Zvinhu Zvikuru Zvekugadzira Semiconductor: Mhando dzeWafer Substrates

Zvidimbu zveWafer sezvinhu zvakakosha mumidziyo yeSemiconductor

Zvishandiso zveWafer ndizvo zvinotakura zvishandiso zve semiconductor, uye hunhu hwazvo hunosarudza zvakananga mashandiro emudziyo, mutengo, uye nzvimbo dzekushandisa. Heano marudzi makuru ezvishandiso zveWafer pamwe chete nezvakanakira nezvazvakaipira:

1.Silikoni (Si)

• Mugove weMusika:Inopa 95% yemusika wepasi rose we semiconductor.

• Zvakanakira:

  • Mutengo wakaderera:Zvinhu zvakawanda (silicon dioxide), maitiro ekugadzira akakura, uye hupfumi hwakasimba hwechikero.

  • Kuenderana kwakanyanya kwemaitiro:Tekinoroji yeCMOS yakakura zvikuru, inotsigira ma node epamusoro (semuenzaniso, 3nm).

  • Hunhu hwakanaka kwazvo hwekristaro:Mawafer ane dhayamita hombe (akawanda ari 12-inch, 18-inch ari kugadzirwa) ane denda shoma anogona kurimwa.

  • Hunhu hwakagadzikana hwemakanika:Zviri nyore kucheka, kupolisha, uye kubata.

• Zvakashata:

  • Mukana wakamanikana (1.12 eV):Mvura inobuda yakawanda pakupisa kwakakwira, zvichideredza kushanda zvakanaka kwemuchina wemagetsi.

  • Kusashanda zvakanaka kwebhendi:Kushanda zvishoma kwechiedza, hazvikodzeri zvishandiso zve optoelectronic zvakaita se LEDs nema lasers.

  • Kufamba kwemaerekitironi kushoma:Kushanda kwemagetsi kwakaderera kana tichienzanisa nemacompound semiconductors.
    

2.Gallium Arsenide (GaAs)

• Mashandisirwo:Midziyo yeRF ine mafrequency akakwira (5G/6G), michina ye optoelectronic (ma laser, masero ezuva).

• Zvakanakira:

  • Kufamba kwemaerekitironi akawanda (5–6× kupfuura silicon):Yakakodzera kushandiswa nekukurumidza uye nefrequency yepamusoro senge kutaurirana kwema millimeter-wave.

  • Kureruka kwebhandi (1.42 eV):Kushandurwa kwemagetsi emagetsi epamusoro-soro, hwaro hwema laser e infrared nema LED.

  • Kudzivirira kupisa kwakanyanya uye mwaranzi:Yakakodzera nzvimbo dzine mhepo nemhepo dzakaoma.

• Zvakashata:

  • Mutengo wakakwira:Zvinhu zvishoma, kukura kwakaoma kwemakristaro (kunowanzo kanganiswa), saizi shoma yewafer (kunyanya 6-inch).

  • Makanika eBrittle:Inowanzo tyoka, zvichiita kuti goho risanyanya kunaka pakugadzira.

  • Huturu:Arsenic inoda kubatwa kwakasimba uye kudzora zvakatipoteredza.

3. Silicon Carbide (SiC)

• Mashandisirwo:Midziyo yemagetsi inodziya zvakanyanya uye ine simba guru (maEV inverters, nzvimbo dzekuchaja), nzvimbo dzemuchadenga.

• Zvakanakira:

  • Mukana wakafara (3.26 eV):Simba guru rekupwanyika (10× kupfuura silicon), kushivirira tembiricha yepamusoro (tembiricha yekushanda >200 °C).

  • Kupisa kwakanyanya (≈3× silicon):Kupisa kwakanyanya, zvichiita kuti simba remuchina riwedzere.

  • Kurasikirwa kwakaderera kwekuchinja:Inovandudza mashandiro ekushandura simba.

• Zvakashata:

  • Kugadzirira substrate kwakaoma:Kukura kwekristaro zvishoma nezvishoma (>vhiki imwe chete), kudzora zvikanganiso zvakaoma (micropipes, dislocations), mutengo wakakwira zvikuru (5–10× silicon).

  • Saizi diki yewafer:Zvikuru 4–6 inches; 8-inch ichiri kugadzirwa.

  • Zvakaoma kugadzirisa:Yakaoma zvikuru (Mohs 9.5), zvichiita kuti kucheka nekupolisha zvitore nguva.

4. Gallium Nitride (GaN)

• Mashandisirwo:Midziyo yemagetsi ine mafrequency akakwira (kuchaja nekukurumidza, nzvimbo dzemagetsi dze5G), maLED ebhuruu/ma laser.

• Zvakanakira:

  • Kufamba kwemaerekitironi akawanda kwazvo + gap yakafara (3.4 eV):Inobatanidza mashandiro emagetsi ane mafrequency akakwira (>100 GHz) uye mashandiro emagetsi ane simba rakawanda.

  • Kusadzivirira zvakanyanya:Inoderedza kurasikirwa kwesimba remuchina.

  • Inoenderana neHeteroepitaxy:Inowanzo kurimwa pa silicon, safira, kana SiC substrates, zvichideredza mutengo.

• Zvakashata:

  • Kukura kwekristaro imwe chete kwakaoma:Heteroepitaxy ndiyo inonyanya kushandiswa, asi kusawirirana kwe lattice kunounza zvikanganiso.

  • Mutengo wakakwira:Zvigadzirwa zveGaN zvemhando yeNative zvinodhura zvikuru (wafer ye 2-inch inogona kudhura zviuru zvemadhora eUSD).

  • Matambudziko ekuvimbika:Zviitiko zvakaita sekudonha kwemagetsi zvinoda kugadziriswa.

5. Indium Phosphide (InP)

• Mashandisirwo:Kukurukurirana kwemaziso kunomhanya zvikuru (ma lasers, ma photodetectors), zvishandiso zve terahertz.

• Zvakanakira:

  • Kufamba kwemaerekitironi akawanda kwazvo:Inotsigira mashandiro anopfuura 100 GHz, ichipfuura maGaAs.

  • Kureba kwebhandi zvakananga nekuenzanisa urefu hwewavelength:Zvinhu zvepakati zvekutaurirana kwefiber ye optical ye1.3–1.55 μm.

• Zvakashata:

  • Yakaoma uye inodhura zvikuru:Mutengo we substrate unodarika 100× silicon, saizi shoma dzewafer (4–6 inches).

6. Safaya (Al₂O₃)

• Mashandisirwo:Mwenje we LED (GaN epitaxial substrate), girazi rinofukidza midziyo yemagetsi inoshandiswa nevatengi.

• Zvakanakira:

  • Mutengo wakaderera:Yakachipa zvikuru pane SiC/GaN substrates.

  • Kugadzikana kwakanaka kwemakemikari:Haipindi ngura, inochengetedza ngura zvakanyanya.

  • Kujeka:Yakakodzera zvivakwa zve LED zvakamira.

• Zvakashata:

  • Kusawirirana kukuru kwelatifomu neGaN (>13%):Zvinokonzera kuwanda kwezvikanganiso, zvichida buffer layers.

  • Kusashanda zvakanaka kwemafuta (~1/20 yesilicon):Inoderedza mashandiro emagetsi e LED ane simba guru.

7. Zvigadziko zveCeramic (AlN, BeO, nezvimwewo)

• Mashandisirwo:Zvidziyo zvinoparadzira kupisa zvemamodule ane simba guru.

• Zvakanakira:

  • Kudzivirira + kutenderera kwekupisa kwakanyanya (AlN: 170–230 W/m·K):Yakakodzera kurongedza zvinhu zvakawanda.

• Zvakashata:

  • Isina kristaro imwe chete:Hazvigone kutsigira kukura kwemudziyo zvakananga, zvinongoshandiswa sezvinhu zvekurongedza chete.

8. Zvikamu Zvakakosha

• SOI (Silicon iri paInsulator):

  • Maumbirwo:Sandwichi yeSilicon/SiO₂/silicon.

  • Zvakanakira:Inoderedza kugona kwezvipembenene, kuomarara kwemwaranzi, uye kudzikamisa kubuda kwemvura (inoshandiswa muRF, MEMS).

  • Zvakashata:30–50% inodhura kupfuura silicon yakawanda.

• Quartz (SiO₂):Inoshandiswa muma photomasks neMEMS; haipindi kupisa kwakanyanya asi inopfava zvakanyanya.

• Dhaimani:Substrate yepamusoro-soro yekupisa (>2000 W/m·K), pasi peR&D yekupisa kwakanyanya.

Tafura Yekupfupisa Yekuenzanisa

Zvinhu Zvikuru Pakusarudza Substrate

• Zvinodiwa pakushanda:GaAs/InP yekushandiswa kwemafrequency akakwira; SiC yekushandiswa kwemavoltage akakwira, tembiricha yakakwira; GaAs/InP/GaN yekushandiswa kwemaoptoelectronics.

• Zvipingamupinyi zvemutengo:Magetsi emagetsi anoshandiswa nevatengi anotsigira silicon; michina yepamusoro-soro inogona kubvumidza SiC/GaN premiums.

• Kuoma kwekubatanidza:Silicon haigone kutsiviwa kuti ienderane neCMOS.

• Kutarisira kupisa:Mashandisirwo ane simba guru anosarudza SiC kana GaN yakagadzirwa nedhaimani.

• Kukura kwecheni yekugovera:Si > Sapphire > GaAs > SiC > GaN > InP.

Mafambiro Emangwana

Kubatanidzwa kwakasiyana-siyana (semuenzaniso, GaN-on-Si, GaN-on-SiC) kuchaenzanisa mashandiro nemutengo, zvichitungamira kufambira mberi mu5G, mota dzemagetsi, uye quantum computing.