12 Inch SiC substrate Diameter 300mm Ukobvu 750μm 4H-N Rudzi runogona kugadzirwa
Technical parameters
12 inch Silicon Carbide (SiC) Substrate Kutsanangurwa | |||||
Giredhi | ZeroMPD Kugadzirwa Giredhi(Z Giredhi) | Standard Production Giredhi(P Giredhi) | Dummy Grade (D giredhi) | ||
Diameter | 3 0 0 mm~1305mm | ||||
Ukobvu | 4H-N | 750μm±15 μm | 750μm±25 μm | ||
4H-SI | 750μm±15 μm | 750μm±25 μm | |||
Wafer Orientation | Kunze kweaxis : 4.0° yakananga <1120 >±0.5° ye4H-N, Paaxis: <0001>±0.5° ye4H-SI | ||||
Micropipe Density | 4H-N | ≤0.4cm-2 | ≤4cm-2 | ≤25cm-2 | |
4H-SI | ≤5cm-2 | ≤10cm-2 | ≤25cm-2 | ||
Resistivity | 4H-N | 0.015~0.024 Ω·cm | 0.015~0.028 Ω·cm | ||
4H-SI | ≥1E10 Ω·cm | ≥1E5 Ω·cm | |||
Yekutanga Flat Oriental | {10-10} ±5.0° | ||||
Primary Flat Length | 4H-N | N/A | |||
4H-SI | Notch | ||||
Kusabatanidzwa kumucheto | 3 mm | ||||
LTV/TTV/Bow/Warp | ≤5μm/≤15μm/≤35 μm/≤55 μm | ≤5μm/≤15μm/≤35 □ μm/≤55 □ μm | |||
Kukasharara | Polish Ra≤1 nm | ||||
CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
Edge Cracks By High Intensity Chiedza Hex Plates By High Intensity Chiedza Polytype Nzvimbo NeKusimba Kwakanyanya Chiedza Visual Carbon Inclusions Silicon Surface Scratches By High Intensity Chiedza | Hapana Cumulative area ≤0.05% Hapana Cumulative area ≤0.05% Hapana | Cumulative kureba ≤ 20 mm, single kureba≤2 mm Cumulative area ≤0.1% Cumulative area≤3% Yakawedzerwa nzvimbo ≤3% Cumulative kureba≤1×wafer dhayamita | |||
Edge Chips By High Intensity Chiedza | Hapana anotenderwa ≥0.2mm hupamhi nekudzika | 7 inotenderwa, ≤1 mm imwe neimwe | |||
(TSD) Threading screw dislocation | ≤500 cm-2 | N/A | |||
(BPD) Base plane dislocation | ≤1000 cm-2 | N/A | |||
Silicon Surface Kusvibiswa NeKunyanya Kusimba Chiedza | Hapana | ||||
Packaging | Multi-wafer Cassette Kana Single Wafer Container | ||||
Notes: | |||||
1 Miganho yekuremara inoshanda kune yese wafer pamusoro kunze kweiyo yekumucheto nzvimbo yekusarudzika. 2Kukwenya kunofanirwa kutariswa paSi face chete. 3 Iyo dislocation data inongobva kuKOH etched wafers. |
Key Features
1.Kukwanisa Kugadzira uye Kukosha Kwemari: Kugadzirwa kwehuwandu hwe12-inch SiC substrate (12-inch silicon carbide substrate) inoratidza nguva itsva mukugadzira semiconductor. Huwandu hwemachipisi anowanikwa kubva kune imwechete wafer inosvika 2.25 nguva iyo ye8-inch substrates, ichityaira zvakanangana nekusvetuka mukugadzira kuita. Mhinduro yemutengi inoratidza kuti kutora 12-inch substrates kwakadzikisa mutengo wekugadzira ma module emagetsi ne28%, zvichigadzira mukana wakajeka wemakwikwi mumusika unokwikwidza zvakanyanya.
2.Outstanding Physical Properties: Iyo 12-inch SiC substrate inogara nhaka zvese zvakanakira silicon carbide zvinhu - yayo yekupisa conductivity ndeye 3 nguva yesilicon, nepo kuparara kwayo kwemunda kunosvika ka10 kune iyo silicon. Aya maitiro anogonesa michina yakavakirwa pa12-inch substrates kuti ishande zvakatsiga munzvimbo dzekupisa kwepamusoro-soro inopfuura 200 ° C, zvichiita kuti dzinyatsokodzera maapplication arikuda akadai semotokari dzemagetsi.
3.Surface Treatment Technology: Takagadzira inoveli yemakemikari mechanical polishing (CMP) maitiro anonyatso 12-inch SiC substrates, kubudirira atomic-level surface flatness (Ra <0.15nm). Kubudirira uku kunogadzirisa dambudziko repasi rose rehombe-diameter silicon carbide wafer pamusoro pekurapa, kubvisa zvipingamupinyi zvemhando yepamusoro epitaxial kukura.
4.Thermal Management Performance: Mumashandisirwo anoshanda, 12-inch SiC substrates inoratidza inoshamisa yekubvisa kupisa kugona. Data yekuyedza inoratidza kuti pasi pesimba rakafanana remagetsi, zvishandiso zvinoshandisa 12-inch substrates zvinoshanda patembiricha 40-50 ° C yakaderera pane silicon-based zvishandiso, zvakanyanya kuwedzera hupenyu hwesevhisi yemidziyo.
Main Applications
1.New Energy Vehicle Ecosystem: Iyo 12-inch SiC substrate (12-inch silicon carbide substrate) iri kushandura magetsi emotokari powertrain architecture. Kubva pane majaja epaboard (OBC) kuenda kuma main drive inverters uye mabhatiri manejimendi masisitimu, kuvandudzwa kwakanaka kunounzwa ne12-inch substrates kunowedzera mota ne5-8%. Mishumo kubva kune anotungamira automaker inoratidza kuti kutora yedu 12-inch substrates kwakaderedza kurasikirwa kwesimba muhurongwa hwavo hwekuchaja nekukurumidza ne62%.
2.Renewable Energy Sector: Mumagetsi emagetsi e photovoltaic, inverters inobva pa 12-inch SiC substrates haingoratidzi maitiro maduku maduku asiwo inobudirira kutendeuka kunopfuura 99%. Kunyanya muzviitiko zvechizvarwa chakagoverwa, uku kushanda kwepamusoro kunodudzira kuchengetwa kwepagore kwemazana ezviuru zveyuan mukurasikirwa kwemagetsi kune vanoshanda.
3.Industrial Automation: Frequency converters inoshandisa 12-inch substrates inoratidza kushanda kwakanakisisa mumarobhoti emaindasitiri, CNC muchina zvishandiso, uye zvimwe midziyo. Yavo yepamusoro-frequency switching maitiro anovandudza mota yekupindura kumhanya ne30% uku ichidzikisa kukanganiswa kwemagetsi kune chimwe muzvitatu chezvigadziriso.
4.Consumer Electronics Innovation: Inotevera-chizvarwa smartphone inokurumidza-charging technologies yakatanga kutora 12-inch SiC substrates. Zvinofungidzirwa kuti zvigadzirwa zvinokurumidza-kuchaja pamusoro pe65W zvichachinja zvizere kune silicon carbide mhinduro, ine 12-inch substrates iri kubuda seyakanyanya kudhura-kuita sarudzo.
XKH Yakagadzirirwa Masevhisi e12-inch SiC Substrate
Kuti isangane nezvinodiwa zve12-inch SiC substrates (12-inch silicon carbide substrates), XKH inopa yakazara sevhisi rutsigiro:
1.Thickness Customization:
Isu tinopa 12-inch substrates mune akasiyana ukobvu maratidziro anosanganisira 725μm kusangana nezvinodiwa zvakasiyana zvekushandisa.
2. Doping concentration:
Yedu yekugadzira inotsigira akawanda conductivity marudzi anosanganisira n-mhando uye p-mhando substrates, ine chaiyo resistivity control muhuwandu hwe0.01-0.02Ω · cm.
3.Testing Services:
Iine yakazara wafer-level yekuyedza michina, isu tinopa yakazara yekuongorora mishumo.
XKH inonzwisisa kuti mutengi wega wega ane zvakasarudzika zvinodiwa zve12-inch SiC substrates. Naizvozvo isu tinopa anochinjika bhizinesi ekudyidzana modhi kuti ipe iyo yakanyanya kukwikwidza mhinduro, ingave ye:
· R&D samples
· Volume kugadzira kutenga
Masevhisi edu akagadziridzwa anovimbisa kuti tinokwanisa kusangana neyako chaiyo yehunyanzvi uye yekugadzira zvinodiwa zve12-inch SiC substrates.


