2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

Tsananguro pfupi:

Ingot yeSiC (silicon carbide) ine 2-inch inoreva kristaro imwe chete yesilicon carbide yakaita secylindrical kana block-shaped ine dhayamita kana mupendero wakareba masendimita maviri. Ingot dzeSilicon carbide dzinoshandiswa sezvinhu zvekutanga pakugadzira zvishandiso zvakasiyana-siyana zve semiconductor, zvakaita semidziyo yemagetsi ine simba uye michina ye optoelectronic.

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Tekinoroji Yekukura kweSiC Crystal

Hunhu hweSiC hunoita kuti zviome kurima makristaro mamwechete. Izvi zvinonyanya kukonzerwa nekuti hapana chikamu chemvura chine chiyero chestoichiometric cheSi: C = 1: 1 pakumanikidzwa kwemhepo, uye hazvigoneke kurima SiC nenzira dzekukura dzakakura, dzakadai senzira yekudhirowa zvakananga uye nzira yekudonha, inova ndiyo nzira huru yeindasitiri yesemiconductor. Mupfungwa, mhinduro ine chiyero chestoichiometric cheSi: C = 1: 1 inogona kuwanikwa chete kana kumanikidzwa kuri kukuru kupfuura 10E5atm uye tembiricha iri pamusoro pe3200℃. Parizvino, nzira huru dzinosanganisira nzira yePVT, nzira yeliquid-phase, uye nzira yekupisa kwakanyanya kwevapor-phase chemical deposition.

Mawafer nemakristaro eSiC atinopa anonyanya kurimwa ne physical vapor transport (PVT), uye zvinotevera ipfupiso yePVT:

Nzira yekufambisa vapor (PVT) yakatanga kubva pahunyanzvi hwekugadzira gas-phase sublimation hwakatangwa naLely muna 1955, umo SiC powder inoiswa mu graphite tube yodziiswa kusvika pakupisa kwakanyanya kuti SiC powder iore uye iite sublimate, uye ipapo graphite tube inotonhodzwa, uye zvikamu zvegas-phase zvakaora zveSiC powder zvinoiswa uye zvinogadzirwa seSiC crystals munzvimbo yakapoteredza graphite tube. Kunyangwe nzira iyi yakaoma kuwana maSiC single crystals makuru uye maitiro ekuisa mukati me graphite tube akaoma kudzora, inopa mazano kune vanotevera kutsvaga ruzivo.

YM Tairov nevamwe vake muRussia vakatanga pfungwa yekristaro yembeu pahwaro uhwu, izvo zvakagadzirisa dambudziko rechimiro chekristaro chisingadzoreki uye chinzvimbo chenucleation chemakristaro eSiC. Vaongorori vakatevera vakaramba vachivandudza uye pakupedzisira vakagadzira nzira yekufambisa vapor (PVT) iyo inoshandiswa mumaindasitiri nhasi.

Senzira yekutanga yekukura kweSiC crystal, PVT ndiyo nzira inonyanya kushandiswa pakukura kweSiC crystals. Kana ichienzaniswa nedzimwe nzira, nzira iyi haina zvinodiwa zvakanyanya pakugadzira michina, nzira iri nyore yekukura, ine simba rekudzora, yakagadzirwa zvakanaka uye yakatogadzirwa, uye yakatove yakagadzirwa nemaindasitiri.