N-Type SiC Composite Substrates Dia6inch Yepamusoro mhando monocrystaline uye yakaderera mhando substrate
N-Type SiC Composite Substrates Yakajairwa parameter tafura
项目Items | 指标Tsanangudzo | 项目Items | 指标Tsanangudzo |
直径Diameter | 150±0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Mberi (Si-face)hushasha | Ra≤0.2nm (5μm*5μm) |
晶型Polytype | 4H | Edge Chip, Scratch, Crack (kutarisa kwekuona) | Hapana |
电阻率Resistivity | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
Kutamisa layer Hukobvu | ≥0.4μm | 翘曲度Warp | ≤35μm |
空洞Void | ≤5ea/wafer (2mm>D>0.5mm) | 总厚度Ukobvu | 350±25μm |
Iyo "N-mhando" zita rinoreva mhando yedoping inoshandiswa muSiC zvinhu. Mune semiconductor physics, doping inosanganisira kusuma nemaune kwetsvina kuita semiconductor kuti ichinje magetsi ayo. N-mhando yedoping inosuma zvinhu zvinopa kuwanda kwemaerekitironi emahara, zvichipa iwo zvinhu kusajairika kuchaja mutakuri.
Zvakanakira zveN-mhando SiC composite substrates zvinosanganisira:
1. High-temperature performance: SiC ine high thermal conductivity uye inogona kushanda pakupisa kwepamusoro, zvichiita kuti ive yakakodzera kushandiswa kwemagetsi emagetsi epamusoro-soro uye e-frequency.
2. High breakdown voltage: SiC zvinhu zvine high breakdown voltage, zvichiita kuti zvikwanise kumira minda yemagetsi yakawanda pasina kuparara kwemagetsi.
3. Mushonga wemakemikari uye kwezvakatipoteredza: SiC inopikisa kemikemikari uye inogona kumira nemamiriro ezvinhu akaoma ezvakatipoteredza, zvichiita kuti ive yakakodzera kushandiswa mumapurogiramu akaoma.
4. Kurasikirwa kwesimba kwakaderedzwa: Kuenzaniswa neyakagadzirwa nesilicon-based materials, SiC substrates inogonesa kushanduka kwesimba kunobudirira uye kuderedza kurasikirwa kwemagetsi mumagetsi emagetsi.
5. Wide bandgap: SiC ine bandgap yakakura, inobvumira kugadzirwa kwezvigadzirwa zvemagetsi zvinogona kushanda pakupisa kwepamusoro uye simba repamusoro.
Pakazere, N-mhando yeSiC composite substrates inopa mabhenefiti akakosha ekugadzirwa kwezvigadzirwa zvemagetsi zvinonyanya kushanda, kunyanya mumashandisirwo apo kushanda kwepamusoro-tembiricha, kusimba kwemagetsi, uye kushandurwa kwesimba kwakakosha.