8inch LNOI (LiNbO3 pane Insulator) Wafer yeOptical Modulators Waveguides Integrated Circuits
Detailed Diagram
Nhanganyaya
Lithium Niobate paIsulator (LNOI) mawaferi chinhu chekucheka-kumucheto chinoshandiswa muakasiyana epamusoro optical uye emagetsi maapplication. Aya mawafesi anogadzirwa nekuendesa chidimbu chitete chelithium niobate (LiNbO₃) pane inodzivirira substrate, kazhinji silicon kana chimwe chinhu chakakodzera, vachishandisa hunyanzvi hwekuita senge ion implantation uye wafer bonding. LNOI tekinoroji inogovera zvakawanda zvakafanana neSilicon paInsulator (SOI) wafer tekinoroji asi inotora mukana weyakasarudzika optical zvimiro zvelithium niobate, chinhu chinozivikanwa nepiezoelectric, pyroelectric, uye nonlinear optical maitiro.
LNOI wafers akawana kutariswa kwakakosha muminda yakadai seyakabatanidzwa optics, nharembozha, uye quantum computing nekuda kwekuita kwavo kwepamusoro mu-high-frequency uye high-speed application. Iwo mawafer anogadzirwa uchishandisa iyo "Smart-cut" tekinoroji, iyo inogonesa kutonga chaiko pamusoro pekukora kweiyo lithium niobate yakaonda firimu, kuve nechokwadi chekuti mawafer anosangana nezvinodiwa zvekushandisa kwakasiyana.
Principle
Maitiro ekugadzira LNOI wafers anotanga neakawanda lithium niobate crystal. Iyo crystal inopinda ion implantation, apo high-energy helium ions inounzwa mukati meiyo lithium niobate crystal. Aya maion anopinda mukati mekristaro kune imwe kudzika uye kukanganisa chimiro chekristaro, kugadzira ndege isina kusimba iyo inogona kushandiswa kuparadzanisa kristaro kuita zvidimbu zvitete. Iyo chaiyo simba reiyo helium ion inodzora kudzika kwekudyara, izvo zvinokanganisa zvakananga kukora kwekupedzisira lithium niobate layer.
Mushure mekuisirwa ion, iyo lithium niobate crystal inosungirirwa kune substrate uchishandisa nzira inonzi wafer bonding. Nzira yekubatanidza inowanzoshandisa nzira yekubatanidza yakananga, apo nzvimbo mbiri (iyo ion-implanted lithium niobate crystal uye substrate) inomanikidzwa pamwe chete pasi pekushisa kwepamusoro uye kumanikidzwa kugadzira chisungo chakasimba. Mune zvimwe zviitiko, chinhu chinonamira sebenzocyclobutene (BCB) chinogona kushandiswa kuwedzera rutsigiro.
Kutevera kusungirirwa, wafer inopinda maitiro ekugadzirisa kugadzirisa chero kukuvadzwa kwakakonzerwa neiyoni uye kuwedzera chisungo pakati pematanho. Iyo annealing process inobatsirawo iyo yakatetepa lithium niobate layer kuti ibve kubva kune yekutanga crystal, ichisiya yakatetepa, yepamusoro-mhando layer ye lithium niobate inogona kushandiswa kugadzira mudziyo.
Zvinotsanangurwa
LNOI wafers anoratidzirwa neakati wandei akakosha maratidziro ayo anovimbisa kukodzera kwavo kwepamusoro-kuita maapplication. Izvi zvinosanganisira:
Material Specifications.
| .Material. | .Specifications. |
| Material | Homogeneous: LiNbO3 |
| Hunhu Hwezvinhu | Mabhobhu kana inclusions <100μm |
| Orientation | Y-cheka ± 0.2 ° |
| Density | 4.65 g/cm³ |
| Curie Temperature | 1142 ±1°C |
| Transparency | > 95% mu450-700 nm renji (10 mm ukobvu) |
Manufacturing Specifications.
| .Parameter. | .Specification. |
| Diameter | 150 mm ± 0.2 mm |
| Ukobvu | 350 μm ±10 μm |
| Flatness | <1.3 μm |
| Total Thickness Variation (TTV) | Warp <70 μm @ 150 mm wafer |
| Local Thickness Variation (LTV) | <70 μm @ 150 mm wafer |
| Kukasharara | Rq ≤0.5 nm (AFM RMS kukosha) |
| Surface Quality | 40-20 |
| Zvimedu (Zvisingabvisike) | 100-200 μm ≤3 zvimedu |
| Chips | <300 μm (wafer yakazara, hapana nzvimbo yekusarudzika) |
| Mitswe | Hapana akatsemuka (full wafer) |
| Kusvibiswa | Hapana mavara asingabvisike (full wafer) |
| Parallelism | <30 arcseconds |
| Oriental Reference Plane (X-axis) | 47 ±2 mm |
Applications
LNOI wafers anoshandiswa mumhando dzakasiyana siyana dzekushandisa nekuda kweakasarudzika zvivakwa, kunyanya muminda yephotonics, telecommunications, uye quantum tekinoroji. Zvimwe zvezvishandiso zvakakosha zvinosanganisira:
Integrated Optics:LNOI wafers anoshandiswa zvakanyanya mumaseketi akabatanidzwa emaziso, kwaanogonesa yakakwirira-inoshanda photonic zvishandiso senge modulators, waveguides, uye resonators. Iyo yakakwira isiri-linear optical zvimiro zvelithium niobate inoita kuti ive sarudzo yakanakisa yezvishandiso zvinoda kunyatso shandiswa kwemwenje.
TelecommunicationLNOI wafers anoshandiswa mune optical modulators, ari akakosha maficha mune yakakwirira-kumhanya masisitimu ekutaurirana, kusanganisira fiber optic network. Iko kugona kuenzanisa mwenje pamafafitera epamusoro kunoita kuti LNOI wafers ive yakanakira yemazuva ano telecommunication masisitimu.
Quantum Computing:Mu quantum tekinoroji, LNOI wafers anoshandiswa kugadzira zvikamu zvehuwandu hwemakomputa uye quantum kutaurirana masisitimu. Iwo asina mutsara optical zvimiro zveLNOI anokwidziridzwa kugadzira akapinzwa mafoton pairi, ayo akakosha pakugovera kiyi yehuwandu uye quantum cryptography.
Sensors:LNOI wafers anoshandiswa muakasiyana ekunzwa maapplication, anosanganisira optical uye acoustic sensors. Kugona kwavo kupindirana nezvose zviri zviviri chiedza uye ruzha kunoita kuti vagone kuenderana nemhando dzakasiyana dzetekinoroji dzekunzwa.
FAQ
Q:Chii chinonzi LNOI tekinoroji?
A: LNOI tekinoroji inosanganisira kutamiswa kweiyo yakatetepa lithium niobate firimu pane inodzivirira substrate, kazhinji silicon. Iyi tekinoroji inokwirisa yakasarudzika zvimiro zvelithium niobate, senge yakakwira isina mutsara optical maitiro, piezoelectricity, uye pyroelectricity, ichiita kuti ive yakakodzera kune yakasanganiswa optics uye kufonera.
Q:Ndeupi musiyano uripo pakati peLNOI neSOI wafers?
A: Ose maviri LNOI neSOI mawafer akafanana mukuti ane chidimbu chakatetepa chezvinhu zvakasungirirwa kune substrate. Nekudaro, LNOI wafers anoshandisa lithium niobate seyakaonda firimu zvinhu, nepo SOI wafers anoshandisa silicon. Musiyano wakakosha uri mune zvimiro zveiyo yakatetepa firimu zvinhu, neLNOI inopa yepamusoro optical uye piezoelectric zvivakwa.
Q:Ndezvipi zvakanakira kushandisa LNOI wafers?
A: Mabhenefiti makuru eLNOI wafers anosanganisira yavo yakanakisa optical zvimiro, senge yakakwira nonlinear optical coefficients, uye simba ravo remuchina. Aya maitiro anoita kuti LNOI wafers ave akanaka kuti ashandiswe mukumhanyisa-kumhanya, yakakwirira-frequency, uye quantum application.
Q:Ko LNOI wafers anogona kushandiswa quantum application?
A: Ehe, LNOI wafers anoshandiswa zvakanyanya muquantum tekinoroji nekuda kwekugona kwavo kugadzira akapinzwa mapikicha maviri uye kuenderana kwawo neakasanganiswa mafotonics. Izvi zvivakwa zvakakosha pakushandisa mu quantum computing, kutaurirana, uye cryptography.
Q:Chii chakajairwa kukora kwemafirimu eLNOI?
A: Mafirimu eLNOI anowanzo siyana kubva kumazana mashoma nanometers kusvika akati wandei mamicrometer muukobvu, zvichienderana nekushandiswa chaiko. Ukobvu hunodzorwa panguva yeiyo ion implantation process.
