Chidimbu cheSapphire che12inch C-Plane SSP/DSP
Dhayagiramu Yakadzama
Nhanganyaya yeSafira
Wafer yesafire imhando yesimbi yakagadzirwa nesimbi yakagadzirwa nealuminium oxide (Al₂O₃). Makristaro makuru esafire anorimwa achishandisa nzira dzepamusoro dzakadai seKyropoulos (KY) kana Heat Exchange Method (HEM), uye anozogadziriswa kuburikidza nekucheka, kurongedza, kukuya, uye kupukuta nemazvo. Nekuda kwehunhu hwayo hwepanyama, hwemaziso, uye hwemakemikari, safire wafer inoita basa risingatsiviwi muminda yesemiconductors, optoelectronics, uye electronics dzevatengi dzemhando yepamusoro.
Nzira Dzakakosha dzekugadzira Sapphire
| Maitiro | Nheyo | Zvakanakira | Zvikumbiro Zvikuru |
|---|---|---|---|
| Nzira yeVerneuil(Kusanganiswa kweMurazvo) | Upfu hweAl₂O₃ hwakachena kwazvo hunonyungudutswa mumurazvo weoxyhydrogen, madonhwe anooma mutsetse nemutsetse pambeu | Mari yakaderera, kushanda zvakanaka, uye maitiro ari nyore | Matombo emhando yepamusoro eSafaya, zvinhu zvepakutanga zvemaziso |
| Nzira yeCzochralski (CZ) | Al₂O₃ inonyungudutswa mumoto unopisirwa, uye kristaro yembeu inodhonzwa zvishoma nezvishoma kumusoro kuti ikure kristaro. | Inogadzira makristaro akakura zvine hunhu hwakanaka | Makristaro eLaser, mahwindo emaziso |
| Nzira yeKyropoulos (KY) | Kutonhodza kunonoka kunodzorwa kunoita kuti kristaro ikure zvishoma nezvishoma mukati memoto unopisirwa | Inokwanisa kukura makristaro makuru, asinganyanyi kushushikana (makumi emakirogiramu kana kupfuura) | Zvigadziko zve LED, zvidzitiro zve smartphone, zvikamu zve optical |
| Nzira yeHEM(Kuchinjana Kwekupisa) | Kutonhora kunotanga kubva pamusoro pechitofu, makristaro anokura achidzika kubva pambeu | Inogadzira makristaro makuru kwazvo (kusvika kumazana emakirogiramu) ane hunhu hwakafanana | Mahwindo makuru emaziso, nhandare yendege, mapurisa emasoja |
Kutungamirirwa neKristaro
| Kutungamira / Ndege | Index yeMiller | Hunhu | Zvikumbiro Zvikuru |
|---|---|---|---|
| C-ndege | (0001) | Yakatarisana ne-c-axis, polar surface, maatomu akarongwa zvakaenzana | LED, laser diodes, GaN epitaxial substrates (inonyanya kushandiswa) |
| Ndege | (11-20) | Kufanana ne-c-axis, nzvimbo isiri polar, inodzivirira mhedzisiro ye polarization | Zvishandiso zvemagetsi zveGaN epitaxy zvisiri zvepolar, optoelectronic |
| Ndege yeM | (10-10) | Yakafanana ne c-axis, isiri polar, uye yakaenzana zvakanyanya | Zvishandiso zveGaN epitaxy zvinoshanda zvakanyanya, optoelectronic |
| Ndege yeR | (1-102) | Yakarerekera ku-c-axis, ine hunyanzvi hwakanaka hwekuona | Mahwindo ekuona, ma infrared detectors, zvikamu zve laser |
Safira Wafer Specification (Inogona Kugadziriswa)
| Chinhu | Mawafer eSapphire ane 1-inch (0001) 430μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 25.4 mm +/- 0.1 mm | |
| Ukobvu | 430 μm +/- 25 μm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 5 μm | |
| KOTA | < 5 μm | |
| WARP | < 5 μm | |
| Kuchenesa / Kurongedza | Kirasi 100 yekuchenesa imba yekugezesa nekurongedza vacuum, | |
| Zvidimbu makumi maviri nezvishanu mupakeji imwe chete yekaseti kana pepakeji imwe chete. | ||
| Chinhu | Mawafer eSapphire ane 2-inch (0001) 430μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 50.8 mm +/- 0.1 mm | |
| Ukobvu | 430 μm +/- 25 μm | |
| Kutungamira Kwakatsetseka Kwepakutanga | Ndege yeA (11-20) +/- 0.2° | |
| Hurefu Hwepamusoro-soro | 16.0 mm +/- 1.0 mm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 10 μm | |
| KOTA | < 10 μm | |
| WARP | < 10 μm | |
| Kuchenesa / Kurongedza | Kirasi 100 yekuchenesa imba yekugezesa nekurongedza vacuum, | |
| Zvidimbu makumi maviri nezvishanu mupakeji imwe chete yekaseti kana pepakeji imwe chete. | ||
| Chinhu | Mawafer eSapphire ane 3-inch (0001) 500μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 76.2 mm +/- 0.1 mm | |
| Ukobvu | 500 μm +/- 25 μm | |
| Kutungamira Kwakatsetseka Kwepakutanga | Ndege yeA (11-20) +/- 0.2° | |
| Hurefu Hwepamusoro-soro | 22.0 mm +/- 1.0 mm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 15 μm | |
| KOTA | < 15 μm | |
| WARP | < 15 μm | |
| Kuchenesa / Kurongedza | Kirasi 100 yekuchenesa imba yekugezesa nekurongedza vacuum, | |
| Zvidimbu makumi maviri nezvishanu mupakeji imwe chete yekaseti kana pepakeji imwe chete. | ||
| Chinhu | Mawafer eSapphire ane 4-inch (0001) 650μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 100.0 mm +/- 0.1 mm | |
| Ukobvu | 650 μm +/- 25 μm | |
| Kutungamira Kwakatsetseka Kwepakutanga | Ndege yeA (11-20) +/- 0.2° | |
| Hurefu Hwepamusoro-soro | 30.0 mm +/- 1.0 mm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 20 μm | |
| KOTA | < 20 μm | |
| WARP | < 20 μm | |
| Kuchenesa / Kurongedza | Kirasi 100 yekuchenesa imba yekugezesa nekurongedza vacuum, | |
| Zvidimbu makumi maviri nezvishanu mupakeji imwe chete yekaseti kana pepakeji imwe chete. | ||
| Chinhu | Mawafer eSapphire ane 6-inch (0001) 1300μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 150.0 mm +/- 0.2 mm | |
| Ukobvu | 1300 μm +/- 25 μm | |
| Kutungamira Kwakatsetseka Kwepakutanga | Ndege yeA (11-20) +/- 0.2° | |
| Hurefu Hwepamusoro-soro | 47.0 mm +/- 1.0 mm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 25 μm | |
| KOTA | < 25 μm | |
| WARP | < 25 μm | |
| Kuchenesa / Kurongedza | Kirasi 100 yekuchenesa imba yekugezesa nekurongedza vacuum, | |
| Zvidimbu makumi maviri nezvishanu mupakeji imwe chete yekaseti kana pepakeji imwe chete. | ||
| Chinhu | Mawafer eSapphire ane 8-inch (0001) 1300μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 200.0 mm +/- 0.2 mm | |
| Ukobvu | 1300 μm +/- 25 μm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 30 μm | |
| KOTA | < 30 μm | |
| WARP | < 30 μm | |
| Kuchenesa / Kurongedza | Kirasi 100 yekuchenesa imba yekugezesa nekurongedza vacuum, | |
| Kurongedza chidimbu chimwe chete. | ||
| Chinhu | Mawafer eSapphire ane 12-inch (0001) 1300μm | |
| Zvinhu zveKristaro | 99,999%, Kuchena Kwakanyanya, Monocrystalline Al2O3 | |
| Giredhi | Prime, Yakagadzirira Epi | |
| Kutarisa Pamusoro | Ndege yeC (0001) | |
| C-plane off-angle yakananga kuM-axis 0.2 +/- 0.1° | ||
| Dhayamita | 300.0 mm +/- 0.2 mm | |
| Ukobvu | 3000 μm +/- 25 μm | |
| Rutivi Rumwe Rwakakweshwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (SSP) | Pamusoro Pekumashure | Yakakuyiwa zvakanaka, Ra = 0.8 μm kusvika 1.2 μm |
| Mativi maviri Akakwenenzverwa | Pamusoro pePamberi | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| (DSP) | Pamusoro Pekumashure | Yakakweshwa neEpi, Ra < 0.2 nm (neAFM) |
| TTV | < 30 μm | |
| KOTA | < 30 μm | |
| WARP | < 30 μm | |
Maitiro Ekugadzira Wafer yeSapphire
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Kukura kweKristaro
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Rimai matombo esapphire (100–400 kg) muchishandisa nzira yeKyropoulos (KY) muzvitofu zvekristaro zvakatsaurirwa kukura.
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Kuboorera & Kuumba Ingot
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Shandisa bhora rekuboorera kuti ubate bhora kuita ma ingots ane dhayamita ye 2-6 inches uye kureba kwe 50-200 mm.
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Kuunganidza Kwekutanga
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Ongorora ma ingots kuti uone kana asina kunaka uye ita annealing yekutanga inodziya zvakanyanya kuti uderedze kushushikana kwemukati.
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Kutungamirirwa neKristaro
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Sarudza nzvimbo chaiyo yechinhu chinonzi sapphire ingot (semuenzaniso, C-plane, A-plane, R-plane) uchishandisa zvishandiso zvekuona.
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Kucheka Kwemawaya Akawanda
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Cheka ingot kuita mawafer matete zvichienderana neukobvu hunodiwa uchishandisa michina yekucheka ine waya dzakawanda.
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Kuongorora Kwekutanga & Kuwedzerwa Kwechipiri
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Ongorora mawafer akachekwa (ukobvu, kuti akatsetseka, kana kuti haana kunaka pamusoro).
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Ita annealing zvakare kana zvichidikanwa kuti uwedzere kunaka kwekristaro.
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Kukwesha, Kukuya & Kupukuta kweCMP
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Ita chamfering, surface grinding, uye chemical mechanical polishing (CMP) uchishandisa michina yakasarudzika kuti uwane nzvimbo dzakagadzirwa negirazi.
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Kuchenesa
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Chenesa mawafer zvakanaka uchishandisa mvura yakachena uye makemikari munzvimbo yakachena yemukamuri kuti ubvise zvidimbu netsvina.
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Kuongorora Kwemaziso & Kwemuviri
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Ita kuti uone kutumirwa kwezvinhu uye unyore ruzivo rwemaziso.
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Yera maparamita ewafer anosanganisira TTV (Total Thickness Variation), Bow, Warp, kurongeka kwenzvimbo, uye kuomarara kwenzvimbo.
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Kupfeka (Sarudzo)
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Isa machira ekuputira (semuenzaniso, machira eAR, machira ekudzivirira) zvichienderana nezvinodiwa nemutengi.
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Kuongorora Kwekupedzisira & Kurongedza
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Ita ongororo yemhando yepamusoro 100% muimba yakachena.
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Rongedza mawafer mumabhokisi ekaseti pasi pemamiriro eClass-100 akachena woavhara usati waatumira.
Mashandisirwo eSapphire Wafers
Mawafer eSapphire, ane kuomarara kwawo kwakanyanya, kufambiswa kwemaziso kwakanaka, kushanda zvakanaka kwekupisa, uye kuputira magetsi, anoshandiswa zvakanyanya mumaindasitiri akasiyana-siyana. Mashandisirwo awo haangobatanidzi maindasitiri echinyakare e LED ne optoelectronic chete asiwo ari kuwedzera mu semiconductors, consumer electronics, uye nzvimbo dzepamusoro dzekudzivirira nendege.
1. MaSemiconductors uye Optoelectronics
Zvigadziko zve LED
Mawafer eSapphire ndiwo anonyanya kushandiswa pakukura kwe gallium nitride (GaN) epitaxial, anoshandiswa zvakanyanya mu LED dzebhuruu, ma LED machena, uye matekinoroji eMini/Micro LED.
MaDiodhi eLaser (LDs)
Sezvinhu zvinoshandisa maGaN-based laser diodes, mawafer esapphire anotsigira kugadzirwa kwemidziyo yelaser ine simba guru uye inogara kwenguva refu.
Photodetectors
Muzvishandiso zve ultraviolet ne infrared photodetectors, mawafer esapphire anowanzo shandiswa semahwindo akajeka uye sezvinhu zvinodzivirira kupisa.
2. Zvishandiso zveSemiconductor
MaRFIC (Radio Frequency Integrated Circuits)
Nekuda kwekudzivirira kwavo kwemagetsi kwakanaka, mawafer esapphire akakodzera kushandiswa mu microwave ine simba guru uye ine simba guru.
Tekinoroji yeSilicon-on-Sapphire (SoS)
Nekushandisa tekinoroji yeSoS, kugona kweparasitic kunogona kuderedzwa zvakanyanya, zvichiita kuti mashandiro ecircuit awedzere. Izvi zvinoshandiswa zvakanyanya mukukurukurirana kweRF uye mumagetsi emuchadenga.
3. Mashandisirwo Emaziso
Mahwindo eInfrared Optical
Nekukwanisa kuburitsa chiedza kwakawanda pakati pe200 nm–5000 nm wavelength, safaya inoshandiswa zvakanyanya mu infrared detectors uye infrared guidance systems.
Mahwindo eLaser Ane Simba Repamusoro
Kuomarara uye kuramba kupisa kwesafire kunoita kuti ive chinhu chakanaka kwazvo chekudzivirira mahwindo nemalenzi mumasisitimu elaser ane simba guru.
4. Zvigadzirwa zvemagetsi zvevatengi
Mavharo eLenzi yeKamera
Kuomarara kwakanyanya kwesafire kunoita kuti magirazi efoni nemakamera arambe achidzivirira kukwenya.
MaSensor eZvigunwe
Mawafer eSapphire anogona kushanda semachira akasimba, anoonekera anovandudza kururama uye kuvimbika pakuonekwa kweminwe.
Mawachi eSmart uye Zviratidziro zvePremium
Zvidzitiro zvesafire zvinosanganisa kusimba kwemavanga nekupenya kwakanyanya, zvichiita kuti zvive zvakakurumbira muzvigadzirwa zvemagetsi zvepamusoro.
5. Ndege neDziviriro
Madhomu eInfrared eMissile
Mahwindo esafire anoramba akajeka uye akagadzikana kana mamiriro ekunze achipisa zvakanyanya uye achimhanya zvakanyanya.
Masisitimu eOptical eNzvimbo dzeMhepo
Dzinoshandiswa mumahwindo emaziso ane simba guru uye michina yekutarisa yakagadzirirwa nzvimbo dzakaoma.
Zvimwe Zvigadzirwa zveSapphire Zvakajairika
Zvigadzirwa zveOptical
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Mahwindo eSapphire Optical
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Inoshandiswa muma lasers, spectrometers, infrared imaging systems, uye ma sensor windows.
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Rudzi rwekutumira:UV 150 nm kusvika pakati peIR 5.5 μm.
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Magirazi eSapphire
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Inoshandiswa mumasisitimu elaser ane simba guru uye muaerospace optics.
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Inogona kugadzirwa semalenzi ane convex, concave, kana cylindrical.
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MaPrism eSafira
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Inoshandiswa muzvishandiso zvekuyera maziso uye masisitimu emifananidzo chaiyo.
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Ndege neDziviriro
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Madhomu eSapphire
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Dzivirira vanotsvaga infrared mumabhomba, maUAV, uye ndege.
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Zvivharo zveSapphire Zvinodzivirira
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Ramba uchitsungirira kukanganiswa nemhepo inomhanya zvikuru uye mamiriro ekunze akaomarara.
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Kurongedza Chigadzirwa
Nezve XINKEHUI
Shanghai Xinkehui New Material Co., Ltd. ndeimwe yemakambani makurumutengesi mukuru we optical & semiconductor muChina, yakavambwa muna 2002. XKH yakagadzirwa kuti ipe vaongorori vedzidzo mawafers nezvimwe zvinhu zvesainzi zvine chekuita nesemiconductor uye masevhisi. Zvinhu zve semiconductor ndiro bhizinesi redu guru, timu yedu yakavakirwa pahunyanzvi, kubva payakavambwa, XKH inobatanidzwa zvakanyanya mukutsvagisa nekugadzira zvinhu zvemagetsi zvepamusoro, kunyanya mumunda wewafer/substrate dzakasiyana-siyana.
Vabatsiri
Nehunyanzvi hwayo hwezvinhu zve semiconductor, Shanghai Zhimingxin yave mubatsiri anovimbwa nemakambani makuru pasi rose nemasangano anozivikanwa edzidzo. Nekuenderera mberi kwayo mukuvandudza zvinhu zvitsva uye kugona, Zhimingxin yakagadzira hukama hwakasimba nevatungamiriri veindasitiri vakaita saSchott Glass, Corning, naSeoul Semiconductor. Kushanda pamwe chete uku hakuna kungovandudza hunyanzvi hwezvigadzirwa zvedu chete, asiwo kwakasimudzira kufambira mberi kwetekinoroji muminda yemagetsi emagetsi, zvishandiso zve optoelectronic, uye zvishandiso zve semiconductor.
Pamusoro pekushandira pamwe nemakambani anozivikanwa, Zhimingxin yakagadzirawo hukama hwenguva refu hwekushandira pamwe nemayunivhesiti epamusoro pasi rese akadai seHarvard University, University College London (UCL), neYunivhesiti yeHouston. Kuburikidza nekushanda pamwe chete uku, Zhimingxin haingopi rutsigiro rwehunyanzvi kumapurojekiti ekutsvaga kwesainzi muzvikoro, asiwo inobatanidzwa mukugadzirwa kwezvinhu zvitsva uye hunyanzvi hwetekinoroji, ichivimbisa kuti tinogara tiri pamberi peindasitiri yesemiconductor.
Nekushandira pamwe chete nemakambani aya ane mukurumbira pasi rose nemasangano edzidzo, Shanghai Zhimingxin inoramba ichikurudzira hunyanzvi hwekugadzira nekuvandudza tekinoroji, ichipa zvigadzirwa zvepasi rose nemhinduro dzekusangana nezvinodiwa zviri kukura mumusika wepasi rose.
