Mutsetse weSilicon / Silicon Carbide (SiC) Wafer une Matanho mana akabatana nePolishing Automation (Mutsetse weKubata wePost-Polish)

Mutsetse weSilicon / Silicon Carbide (SiC) Wafer Four-Stage Linked Polishing Automation (Mutsetse weKubata wePost-Polish) Mufananidzo Unoratidzwa

Tsananguro pfupi:

Iyi Four-Stage Linked Polishing Automation Line igadziriso yakabatana, yakagadzirirwa kushandiswapost-polish / post-CMPmashandiro esiliconuyekabhidhi yesilicon (SiC)mawafer. Akavakwa akatenderedzazvinhu zvinotakura zveceramic (maplate eceramic), sisitimu iyi inobatanidza mabasa akawanda anotevera kuita mutsetse mumwe chete wakarongeka—kubatsira michina kuderedza kubata nemaoko, kugadzirisa nguva yekubata, uye kusimbisa kudzora kusvibiswa.

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Mutsetse weSilicon / Silicon Carbide (SiC) Wafer une Matanho mana akabatana nePolishing Automation (Mutsetse weKubata wePost-Polish)4

Pfupiso

Mukugadzira semiconductor,kuchenesa kunobudirira mushure meCMPinozivikanwa zvakanyanya sedanho guru rekuderedza zvikanganiso zvisati zvaitika, uye nzira dzepamusoro (kusanganisirakuchenesa kukuru) dzinowanzo kurukurwa nezvekuvandudza mashandiro ekubvisa tunhu.

Kunyanya kune SiC,kuomarara kwakanyanya uye kusagadzikana kwemakemikarizvinoita kuti kupolisha kuve kwakaoma (kazhinji kunobatanidzwa nekubviswa kwezvinhu zvishoma uye njodzi yakakura yekukuvadzwa pamusoro/pasi pevhu), izvo zvinoita kuti otomatiki yakagadzikana mushure mekupolisha uye kuchenesa/kubata kunodzorwa kuve kwakakosha zvikuru.

Mutsetse weSilicon / Silicon Carbide (SiC) Wafer une Matanho mana wakabatana nePolishing Automation (Mutsetse weKubata wePost-Polish)5

Mutsetse weSilicon / Silicon Carbide (SiC) Wafer une Matanho mana akabatana nePolishing Automation (Mutsetse weKubata wePost-Polish)2

Mabhenefiti Akakosha

Mutsetse mumwe chete wakabatanidzwa unotsigira:

Kupatsanurwa uye kuunganidzwa kwewafer(mushure mekukwesha)
Kuchengetera / kuchengetera zvinhu zvinotakura zveceramic
Kuchenesa zvinhu zvinotakura ceramic
Kuisa wafer (kunama) pamidziyo yeceramic
Kushanda kwemutsara mumwe chete kwakabatanaMawafer ane 6–8 inches

Magadzirirwo Ehunyanzvi (Kubva kuDatasheet Yakapihwa)

Zviyero zveMidziyo (L×W×H):13643 × 5030 × 2300 mm
Magetsi:AC 380 V, 50 Hz
Simba Rese:119 kW
Kugadzira Kuchena:0.5 μm < 50 imwe neimwe; 5 μm < 1 imwe neimwe
Kukwira Kufara:≤ 2 μm

Referensi yeKuburitswa (Kubva kuDatasheet Yakapihwa)

Zviyero zveMidziyo (L×W×H):13643 × 5030 × 2300 mm
Magetsi:AC 380 V, 50 Hz
Simba Rese:119 kW
Kugadzira Kuchena:0.5 μm < 50 imwe neimwe; 5 μm < 1 imwe neimwe
Kukwira Kufara:≤ 2 μm

Kuyerera Kwemutsetse Kwakajairika

Infeed / interface kubva kunzvimbo yekukwesha iri kumusoro
Kupatsanurwa & kuunganidzwa kwewafer
Kuchengetedza/kuchengetera zvinhu zveceramic (kubvisa zvinhu panguva imwe chete)
Kuchenesa zvinhu zvinotakura ceramic
Wafer yakaiswa pamidziyo yekutakura (ine kuchena uye kudzora kusatsetseka)
Kuendeswa kune nzira yekudzika kana logistics

Mibvunzo Inowanzo bvunzwa

Mubvunzo 1: Ndeapi matambudziko anonyanya kugadziriswa nemutsara uyu?
A: Inoita kuti mashandiro epashure pekukwesha ave nyore nekubatanidza kupatsanurwa/kuunganidzwa kwewafer, kuvharwa kweceramic carrier, kuchenesa carrier, uye kuisa wafer mumutsara mumwe chete we automation wakarongeka—kuderedza nzvimbo dzekubata nemaoko uye kudzikamisa rhythm yekugadzira.

Mubvunzo wechipiri: Ndezvipi zvinhu zvewafer uye saizi zvinotsigirwa?
A:Siriki neSiC,6–8 inchesmawafer (zvichienderana nezvinodiwa).

Mubvunzo wechitatu: Sei kucheneswa mushure meCMP kuchisimbiswa muindasitiri?
A: Mabhuku eindasitiri anoratidza kuti kudiwa kwekuchenesa kunobudirira mushure meCMP kwakura kusvika pakuderedza huwandu hwemavanga asati atora danho rinotevera; nzira dzinoshandiswa nemegasonic dzinowanzo dzidzwa dzekuvandudza kubviswa kwezvimedu.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.