2 inch 4 inch 6 inch Patterned Sapphire Substrate (PSS) painorimwa zvinhu zveGaN zvinogona kushandisa kuvhenekera kwe LED.

Tsanangudzo Pfupi

Patterned sapphire substrate (PSS) ndeye mask yekuomesa etching pasafire substrate, mask inotemerwa pateni neyakajairwa lithography process, uye ipapo safire inomisikidzwa neICP etching tekinoroji, uye mask inobviswa, uye pakupedzisira GaN zvinhu zvinokura pairi, kuitira kuti longitudinal epitaxy yeGaN epitaxy yezvinhu ive hori. Izvi zvinosanganisira matanho akati wandei senge photoresist coating, nhanho kuratidzwa, kugadzira exposure pateni, ICP yakaoma etching uye kuchenesa.

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Main features

1. Mamiriro ezvinhu:
Iyo PSS pamusoro ine yakarongeka koni kana triangular conical pateni ine chimiro, saizi uye kugovera kunogona kudzorwa nekugadzirisa etching process parameters.
Aya magirafu maumbirwo anobatsira kushandura nzira yekuparadzira yechiedza uye kuderedza kuratidzwa kwechiedza, nekudaro kunatsiridza kugona kwekubvisa chiedza.

2. Material maitiro:
PSS inoshandisa yemhando yepamusoro yesafire senge substrate zvinhu, ine hunhu hwekuomarara kwepamusoro, yakanyanya kupisa conductivity, yakanaka kugadzikana kwemakemikari uye kujeka kwemaziso.
Aya maitiro anogonesa PSS kutsungirira nharaunda dzakaomarara senge tembiricha yakakwira uye kumanikidza uku ichichengetedza yakanakisa optical performance.

3. Optical performance:
Nekushandura kupararira kwakawanda pamusangano pakati peGaN nesapphire substrate, PSS inoita kuti mafotoni anonyatsoratidzwa mukati meGaN layer ave nemukana wekupukunyuka kubva kusafiro substrate.
Iyi ficha inovandudza zvakanyanya kuburitsa kwechiedza kwe LED uye inowedzera kupenya kusimba kweiyo LED.

4. Maitiro ekuita:
Maitiro ekugadzira ePSS akaomarara, anosanganisira akawanda nhanho senge lithography uye etching, uye inoda yakakwirira-chaiyo michina uye maitiro ekugadzirisa.
Nekudaro, nekuenderera mberi kwekufambira mberi kwehunyanzvi uye kudzikiswa kwemitengo, nzira yekugadzira yePSS inogadziridzwa zvishoma nezvishoma uye inovandudzwa.

Core advantage

1.Kuvandudza chiedza chekuwedzera kwechiedza: PSS inonyanya kuvandudza chiedza chekubudisa chiedza che LED nekushandura nzira yekuparadzira chiedza uye kuderedza kutaridzika kwese.

2.Kurebesa hupenyu hwe LED: PSS inogona kuderedza kusvibiswa kwemagetsi eGaN epitaxial zvinhu, nokudaro kuderedza kushandiswa kusina-radiative recombination uye reverse leakage ikozvino munharaunda inoshanda, kuwedzera hupenyu hwe LED.

3.Kuvandudza kupenya kwe LED: Pamusana pekuvandudzwa kwechiedza chekuwedzera kwechiedza uye kuwedzerwa kwehupenyu hwe LED, chiedza che LED chinopenya paPSS chinowedzera zvakanyanya.

4.Kuderedza mari yekugadzira: Kunyange zvazvo nzira yekugadzira yePSS inenge yakaoma, inogona kuvandudza zvakanyanya kupenya kwechiedza uye hupenyu hwe LED, nokudaro kuderedza mari yekugadzira kune imwe nzvimbo nekuvandudza kukwikwidzana kwechigadzirwa.

Main application nzvimbo

1. Kuvhenekera kwe LED: PSS se substrate material ye LED chips, inogona kuvandudza zvakanyanya kupenya kwechiedza uye hupenyu hwe LED.
Mumunda wekuvhenekera kwe LED, PSS inoshandiswa zvakanyanya muzvigadzirwa zvakasiyana-siyana zvekuvhenekera, zvakadai semarambi emugwagwa, marambi etafura, magetsi emotokari nezvimwe zvakadaro.

2.Semiconductor midziyo: Mukuwedzera kune chiedza che LED, PSS inogonawo kushandiswa kugadzira zvimwe zvigadzirwa zve semiconductor, zvakadai semagetsi ekuvhenekera, lasers, nezvimwewo. Zvigadzirwa izvi zvine zvakasiyana-siyana zvekushandisa mukukurukurirana, zvekurapa, zvehondo uye mamwe minda.

3.Optoelectronic integration: The optical properties uye kugadzikana kwePSS kunoita kuti ive imwe yezvinhu zvakakosha mumunda wekubatanidza optoelectronic.Mukubatanidza optoelectronic, PSS inogona kushandiswa kugadzira optical waveguides, optical switches uye zvimwe zvikamu kuti zvione kutumira uye kushandiswa kwezviratidzo zvemaziso.

Technical parameters

Item	Yakagadzirwa Sapphire Substrate (2~6inch)
Diameter	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ukobvu	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Surface Oientation	C-ndege (0001) kure-kukona yakananga kuM-axis (10-10) 0.2 ± 0.1°
	C-ndege (0001) kure-kukona yakananga A-akisi (11-20) 0 ± 0.1°
Yekutanga Flat Oriental	A-Ndege (11-20) ± 1.0°
Primary Flat Length	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
R-Ndege	9-o'clock
Front Surface Pedzisa	Patterned
Back Surface Finish	SSP:Fine-ground,Ra=0.8-1.2um; DSP: Epi-yakakwenenzverwa, Ra <0.3nm
Laser Mark	Rutivi rwekuseri
TTV	≤8μm	≤10μm	≤20μm
BOW	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Kusabatanidzwa kumucheto	≤2 mm
Tsanangudzo yePateni	Chimiro Chimiro	Dome, Koni, Piramidhi
	Pattern Height	1.6~1.8μm
	Muenzaniso Diameter	2.75~2.85μm
	Pattern Space	0.1~0.3μm

XKH inotarisa pakusimudzira, kugadzira uye kutengesa kwepattered sapphire substrate (PSS), uye yakazvipira kupa mhando yepamusoro, yepamusoro-soro yePSS zvigadzirwa kune vatengi pasi rese. XKH ine tekinoroji yekugadzira yepamberi uye tekinoroji yehunyanzvi timu, inogona kugadzirisa zvigadzirwa zvePSS zvine maratidziro akasiyana uye akasiyana mapatani zvimiro zvinoenderana nezvinodiwa nevatengi. Panguva imwecheteyo, XKH inoteerera kumhando yechigadzirwa uye mhando yebasa, uye yakazvipira kupa vatengi huwandu hwakazara hwetsigiro yehunyanzvi uye mhinduro. Mundima yePSS, XKH yakaunganidza ruzivo rwakapfuma uye zvakanakira, uye inotarisira kushanda pamwe chete nevanodyidzana nepasirese kusimudzira pamwe chete kusimudzira kuvandudzwa kwemwenje we LED, semiconductor zvishandiso uye mamwe maindasitiri.