Silicon Carbide Ceramic Chuck yeSiC sapphire Si GAAs Wafer

Silicon Carbide Ceramic Chuck yeSiC safiro Si GAAs Wafer Mufananidzo Wakafanotaurwa

Tsananguro pfupi:

Iyo Silicon Carbide Ceramic Chuck ipuratifomu inoshanda zvakanyanya yakagadzirirwa kuongorora semiconductor, kugadzira wafer, uye mashandisirwo ekubatanidza. Yakavakwa nezvinhu zvepamusoro zveceramic - zvinosanganisira sintered SiC (SSiC), reaction-bonded SiC (RSiC), silicon nitride, uye aluminium nitride - inopa kuomarara kwakanyanya, kuwedzera kupisa kwakaderera, kuramba kupfeka kwakanaka, uye hupenyu hwebasa hurefu.

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Pfupiso yeSilicon Carbide (SiC) Ceramic Chuck

IyoSilicon Carbide Ceramic Chuckipuratifomu inoshanda zvakanyanya yakagadzirwa kuti iongorore semiconductor, kugadzira wafer, uye kushandisa bonding. Yakavakwa nezvinhu zvemhando yepamusoro zveceramic—kusanganisiraSiC yakasanganiswa (SSiC), SiC yakasungirirwa nemhinduro (RSiC), silicon nitrideuyearuminiyamu nitride—inopakuomarara kwakanyanya, kuwedzera kupisa kwakaderera, kuramba kupfeka kwakanaka, uye hupenyu hwebasa hurefu.

Nehunyanzvi hwekugadzira nemazvo uye kupenya kwemhando yepamusoro, chuck inopakutsetseka kwe sub-micron, nzvimbo dzemhando yegirazi, uye kugadzikana kwenguva refu, zvichiita kuti ive mhinduro yakanaka kwazvo kune maitiro e semiconductor akakosha.

Zvakanakira Zvikuru

Kunyatsoongorora
Kufara kunodzorwa mukati0.3–0.5 μm, kuve nechokwadi chekuti wafer yakagadzikana uye kuti maitiro acho akarongeka nguva dzose.
Kupukuta Magirazi
AnobudiriraRa 0.02 μmkusarongeka kwenzvimbo, zvichideredza kukwenya kwewafer uye kusvibiswa—zvakanakira nzvimbo dzakachena zvakanyanya.
Huremu hwakanyanya kurema
Yakasimba asi yakareruka kupfuura quartz kana simbi, ichivandudza kudzora mafambiro, kupindura, uye kururama kwenzvimbo.
Kuoma Kwakanyanya
Modulus yeExceptional Young inovimbisa kugadzikana kwehukuru hwemuchina kana uchitakura zvinhu zvinorema uye uchimhanya zvakanyanya.
Kuwedzera Kwekupisa Kwakaderera
CTE inonyatsoenderana nema silicon wafers, zvichideredza kupisa uye zvinowedzera kuvimbika kwemaitiro acho.
Kuramba Kupfeka Kwakanaka
Kuomarara kwakanyanya kunochengetedza kutsetseka uye kururama kunyangwe kana ikashandiswa kwenguva refu, kakawanda.

Maitiro Ekugadzira

Kugadzirira Zvinhu Zvisina Kugadzirwa
Upfu hweSiC hwakachena zvakanyanya hune saizi yezvikamu zvakarongwa uye tsvina yakaderera zvikuru.
Kugadzira & Kubvisa Sintering
Matekiniki akadai sesintering isina kumanikidzwa (SSiC) or kubatana kwekuita (RSiC)kugadzira zvinhu zvakafanana zveceramic zvakakora.
Kugadzira Machining Nemazvo
Kukuya kweCNC, kuchekerera nelaser, uye kugadzira nemazvo zvakanyanya zvinokwanisa kushivirira ±0.01 mm uye ≤3 μm parallelism.
Kurapa Kwepamusoro
Kukuya nekupukuta zvine matanho akawanda kusvika kuRa 0.02 μm; machira ekuwedzera anowanikwa ekudzivirira ngura kana kuti zvinhu zvakagadzirwa zvinoenderana nehukuru hwemuchina.
Kuongorora & Kudzora Hunhu
MaInterferometers nevayedzisi veroughness vanoratidza kutevedzera zvinodiwa ne semiconductor-grade.

Magadzirirwo ehunyanzvi

Paramita	Kukosha	Chikamu
Kufara	≤0.5	μm
Saizi dzewafer	6'', 8'', 12'' (inowanikwa nevatengi)	—
Rudzi rwepamusoro	Rudzi rwepini / Rudzi rwemhete	—
Kureba kwepini	0.05–0.2	mm
Dhayamita yepini diki	ϕ0.2	mm
Nzvimbo diki yepini	3	mm
Upamhi hwemhete yechisimbiso hushoma	0.7	mm
Kuoma kwepamusoro	Ra 0.02	μm
Kushivirira ukobvu	±0.01	mm
Kushivirira kwedhayamita	±0.01	mm
Kushivirirana kwekufananidzira	≤3	μm

Zvikumbiro Zvikuru

Midziyo yekuongorora yeSemiconductor wafer
Kugadzira uye kutamisa mawafer
Zvishandiso zvekubatanidza mawafer & kurongedza
Kugadzira michina ye optoelectronic yepamusoro
Zvishandiso zvakanyatsonaka zvinoda nzvimbo dzakatetepa uye dzakachena zvakanyanya

Mibvunzo Nemhinduro - Silicon Carbide Ceramic Chuck

Mubvunzo 1: Machuck eSiC ceramic anoenzaniswa sei nemachuck equartz kana esimbi?
A1: Machuck eSiC akareruka, akaomarara, uye ane CTE iri pedyo nemawafers esilicon, zvichideredza kushanduka kwekupisa. Anewo simba rekudzivirira kupfeka uye anogara kwenguva refu.

Mubvunzo wechipiri: Ndeipi nzvimbo yakatsetseka inogona kuwanikwa?
A2: Inodzorwa mukati0.3–0.5 μm, zvichizadzisa zvinodiwa zvakasimba zvekugadzirwa kwe semiconductor.

Mubvunzo wechitatu: Ko pamusoro payo pachakwesha mawafer here?
A3: Kwete—yakashongedzwa negirazi kutiRa 0.02 μm, zvichiita kuti pave nekubatwa kusina kukwenywa uye kuderedzwa kwekugadzirwa kwezvikamu.

Mubvunzo wechina: Ndeapi saizi dzewafer dzinotsigirwa?
A4: Saizi dzakajairika dze6'', 8'', uye 12'', ine zvigadziriso zviripo.

Q5: Kudzivirira kupisa kuri sei?
A5: SiC ceramics inopa mashandiro akanaka kwazvo pakupisa kwepamusoro uye ine shanduko shoma pasi pekupisa.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.