Silicon carbide (SiC), semhando yemhando ye semiconductor material yakafara, inoita basa rakakosha mukushandiswa kwesainzi netekinoroji yemazuva ano. Silicon carbide ine kugadzikana kwakanaka kwekupisa, kushivirira kwakawanda kwemagetsi, kufambisa magetsi nemaune uye zvimwe zvinhu zvakanaka zvemuviri uye zvemaziso, uye inoshandiswa zvakanyanya mumidziyo yemagetsi uye zvishandiso zvezuva. Nekuda kwekuwedzera kwekudiwa kwemidziyo yemagetsi inoshanda uye yakagadzikana, kugona tekinoroji yekukura kwesilicon carbide kwave chinhu chinozivikanwa.
Saka unoziva zvakawanda sei nezvemaitiro ekukura kweSiC?
Nhasi tichakurukura nzira nhatu huru dzekukura kwesilicon carbide single crystals: physical vapor transport (PVT), liquid phase epitaxy (LPE), uye high temperature chemical vapor deposition (HT-CVD).
Nzira Yokufambisa Utsi Hwemuviri (PVT)
Nzira yekufambisa vapor yemuviri ndeimwe yenzira dzinonyanya kushandiswa pakukura kwesilicon carbide. Kukura kwesilicon carbide yekristaro imwe chete kunonyanya kutsamira pakuiswa kweupfu hwe sic uye kuiswazve pakristaro yembeu mumamiriro ekupisa kwakanyanya. Muchikamu che graphite chakavharwa, upfu hwesilicon carbide hunodziiswa kusvika pakupisa kwakanyanya, kuburikidza nekudzora tembiricha, silicon carbide steam inoungana pamusoro pekristaro yembeu, uye zvishoma nezvishoma inokura kristaro imwe chete yakakura.
Ruzhinji rwe monocrystalline SiC yatinopa parizvino inogadzirwa nenzira iyi yekukura. Ndiyo nzira inonyanya kushandiswa muindasitiri iyi.
Liquid phase epitaxy (LPE)
Makristaro esilicon carbide anogadzirwa ne liquid phase epitaxy kuburikidza ne crystal growth process panzvimbo yakasimba-liquid. Munzira iyi, silicon carbide powder inonyungudutswa mu silicon-carbon solution pakupisa kwakanyanya, uye tembiricha inodzikiswa kuitira kuti silicon carbide ibviswe kubva mumushonga uye ikure pakristaro dzembeu. Chinhu chikuru cheLPE method kugona kuwana makristaro emhando yepamusoro pakupisa kushoma kwekukura, mutengo wacho wakaderera, uye wakakodzera kugadzirwa kukuru.
Kupisa kwakanyanya kwemakemikari emvura inodziya (HT-CVD)
Nekuisa gasi rine silicon nekabhoni mukamuri rekuita pakupisa kwakanyanya, jira rimwe chete re silicon carbide rinoiswa zvakananga pamusoro pekristaro yembeu kuburikidza nekuita kwemakemikari. Chinhu chakanaka chenzira iyi ndechekuti mwero wekuyerera uye mamiriro ekuita kwegasi zvinogona kudzorwa nemazvo, kuitira kuti pave nekristaro ye silicon carbide ine kuchena kwakanyanya uye zvikanganiso zvishoma. Maitiro eHT-CVD anogona kugadzira makristaro e silicon carbide ane hunhu hwakanaka, izvo zvinonyanya kukosha pakushandiswa uko zvinhu zvemhando yepamusoro zvinodiwa.
Maitiro ekukura kwesilicon carbide ndiyo musimboti wekushandiswa kwayo nekuvandudzwa kwayo. Kuburikidza nekuvandudza tekinoroji nguva dzose uye kugadzirisa, nzira idzi nhatu dzekukura dzinoita mabasa adzo kuti dzigutse zvinodiwa zvezviitiko zvakasiyana, zvichiita kuti silicon carbide ive yakakosha. Nekuwedzera kwekutsvaga nekufambira mberi kwetekinoroji, maitiro ekukura kwezvinhu zvesilicon carbide acharamba achivandudzwa, uye mashandiro emidziyo yemagetsi achawedzerwa.
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Nguva yekutumira: Chikumi-23-2024