensor:
Kuona kungwara kwakanyanya: Kutapurirana kwechiedza chakawanda uye kugadzikana kwemakemikari kwePSS zvakakodzera kune ma biosensors ane kungwara kwakanyanya.
Kuenderana kwechinhu: Kuenderana kwechinhu chesapphire kunoita kuti chikwanise kushandiswa pakurapa uye pakuongorora zvinhu zvipenyu.
Substrate yesafire yakagadzirwa nemapatani (PSS) ine zvinhu zveGaN epitaxial:
Substrate yesafire ine mapatani (PSS) isubstrate yakakodzera kukura kweGaN (gallium nitride) epitaxial. Lattice constant yesafire iri pedyo neGaN, izvo zvinogona kuderedza kusawirirana kwelattice uye zvikanganiso mukukura kweepitaxial. Maumbirwo e micro-nano ePSS pamusoro haangogadzirisi chete kushanda kwechiedza, asiwo anovandudza kunaka kwekristaro yeGaN epitaxial layer, nokudaro achivandudza mashandiro uye kuvimbika kweLED.
Magadzirirwo ehunyanzvi
| Chinhu | Substrate yeSapphire ine Mapatani (2~6inch) | ||
| Dhayamita | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Ukobvu | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Kutarisa Pamusoro | C-plane (0001) iri kure nekona yakananga kuM-axis (10-10) 0.2 ± 0.1° | ||
| C-plane (0001) iri kure nekona yakananga kuA-axis (11-20) 0 ± 0.1° | |||
| Kutungamira Kwakatsetseka Kwepakutanga | Ndege yeA (11-20) ± 1.0° | ||
| Hurefu Hwepamusoro-soro | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Ndege | 9-o'clock | ||
| Kupedzisa Kwemberi | Yakagadzirwa nemaitiro | ||
| Kupedzisa Kwekumashure | SSP: Yakagadzirwa zvakanaka, Ra=0.8-1.2um; DSP: Yakakweshwa neEpi, Ra<0.3nm | ||
| Chiratidzo cheLaser | Rutivi rwekumashure | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| KOTA | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Kusabatanidzwa kweMupendero | ≤2 mm | ||
| Tsanangudzo yePateni | Maumbirwo eChimiro | Dome, Koni, Piramidhi | |
| Kureba kwePateni | 1.6~1.8μm | ||
| Dhayamita yePateni | 2.75~2.85μm | ||
| Nzvimbo yePattern | 0.1~0.3μm | ||
XKH inonyanya kupa mapurasitiki emhando yepamusoro, akagadzirwa nemapatani esapphire (PSS) ane rutsigiro rwehunyanzvi uye sevhisi mushure mekutengesa kuti ibatsire vatengi kuwana hunyanzvi hunoshanda mumunda we LED, display uye optoelectronics.
1. Kuwanikwa kwePSS yemhando yepamusoro: Zvigadziko zvesafire zvakagadzirwa nemavara akasiyana-siyana (2 ", 4", 6 ") kuti zvizadzise zvinodiwa ne LED, display uye optoelectronic devices.
2. Dhizaini yakagadzirirwa: Gadzirisa chimiro che micro-nano pamusoro (senge koni, piramidhi kana hexagonal array) zvichienderana nezvinodiwa nevatengi kuti vagone kushandisa zvakanaka chiedza.
3. Rutsigiro rwehunyanzvi: Ipa dhizaini yePSS application, kugadzirisa maitiro uye kubvunzana kwehunyanzvi kubatsira vatengi kuvandudza mashandiro echigadzirwa.
4. Rutsigiro rwekukura kweEpitaxial: PSS inoenderana nezvinhu zveGaN epitaxial zvinopihwa kuti ive nechokwadi chekukura kwe epitaxial layer yepamusoro.
5. Kuedzwa uye kupihwa chitupa: Ipa mushumo wekuongorora mhando yePSS kuti uve nechokwadi chekuti zvigadzirwa zvinosangana nezvinodiwa neindasitiri.
Dhayagiramu Yakadzama
