2 inch 4 inch 6 inch Patterned Sapphire Substrate (PSS) iyo GaN zvinhu zvinorimwa zvinogona kushandiswa pakugadzira mwenje we LED

2 inch 4 inch 6 inch Patterned Sapphire Substrate (PSS) iyo GaN zvinhu zvinorimwa zvinogona kushandiswa pamwenje we LED Mufananidzo wakaratidzwa

Tsananguro pfupi:

Chigadziko chesapphire chine mapatani (PSS) chinoshandiswa pakugadzira masiki akaoma pasapphire substrate, masiki acho anonyorwa nepatani nemaitiro akajairwa e lithography, uye masiki acho anonyorwa ne ICP etching technology, uye masiki acho anobviswa, uye pakupedzisira zvinhu zveGaN zvinokura pairi, kuitira kuti epitaxy refu yeGaN material ive horizontal epitaxy. Maitiro aya anosanganisira matanho akati wandei akadai se photoresist coating, step exposure, developing exposure pattern, ICP dry etching uye cleansing.

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Zvinhu zvirimo

Zvinhu zvikuru

1. Hunhu hwechivakwa:
Pamusoro pePSS pane koni yakarongeka kana kuti patani yekona ine mativi matatu ine chimiro, saizi uye kupararira kwayo zvinogona kudzorwa nekugadzirisa maparamita ekuita etching.
Maumbirwo aya emifananidzo anobatsira kushandura nzira yekupararira kwechiedza uye kuderedza kuratidzwa kwechiedza chose, nokudaro zvichivandudza kushanda zvakanaka kwekutorwa kwechiedza.

2. Hunhu hwezvinhu:
PSS inoshandisa sapphire yemhando yepamusoro sechigadzirwa chepasi, icho chine hunhu hwekuoma kwakanyanya, kupisa kwakanyanya, kugadzikana kwakanaka kwemakemikari uye kujeka kwemaziso.
Hunhu uhwu hunoita kuti PSS ikwanise kutsungirira mamiriro ezvinhu akaoma akadai sekupisa kwakanyanya uye kumanikidzwa uku ichiramba ichishanda zvakanaka.

3. Kushanda kwemaziso:
Nekuchinja kuwanda kwekupararira pakati peGaN nesapphire substrate, PSS inoita kuti maphoton anoratidzwa zvizere mukati meGaN layer ave nemukana wekubuda kubva musapphire substrate.
Chinhu ichi chinovandudza zvakanyanya kushanda kwe LED pakuburitsa chiedza uye chinowedzera kupenya kwe LED.

4. Hunhu hwemaitiro:
Maitiro ekugadzira PSS akaomarara, anosanganisira matanho akawanda akadai se lithography uye etching, uye anoda michina yakanyatsogadzirwa uye kudzora maitiro acho.
Zvisinei, nekufambira mberi kwetekinoroji uye kudzikiswa kwemitengo, maitiro ekugadzira PSS anovandudzwa zvishoma nezvishoma uye anovandudzwa.

Mukana wepakati

1. Kuvandudza kushanda zvakanaka kwekubvisa chiedza: PSS inovandudza zvakanyanya kushanda zvakanaka kwekubvisa chiedza che LED nekuchinja nzira yekupararira kwechiedza uye kuderedza kuratidzwa kwese.

2.Kurebesa hupenyu hwe LED: PSS inogona kuderedza kuwanda kwe dislocation yezvinhu zveGaN epitaxial, nokudaro ichideredza non-radiative recombination uye reverse leakage current munzvimbo inoshanda, zvichiita kuti LED irambe iripo.

3. Kuvandudza kupenya kwe LED: Nekuda kwekuvandudzwa kwekushanda kwekubvisa chiedza uye kuwedzera hupenyu hwe LED, kupenya kwe LED paPSS kwakawedzerwa zvakanyanya.

4. Deredza mari yekugadzira: Kunyangwe maitiro ekugadzira ePSS akaomarara, anogona kuvandudza kushanda zvakanaka uye hupenyu hwe LED, nokudaro achideredza mari yekugadzira kusvika pamwero wakati uye achivandudza kukwikwidza kwechigadzirwa.

Nzvimbo huru dzekushandisa

1. Mwenje we LED: PSS sechinhu chinoshandiswa pakugadzira machipisi e LED, inogona kuvandudza kushanda zvakanaka kwe LED uye hupenyu hwayo.
Munyaya yemwenje ye LED, PSS inoshandiswa zvakanyanya muzvigadzirwa zvakasiyana-siyana zvemwenje, zvakaita semwenje yemumugwagwa, marambi etafura, marambi emotokari nezvimwewo.

2. Midziyo yeSemiconductor: Pamusoro pemwenje ye LED, PSS inogonawo kushandiswa kugadzira mimwe michina ye semiconductor, yakaita se light detectors, lasers, nezvimwewo. Midziyo iyi ine mashandisirwo akasiyana-siyana mukukurukurirana, kurapa, zvechiuto nedzimwe nzvimbo.

3. Kubatanidzwa kweOptoelectronic: Hunhu hwePSS hwemaziso uye kugadzikana kwayo zvinoita kuti ive imwe yezvinhu zvakanakisisa mumunda wekubatanidzwa kweOptoelectronic. Mukubatanidzwa kweOptoelectronic, PSS inogona kushandiswa kugadzira mawaveguides emaziso, maswichi emaziso nezvimwe zvikamu kuti zviite kuti zviratidzo zvemaziso zvitumirwe uye zvigadziriswe.

Magadzirirwo ehunyanzvi

Chinhu	Substrate yeSapphire ine Mapatani (2~6inch)
Dhayamita	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ukobvu	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Kutarisa Pamusoro	C-plane (0001) iri kure nekona yakananga kuM-axis (10-10) 0.2 ± 0.1°
	C-plane (0001) iri kure nekona yakananga kuA-axis (11-20) 0 ± 0.1°
Kutungamira Kwakatsetseka Kwepakutanga	Ndege yeA (11-20) ± 1.0°
Hurefu Hwepamusoro-soro	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
R-Ndege	9-o'clock
Kupedzisa Kwemberi	Yakagadzirwa nemaitiro
Kupedzisa Kwekumashure	SSP: Yakagadzirwa zvakanaka, Ra=0.8-1.2um; DSP: Yakakweshwa neEpi, Ra<0.3nm
Chiratidzo cheLaser	Rutivi rwekumashure
TTV	≤8μm	≤10μm	≤20μm
KOTA	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Kusabatanidzwa kweMupendero	≤2 mm
Tsanangudzo yePateni	Maumbirwo eChimiro	Dome, Koni, Piramidhi
	Kureba kwePateni	1.6~1.8μm
	Dhayamita yePateni	2.75~2.85μm
	Nzvimbo yePattern	0.1~0.3μm

XKH inotarisa pakugadzira, kugadzira, uye kutengesa midziyo yePSS ine mapatani (PSS), uye yakazvipira kupa zvigadzirwa zvePSS zvemhando yepamusoro uye zvinoshanda zvakanaka kune vatengi pasi rese. XKH ine tekinoroji yekugadzira yepamusoro uye timu yehunyanzvi yehunyanzvi, iyo inogona kugadzirisa zvigadzirwa zvePSS zvine zvirevo zvakasiyana uye maumbirwo akasiyana emapatani zvichienderana nezvinodiwa nevatengi. Panguva imwe chete, XKH inotarisisa kunaka kwechigadzirwa uye mhando yebasa, uye yakazvipira kupa vatengi rutsigiro rwakazara rwehunyanzvi uye mhinduro. Mumunda wePSS, XKH yakaunganidza ruzivo rwakakura uye mabhenefiti, uye inotarisira kushanda pamwe chete nevatinoshanda navo pasi rose kusimudzira pamwe chete budiriro itsva yemwenje yeLED, zvishandiso zve semiconductor nedzimwe indasitiri.