8inch SiC yekugadzira giredhi rekugadzira 4H-N SiC substrate
Tafura inotevera inoratidza magadzirirwo e8inch SiC wafers edu:
| Mhando dzeSiC DSP dze8inch N | |||||
| Nhamba | Chinhu | Chikamu | Kugadzirwa | Tsvagiridzo | Dummy |
| 1: maparameter | |||||
| 1.1 | mhando yepolytype | -- | 4H | 4H | 4H |
| 1.2 | kutarisa pamusoro | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Paramita yemagetsi | |||||
| 2.1 | dopant | -- | Nitrogen yerudzi rwe n | Nitrogen yerudzi rwe n | Nitrogen yerudzi rwe n |
| 2.2 | kuramba | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Chiratidzo chemuchina | |||||
| 3.1 | dhayamita | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | ukobvu | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Kurongeka kwenotch | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Kudzika kweNotch | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | uta | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Kukombama | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Chimiro | |||||
| 4.1 | kuwanda kwemapaipi e micropope | ea/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | zviri mukati mesimbi | maatomu/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
| 5. Hunhu hwepamberi | |||||
| 5.1 | mberi | -- | Si | Si | Si |
| 5.2 | kupedzisa pamusoro | -- | Si-face CMP | Si-face CMP | Si-face CMP |
| 5.3 | chidimbu | chirongo/wafer | ≤100 (saizi ≥0.3μm) | NA | NA |
| 5.4 | kukwenya | chirongo/wafer | ≤5, Hurefu Hwose ≤200mm | NA | NA |
| 5.5 | Mupendero machipisi/maburi/maburi/mavanga/kusvibiswa | -- | Hapana | Hapana | NA |
| 5.6 | Nzvimbo dzemhando dzakasiyana-siyana | -- | Hapana | Nzvimbo ≤10% | Nzvimbo ≤30% |
| 5.7 | chiratidzo chepamberi | -- | Hapana | Hapana | Hapana |
| 6: Hunhu hwekumashure | |||||
| 6.1 | kupedzisa kumashure | -- | C-face MP | C-face MP | C-face MP |
| 6.2 | kukwenya | mm | NA | NA | NA |
| 6.3 | Kuremara kwemusana kumucheto machipisi/zvimedu | -- | Hapana | Hapana | NA |
| 6.4 | Kuoma kwemusana | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Kumaka kumashure | -- | Notch | Notch | Notch |
| 7:mupendero | |||||
| 7.1 | mupendero | -- | Chamfer | Chamfer | Chamfer |
| 8: Pakeji | |||||
| 8.1 | kurongedza | -- | Yakagadzirira kupiswa ne vacuum kurongedza | Yakagadzirira kupiswa ne vacuum kurongedza | Yakagadzirira kupiswa ne vacuum kurongedza |
| 8.2 | kurongedza | -- | Wafer yakawanda kurongedza makaseti | Wafer yakawanda kurongedza makaseti | Wafer yakawanda kurongedza makaseti |
Dhayagiramu Yakadzama
Zvigadzirwa Zvakabatana
Nyora meseji yako pano woitumira kwatiri