8inch LNOI (LiNbO3 paInsulator) Wafer yeOptical Modulators Waveguides Integrated Circuits
Dhayagiramu Yakadzama
Nhanganyaya
Mawafer eLithium Niobate on Insulator (LNOI) imhando yepamusoro inoshandiswa mukushandiswa kwakasiyana-siyana kwe optical uye electronic. Mawafer aya anogadzirwa nekutamisa chidimbu chakatetepa che lithium niobate (LiNbO₃) pane substrate inodziisa simba, kazhinji silicon kana chimwe chinhu chakakodzera, uchishandisa matekiniki akaomarara akadai se ion implantation uye wafer bonding. Tekinoroji yeLNOI yakafanana zvakanyanya ne Silicon on Insulator (SOI) wafer technology asi inoshandisa mukana wehunhu hwakasiyana hwe lithium niobate, chinhu chinozivikanwa nehunhu hwayo hwe piezoelectric, pyroelectric, uye nonlinear optical.
Mawafer eLNOI awana kutariswa kukuru muminda yakadai se integrated optics, telecommunications, uye quantum computing nekuda kwekushanda kwawo kwepamusoro-soro mukushandiswa kwema frequency akawanda uye nekukurumidza. Mawafer aya anogadzirwa achishandisa nzira ye "Smart-cut", iyo inoita kuti agone kudzora zvakakwana ukobvu hwe lithium niobate thin film, zvichiita kuti mawafer aya asvike pazvinodiwa pakushandiswa kwakasiyana-siyana.
Nheyo
Maitiro ekugadzira maLNOI wafers anotanga ne bulk lithium niobate crystal. Kristaro iyi inoiswa mumaion, uko maion ane simba guru ehelium anoiswa pamusoro pe lithium niobate crystal. Maion aya anopinda mukristaro kusvika pakadzika chaipo uye anokanganisa chimiro chekristaro, zvichigadzira plane isina kusimba iyo inogona kuzoshandiswa kupatsanura kristaro kuita zvidimbu zvitete. Simba chairo remaion ehelium rinodzora kudzika kwekuiswa, izvo zvinokanganisa zvakananga ukobvu hwe layer yekupedzisira ye lithium niobate.
Mushure mekuisirwa kwemaion, lithium niobate crystal inosunganidzwa kune substrate uchishandisa nzira inonzi wafer bonding. Maitiro ekubatanidza anowanzo shandisa nzira yekubatanidza zvakananga, apo nzvimbo mbiri (ion-implanted lithium niobate crystal ne substrate) dzinodzvinyirirwa pamwe chete pasi pekupisa kwakanyanya uye kumanikidzwa kugadzira chisungo chakasimba. Mune dzimwe nguva, chinhu chinonamira senge benzocyclobutene (BCB) chinogona kushandiswa kutsigira zvakanyanya.
Mushure mekusunga, wafer inopinda muitiro we annealing kugadzirisa chero kukuvara kunokonzerwa nekuiswa kwemaion uye kusimbisa kubatana pakati pezvikamu. Maitiro e annealing anobatsirawo chidimbu che lithium niobate kuti chibve pakristaro yepakutanga, zvichisiya chidimbu che lithium niobate chemhando yepamusoro chinogona kushandiswa kugadzira michina.
Magadzirirwo
Mawafer eLNOI ane zvinhu zvakakosha zvakawanda zvinoita kuti akwanise kushandiswa zvakanaka. Izvi zvinosanganisira:
Magadzirirwo eZvinhu
| Zvinhu | Magadzirirwo |
| Zvinhu | Zvakafanana: LiNbO3 |
| Hunhu hwezvinhu | Mabhurumu kana zvinhu zvinosanganisirwa <100μm |
| Kudzidziswa | Kucheka kweY ±0.2° |
| Kuwanda kwevanhu | 4.65 g/cm³ |
| Kupisa kweCurie | 1142 ±1°C |
| Kujeka | >95% iri pakati pe450-700 nm (ukobvu hwe10 mm) |
Magadzirirwo Ekugadzira
| Paramita | Tsanangudzo |
| Dhayamita | 150 mm ±0.2 mm |
| Ukobvu | 350 μm ±10 μm |
| Kufara | <1.3 μm |
| Kusiyana Kwehukobvu Hwese (TTV) | Yakakombama <70 μm @ 150 mm wafer |
| Kusiyana Kwehukobvu Hwenzvimbo (LTV) | <70 μm @ 150 mm wafer |
| Kuomarara | Rq ≤0.5 nm (kukosha kweAFM RMS) |
| Hunhu hwepamusoro | 40-20 |
| Zvidimbu (Hazvibviswi) | 100-200 μm ≤3 zvidimbu |
| Machipisi | <300 μm (wafer yakazara, hapana nzvimbo yekusiya) |
| Mitswe | Hapana mitswe (wafer yakazara) |
| Kusvibiswa | Hapana mavara asingabvisike (wafer yakazara) |
| Kufanana | <30 masekonzi emusana |
| Nzvimbo Yekutarisa Kutungamira (X-axis) | 47 ±2 mm |
Mashandisirwo
Mawafer eLNOI anoshandiswa mumhando dzakasiyana-siyana dzemashandisirwo nekuda kwehunhu hwawo hwakasiyana, kunyanya muminda ye photonics, telecommunications, uye quantum technologies. Mamwe emashandisirwo akakosha anosanganisira:
Magirazi Akabatanidzwa:Mawafer eLNOI anoshandiswa zvakanyanya mumacircuit e optical akabatanidzwa, uko anogonesa zvishandiso zve photonic zvinoshanda zvakanyanya zvakaita se modulators, waveguides, uye resonators. Hunhu hwepamusoro hwe lithium niobate hwe optical hunoita kuti ive sarudzo yakanaka kune maapplication anoda kugadziriswa kwechiedza zvakanaka.
Kutaurirana nefoni:Mawafer eLNOI anoshandiswa mumamodulators e optical, ayo ari zvinhu zvakakosha mumasisitimu ekukurukurirana anomhanya, kusanganisira fiber optic networks. Kugona kugadzirisa chiedza pamafrequencies akakwira kunoita kuti mawafer eLNOI ave akakodzera masisitimu emazuva ano ekutaurirana.
Komputa yeQuantum:Muhunyanzvi hwe quantum, ma LNOI wafers anoshandiswa kugadzira zvinhu zve quantum computers uye quantum communication systems. Zvinhu zvisina kujeka zve LNOI zvinoshandiswa kugadzira ma photon pairs akabatana, ayo akakosha pakugoverwa kwema quantum key uye quantum cryptography.
MaSensor:Mawafer eLNOI anoshandiswa mumhando dzakasiyana dze sensor, kusanganisira sensor dze optical ne acoustic. Kugona kwawo kutaurirana nechiedza neruzha kunoita kuti akwanise kushandiswa pamhando dzakasiyana dze sensing technologies.
Mibvunzo Inowanzo bvunzwa
Q:Chii chinonzi tekinoroji yeLNOI?
Tekinoroji yeA:LNOI inosanganisira kutamiswa kwefirimu rakatetepa re lithium niobate kuenda kune substrate inodziisa simba, kazhinji silicon. Tekinoroji iyi inoshandisa hunhu hwakasiyana hwe lithium niobate, hwakadai sehunhu hwayo hwepamusoro husina kurongeka hwe optical, piezoelectricity, uye pyroelectricity, zvichiita kuti ive yakakodzera kune integrated optics uye telecommunications.
Q:Ndeupi musiyano uripo pakati peLNOI neSOI wafers?
A: Mawafer eLNOI neSOI akafanana nekuti ane jira rakatetepa rezvinhu zvakabatana ne substrate. Zvisinei, mawafer eLNOI anoshandisa lithium niobate sezvinhu zvakatetepa zvefirimu, nepo mawafer eSOI achishandisa silicon. Musiyano mukuru uri muhunhu hwezvinhu zvakatetepa zvefirimu, neLNOI ichipa hunhu hwakanaka hwe optical uye piezoelectric.
Q:Ndezvipi zvakanakira kushandisa maLNOI wafers?
A: Zvakanakira zvikuru zveLNOI wafers zvinosanganisira kugona kwazvo kwekuona, zvakaita sema coefficients e optical asina kuenzana, uye simba rawo remakanika. Hunhu uhwu hunoita kuti LNOI wafers ive yakakodzera kushandiswa mukushandiswa kwekumhanya kwakanyanya, frequency yakakwira, uye quantum.
Q:Mawafer eLNOI anogona kushandiswa here pakushandisa kwequantum?
A: Ehe, mawafer eLNOI anoshandiswa zvakanyanya muhunyanzvi hwe quantum nekuda kwekugona kwawo kugadzira ma photon pairs akabatana uye kuenderana kwawo ne integrated photonics. Hunhu uhwu hwakakosha mukushandiswa mu quantum computing, kutaurirana, uye cryptography.
Q:Ndeupi ukobvu hwakajairika hwemafirimu eLNOI?
Mafirimu eA:LNOI anowanzo bva pamazana mashoma enanometers kusvika kuma micrometers akati wandei muukobvu, zvichienderana nekushandiswa kwacho. Ukobvu hwacho hunodzorwa panguva yekuisa maion.
