AlN-on-NPSS Wafer: Chigadziko cheAluminium Nitride Chinoshanda Zvakanyanya paSubstrate yeSapphire Isina Kupukutwa yekushandiswa kweTemperature Yakakwira, Simba Rakawanda, uye RF

AlN-on-NPSS Wafer: Chigadziko cheAluminium Nitride Chinoshanda Zvakanyanya Pachikamu CheSapphire Chisina Kupukutwa Chekushandisa Pakupisa Kwakanyanya, Simba Rakawanda, uye RF Mufananidzo Unoratidzwa

Tsananguro pfupi:

Wafer yeAlN-on-NPSS inosanganisa layer yealuminium nitride (AlN) ine simba guru nesafire substrate isina kuporishwa (NPSS) kuti ipe mhinduro yakakodzera kune mashandisirwo ekupisa kwakanyanya, simba guru, uye radio-frequency (RF). Musanganiswa wakasiyana weAlN's thermal conductivity uye hunhu hwemagetsi, pamwe chete nesimba remakanika rakanaka resubstrate, zvinoita kuti wafer iyi ive sarudzo inofarirwa kune mashandisirwo anoda simba akadai semagetsi emagetsi, zvishandiso zvemafrequency akawanda, uye zvikamu zve optical. Nekupisa kwakanyanya, kurasikirwa kushoma, uye kuenderana nenzvimbo dzekupisa kwakanyanya, wafer iyi inogonesa kugadzirwa kwemidziyo yechizvarwa chinotevera ine mashandiro akanaka.

Tumira email kwatiri

Zvinhu zvirimo

Rutivi rweAlN rwepamusoro-soro: Aluminium Nitride (AlN) inozivikanwa nekushandisa kwayokupisa kwakanyanya(~200 W/m·K),bhandi rakafarauyevoltage yakanyanya kukanganiswa, zvichiita kuti ive chinhu chakanakirasimba guru, kakawanda-kakawandauyetembiricha yepamusoromafomu.

Substrate yeSapphire Isina Kupukutwa (NPSS): Safaya isina kupukutwa inopaisingadhuri, yakasimba zvikuruhwaro, zvichiita kuti hwaro hwakasimba hwekukura kwe epitaxial pasina kuoma kwekukwesha pamusoro. Hunhu hwakanaka hweNPSS hunoita kuti igare kwenguva refu munzvimbo dzakaoma.

Kugadzikana Kwekupisa Kwakanyanya: Wafer yeAlN-on-NPSS inogona kutsungirira kushanduka-shanduka kwekupisa kwakanyanya, zvichiita kuti ikodzere kushandiswa mumagetsi emagetsi, masisitimu emotokari, Ma LEDuyemafomu ekuonazvinoda kushanda kwakasimba mumamiriro ekunze anopisa zvakanyanya.

Kudzivirira Magetsi: AlN ine hunhu hwakanaka hwekudzivirira kupisa kwemagetsi, zvichiita kuti ive yakakwana kune mashandisirwo ayokupatsanurwa kwemagetsizvakakosha, kusanganisiraMidziyo yeRFuyezvemagetsi zve microwave.

Kupisa Kunopisa Kwakanyanya: Nekugona kupisa kwakanyanya, AlN layer inoita kuti kupisa kuparare zvakanaka, izvo zvakakosha kuti michina irambe ichishanda uye igare kwenguva refu pasi pesimba rakawanda uye kakawanda.

Magadzirirwo ehunyanzvi

Paramita	Tsanangudzo
Dhayamita yeWafer	2-inch, 4-inch (saizi dzakagadzirirwa dziripo)
Rudzi rweSubstrate	Substrate yeSapphire Isina Kupukutwa (NPSS)
Ukobvu hweAlN Layer	2µm kusvika 10µm (inogadziriswa)
Ukobvu hwe substrate	430µm ± 25µm (ye 2-inch), 500µm ± 25µm (ye 4-inch)
Kufambisa kwekupisa	200 W/m·K
Kuramba kweMagetsi	Kudzivirira kwakanyanya, kwakakodzera kushandiswa kweRF
Kuoma Kwepamusoro	Ra ≤ 0.5µm (yeAlN layer)
Kuchena Kwezvinhu	AlN yakachena kwazvo (99.9%)
Ruvara	Chena/Haisi Chena (AlN layer ine NPSS substrate ine ruvara rwakajeka)
Wafer Warp	< 30µm (zvakajairika)
Rudzi rweDoping	Isina kudhakwa (inogona kugadziriswa)

Mashandisirwo

IyoWafer yeAlN-on-NPSSYakagadzirirwa kushandiswa kwakasiyana-siyana kwemabasa epamusoro mumaindasitiri akati wandei:

Zvigadzirwa zvemagetsi zvine simba guru: Kufambiswa kwemhepo kwakanyanya kweAlN layer uye hunhu hwekudzivirira kupisa kunoita kuti ive chinhu chakanakirama transistors emagetsi, zvinogadzirisauyemaIC emagetsiinoshandiswa mumota, maindasitiriuyesimba rinogona kuvandudzwamasisitimu.

Zvikamu zveRadio-Frequency (RF): Hunhu hwakanaka hwekudzivirira magetsi hweAlN, pamwe chete nekurasikirwa kwayo kushoma, zvinoita kuti kugadzirwa kweMatransistors eRF, HEMTs (Matransistors eHigh-Electron-Mobility), nezvimwezvikamu zve microwavedzinoshanda zvakanaka pamafrequencies akakwira uye padanho remagetsi.

Zvishandiso zveOptical: Mawafer eAlN-on-NPSS anoshandiswa mumadiode elaser, Ma LEDuyephotodetectors, ukokupisa kwakanyanyauyekusimba kwemakanikazvakakosha kuti zvirambe zvichishanda kwenguva yakareba.

Masensa Ekupisa Kwakakwirira: Kukwanisa kwewafer kutsungirira kupisa kwakanyanya kunoita kuti ikwanise kushandiswamasensa ekupisauyekutarisa zvakatipoteredzamumaindasitiri akaita sendege, motauyeoiri negasi.

Kurongedza Semiconductor: Inoshandiswa mu zvinoparadzira kupisauyezvidimbu zvekutarisira kupisamumapakeji, zvichiita kuti zvive pachena kuti ma semiconductors akavimbika uye anoshanda zvakanaka.

Mibvunzo neMhinduro

Mubvunzo: Ndeipi mukana mukuru weAlN-on-NPSS wafers pane zvinhu zvechinyakare zvakaita sesilicon?

A: Chinhu chikuru chakanakira iAlN'skupisa kwakanyanya, izvo zvinoita kuti ikwanise kubvisa kupisa zvinobudirira, zvichiita kuti ive yakakodzerasimba guruuyemashandisirwo anoitwa kakawandauko kutonga kupisa kwakakosha. Pamusoro pezvo, AlN inebhandi rakafarauye zvakanakisakuputira magetsi, zvichiita kuti ive nani kushandiswa muRFuyezvishandiso zve microwavezvichienzaniswa nesilicon yechinyakare.

Mubvunzo: Ko AlN layer iri pamawafer eNPSS inogona kugadziriswa here?

A: Ehe, AlN layer inogona kugadziriswa maererano nehukobvu (kubva pa2µm kusvika 10µm kana kupfuura) kuti ienderane nezvinodiwa zveapplication yako. Isu tinopawo kugadzirisa maererano nerudzi rwedoping (N-type kana P-type) uye mamwe ma layer emabasa akasarudzika.

Q: Ndeipi nzira yakajairika yekushandisa wafer iyi muindasitiri yemotokari?

A: Muindasitiri yemotokari, mawafer eAlN-on-NPSS anoshandiswa zvakanyanya mumagetsi emagetsi, Masisitimu emwenje e LEDuyemasensa ekupisaDzinopa manejimendi yepamusoro yekupisa uye kudzivirira kupisa kwemagetsi, izvo zvakakosha kune masisitimu anoshanda zvakanaka anoshanda mumamiriro ekunze akasiyana-siyana ekupisa.