8inch SiC Kugadzira giredhi wafer 4H-N SiC substrate

8inch SiC Production giredhi wafer 4H-N SiC substrate Featured Image

Tsanangudzo Pfupi

8-inch SiC substrates inoshandiswa mumagetsi emagetsi epamusoro-soro, akadai sesimba MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), Schottky diodes uye mamwe magetsi semiconductor zvishandiso.

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Tafura inotevera inoratidza zvakatemwa zve 8inch SiC wafers yedu:

8inch N-mhando SiC DSP Zvinyorwa
Number	Item	Unit	Kugadzirwa	Tsvakurudzo	Dummy
1: parameters
1.1	polytype	--	4H	4H	4H
1.2	pamusoro pekutarisa	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Egetsi parameter
2.1	dopant	--	n-mhando Nitrogen	n-mhando Nitrogen	n-mhando Nitrogen
2.2	resistivity	uyo ·cm	0.015~0.025	0.01~0.03	NA
3:Mechanical parameter
3.1	dhayamita	mm	200±0.2	200±0.2	200±0.2
3.2	ukobvu	μm	500±25	500±25	500±25
3.3	Notch orientation	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Notch Depth	mm	1~1.5	1~1.5	1~1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Bow	μm	-25~25	-45~45	-65~65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4:Chimiro
4.1	micropipe density	e/cm2	≤2	≤10	≤50
4.2	metal content	maatomu/cm2	≤1E11	≤1E11	NA
4.3	TSD	e/cm2	≤500	≤1000	NA
4.4	BPD	e/cm2	≤2000	≤5000	NA
4.5	TED	e/cm2	≤7000	≤10000	NA
5.Front quality
5.1	pamberi	--	Si	Si	Si
5.2	pamusoro pekupedzisira	--	Si-face CMP	Si-face CMP	Si-face CMP
5.3	particle	ea/wafer	≤100(saizi≥0.3μm)	NA	NA
5.4	scratch	ea/wafer	≤5, Hurefu Hwose≤200mm	NA	NA
5.5	Edge chips/indents/cracks/stains/contamination	--	Hapana	Hapana	NA
5.6	Polytype nzvimbo	--	Hapana	Nzvimbo ≤10%	Nzvimbo ≤30%
5.7	pamberi pemaka	--	Hapana	Hapana	Hapana
6:Kumashure kunaka
6.1	back finish	--	C-chiso MP	C-chiso MP	C-chiso MP
6.2	scratch	mm	NA	NA	NA
6.3	Back defects kumucheto machipisi/indents	--	Hapana	Hapana	NA
6.4	Back roughness	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Kumaka kumashure	--	Notch	Notch	Notch
7:kumucheto
7.1	kumucheto	--	Chamfer	Chamfer	Chamfer
8:Package
8.1	kurongedza	--	Epi-yakagadzirira ne vacuum kurongedza	Epi-yakagadzirira ne vacuum kurongedza	Epi-yakagadzirira ne vacuum kurongedza
8.2	kurongedza	--	Multi-wafer kurongedza makaseti	Multi-wafer kurongedza makaseti	Multi-wafer kurongedza makaseti