LNOI Wafer (Lithium Niobate paInsulator) Telecommunications Sensing High Electro-Optic
Dhayagiramu Yakadzama
Pfupiso
Mukati mebhokisi rewafer mune migero yakafanana, iyo saizi dzayo dzakafanana zvakakwana kuti dzitsigire mativi maviri ewafer. Bhokisi rekristaro rinowanzo gadzirwa nepurasitiki inopenya yePP iyo inodzivirira kupisa, kupera uye magetsi asingachinji. Mavara akasiyana ekuwedzera anoshandiswa kusiyanisa zvikamu zvesimbi mukugadzirwa kwesemiconductor. Nekuda kwehukuru hudiki hwemasemiconductors, mapatani akaomarara, uye zvinodiwa zvakanyanya zvehukuru hwezvikamu mukugadzirwa, bhokisi rewafer rinofanira kuvimbiswa nharaunda yakachena kuti ibatanidzwe kune microenvironment box reaction cavity yemichina yakasiyana yekugadzira.
Maitiro Ekugadzira
Kugadzirwa kweLNOI wafers kunosanganisira matanho akati wandei akanyatsojeka:
Danho 1: Kuisa Helium IonMaion eHelium anopinzwa muLN crystal yakawanda achishandisa ion implanter. Maion aya anogara pakadzika chaipo, achigadzira denderedzwa risina simba rinozopedzisira raita kuti firimu ribude nyore.
Danho rechipiri: Kuumbwa kweBazi reSubstrateWafer yakasiyana yesilicon kana LN inosanganiswa kana kuiswa SiO2 uchishandisa PECVD kana thermal oxidation. Pamusoro payo pakagadzirwa kuti pave nekubatana kwakanaka.
Danho rechitatu: Kubatana kweLN neSubstrateKristaro yeLN yakaiswa mumaion inopindurwa yobatanidzwa pawafer yekutanga uchishandisa wafer bonding yakananga. Munzvimbo dzekutsvaga, benzocyclobutene (BCB) inogona kushandiswa senamira kuti iite nyore kana paine mamiriro asina kuoma.
Danho rechina: Kurapa Kwekupisa uye Kupatsanurwa KwemafirimuKunyungudutsa kunoita kuti kuumbwa kwemabubbles kuitwe pakadzika pakaiswa jira, zvichiita kuti firimu rakatetepa (LN layer yepamusoro) riparadzaniswe kubva paganda. Simba remuchina rinoshandiswa kupedzisa kubvisa ganda.
Danho rechishanu: Kupukuta PamusoroKupukuta Kwemakemikari (CMP) kunoiswa kuti kupfavise pamusoro peLN, zvichivandudza kunaka kwechiedza uye kugona kwemidziyo.
Magadzirirwo ehunyanzvi
| Zvinhu | Optical Giredhi LiNbO3 mawafe (Chena or Nhema) | |
| Curie Tembiricha | 1142±0.7℃ | |
| Kucheka Angle | X/Y/Z nezvimwewo | |
| Dhayamita/saizi | 2”/3”/4” ±0.03mm | |
| Tol(±) | <0.20 mm ±0.005mm | |
| Ukobvu | 0.18 ～0.5mm kana kupfuura | |
| Yekutanga Furati | 16mm/22mm/32mm | |
| TTV | <3μm | |
| uta | -30 | |
| Kukombama | <40μm | |
| Kudzidziswa Furati | Zvese zviripo | |
| Pamusoro Rudzi | Rutivi Rumwe Rwakakweshwa (SSP)/Rutivi Ruviri Rwakakweshwa (DSP) | |
| Yakakweshwa divi Ra | <0.5nm | |
| S/D | 20/10 | |
| Mupendero zvinodiwa | R=0.2mm C-rudzi or Mhino yemombe | |
| Hunhu | Mahara of kutsemuka (mabhurumu uye zvinosanganisirwa) | |
| Optical doped | Mg/Fe/Zn/MgO nezvimwewo ye chiedza giredhi LN mawafer pa akakumbira | |
| Wafer Pamusoro zvinodiwa | Indekisi yeRefractive | Kwete=2.2878/Ne=2.2033 @632nm wavelength/prism coupler method. |
| Kusvibiswa, | Hapana | |
| Zvidimbu c>0.3μ m | <=30 | |
| Kukwenya, Kucheka | Hapana | |
| Chirema | Hapana mitswe yemucheto, kukwenya, mavanga ekucheka, kana mavara | |
| Kurongedza | Huwandu/Bhokisi reWafer | 25pcs pabhokisi |
Nyaya Dzekushandisa
Nekuda kwekushanda kwayo kwakasiyana-siyana uye mashandiro ayo, LNOI inoshandiswa mumaindasitiri akasiyana siyana:
Mifananidzo:Macompact modulators, multiplexers, uye photonic circuits.
RF/Acoustics:Mamodulators eAcousto-optic, maRF filters.
Komputa yeQuantum:Vasanganisi vemafrequency asina kurongeka uye majenareta e photon-pair.
Dziviriro & Ndege:Magyro e optical asinganyanyi kurasikirwa, zvishandiso zvinochinja-chinja ma frequency.
Zvishandiso Zvekurapa:Maoptical biosensors uye ma high-frequency signal probes.
Mibvunzo Inowanzo bvunzwa
Mubvunzo: Sei LNOI ichisarudzwa pane SOI mumasisitimu e optical?
A:LNOI ine ma electro-optic coefficients epamusoro uye huwandu hwakakura hwekujeka, zvichiita kuti ishande zvakanaka muma photonic circuits.
Mubvunzo: CMP inosungirwa here mushure mekupatsanurwa?
A:Ehe. Nzvimbo yeLN yakavhurika inenge yakaoma mushure mekuchekwa kwemaion uye inofanira kuporishwa kuti ienderane nezvinodiwa zve optical-grade.
Mubvunzo: Saizi yepamusoro yewafer inowanikwa ndeyei?
A:Mawafer eLNOI ekutengeserana anonyanya kuva 3” ne4”, kunyange hazvo vamwe vatengesi vari kugadzira mhando dze6”.
Mubvunzo: Ko LN layer inogona kushandiswazve mushure mekupatsanurwa here?
A:Kiristaro yechigadziko inogona kupukutwazve uye kushandiswazve kakawanda, kunyange hazvo hunhu hwayo hunogona kudzikira mushure mekutenderera kakawanda.
Mubvunzo: Mawafer eLNOI anoenderana here neCMOS processing?
A:Ehe, dzakagadzirirwa kuti dzienderane nemaitiro ekugadzira ma semiconductor, kunyanya kana silicon substrates dzichishandiswa.
