SiC Ceramic Tray yeWafer Carrier ine Kuramba Kupisa Kwakanyanya
Silicon Carbide Ceramic Tray (SiC Tray)
Chinhu checeramic chinoshanda zvakanyanya chakavakirwa pazvinhu zvesilicon carbide (SiC), chakagadzirwa kuti chishandiswe mumaindasitiri epamusoro senge kugadzira semiconductor uye kugadzira LED. Mabasa ayo makuru anosanganisira kushanda sewafer carrier, etching process platform, kana kutsigira high-temperature process, kushandisa thermal conductivity yepamusoro, high-temperature resistance, uye chemical stability kuti ive nechokwadi chekuti process inofanana uye goho rezvigadzirwa.
Zvinhu Zvikuru
1. Kushanda kweThermal
- Kupisa kwakanyanya: 140–300 W/m·K, ichipfuura zvakanyanya graphite yechinyakare (85 W/m·K), zvichiita kuti kupisa kuparare nekukurumidza uye kuderedza kushushikana kwekupisa.
- Kuwedzerwa kweThermal Low Coefficient: 4.0×10⁻⁶/℃ (25–1000℃), silicon yakafanana zvakanyanya (2.6×10⁻⁶/℃), zvichideredza njodzi dzekushanduka kwethermal.
2. Zvivakwa zveMichina
- Simba Rakakwirira: Simba rekuchinjika ≥320 MPa (20℃), rinodzivirira kumanikidzwa kana kubatwa nemagetsi.
- Kuomarara Kwakanyanya: Kuomarara kweMohs 9.5, kuri kwechipiri kune dhaimani, kunoita kuti isapfekwe zvakanaka.
3. Kugadzikana kweMakemikari
- Kuramba Kuora: Inodzivirira maasidhi akasimba (semuenzaniso, HF, H₂SO₄), yakakodzera kushandiswa munzvimbo dzinocherwa.
- Asiri Magnetic: Kugona kwesimba remagineti <1×10⁻⁶ emu/g, kudzivirira kukanganiswa kwezvishandiso zvine hungwaru.
4. Kushivirira Kwakanyanya Kwezvakatipoteredza
- Kugara kwenguva refu pakupisa kwakanyanya: Kupisa kwenguva refu kusvika 1600–1900℃; kusimba kwenguva pfupi kusvika 2200℃ (nzvimbo isina oxygen).
- Kuramba Kupisa Nekupisa: Inotsungirira kuchinja kwekushisa kamwe kamwe (ΔT >1000℃) isina kutsemuka.
Mashandisirwo
| Munda weKunyorera | Mamiriro Ezvinhu Akananga | Kukosha Kwehunyanzvi |
| Kugadzira Semiconductors | Kucheka kweWafer (ICP), kuisa thin-film deposition (MOCVD), kupukuta kweCMP | Kupisa kwakanyanya kunoita kuti tembiricha ikwane; kuwedzera kupisa kushoma kunoderedza kupwanyika kwewafer. |
| Kugadzirwa kwe LED | Kukura kweEpitaxial (semuenzaniso, GaN), kupatsanura wafer, kurongedza | Inoderedza zvikanganiso zvemarudzi akawanda, ichivandudza kushanda zvakanaka kwechiedza che LED uye hupenyu hwese. |
| Indasitiri yePhotovoltaic | Zvitofu zvesimbi zvesilicon wafer, zvinotsigira michina yePECVD | Kuramba kupisa kwakanyanya uye kupisa kunoita kuti michina irambe ichirarama kwenguva refu. |
| Laser & Optics | Zvishandiso zvekutonhodza zve laser zvine simba guru, zvinotsigira system ye optical | Kupisa kwakanyanya kunogonesa kupisa nekukurumidza, kudzikamisa zvikamu zve optical. |
| Zvishandiso zvekuongorora | Zvibatiso zveTGA/DSC | Kupisa kushoma uye kukurumidza kupindura kwekupisa kunovandudza kurongeka kwekuyera. |
Zvakanakira Chigadzirwa
- Kushanda Kwakakwana: Kufambiswa kwemhepo nekupisa, simba, uye kuramba ngura zvinodarika zvakanyanya alumina nesilicon nitride ceramics, zvichizadzisa zvinodiwa zvakanyanya pakushanda.
- Dhizaini Yakareruka: Huremu hwe3.1–3.2 g/cm³ (40% yesimbi), kuderedza mutoro weinjini uye kuwedzera kunyatsoita kwekufamba.
- Nguva Yekugara Uye Kuvimbika: Hupenyu hwebasa hunodarika makore mashanu pa1600℃, zvichideredza nguva yekushanda uye kuderedza mari yekushanda ne30%.
- Kugadzirisa: Inotsigira ma geometries akaomarara (semuenzaniso, makapu ekusveta ane maburi, matireyi ane layer yakawanda) ane chikanganiso chekusatsetseka <15 μm pakushandisa nemazvo.
Magadzirirwo ehunyanzvi
| Chikamu cheParamende | Chiratidzo |
| Zvimiro zvemuviri | |
| Kuwanda kwevanhu | ≥3.10 g/cm³ |
| Simba reKuchinjika (20℃) | 320–410 MPa |
| Kufambisa kwekupisa (20℃) | 140–300 W/(m·K) |
| Kuwedzerwa kweThermal Coefficient (25–1000℃) | 4.0×10⁻⁶/℃ |
| Zvimiro zveMakemikari | |
| Kuramba Asidhi (HF/H₂SO₄) | Hapana ngura mushure mekunyudzwa kwemaawa makumi maviri nemana |
| Kunyatsogadzira Machining | |
| Kufara | ≤15 μm (300×300 mm) |
| Kuoma Kwepamusoro (Ra) | ≤0.4 μm |
Mabasa eXKH
XKH inopa mhinduro dzakakwana dzemaindasitiri dzinosanganisa kugadzirwa kwezvigadzirwa, kugadzirwa kwezvigadzirwa nemazvo, uye kudzora mhando kwakasimba. Pakugadzirwa kwezvigadzirwa nemazvo, inopa mhinduro dzezvinhu zvine hutsanana hwakanyanya (>99.999%) uye dzine maburi (30–50%), dzakabatana ne3D modeling uye simulation kuti igadzirise ma geometries akaomarara emashandisirwo akaita se semiconductors ne aerospace. Kugadzirwa nemazvo kunotevera maitiro akareruka: kugadzira hupfu → isostatic/dry pressing → 2200°C sintering → CNC/diamond grinding → inspection, kuve nechokwadi chekupukuta kwemazinga e nanometer uye ±0.01 mm dimensional tolerance. Kudzora mhando kunosanganisira kuyedzwa kwakazara (XRD composition, SEM microstructure, 3-point bending) uye rutsigiro rwehunyanzvi (process optimization, 24/7 consulting, 48-awa sample delivery), zvichipa zvikamu zvakavimbika, zvinoshanda zvakanyanya kune zvinodiwa zvemaindasitiri.
Mibvunzo Inowanzo bvunzwa (Mibvunzo Inowanzo bvunzwa)
1. Mubvunzo: Ndeapi maindasitiri anoshandisa matireyi esimbi esilicon carbide?
A: Inoshandiswa zvakanyanya mukugadzira semiconductors (kubata wafer),simba rezuva(PECVD processes),midziyo yekurapa(MRI components),uyeaerospace(zvikamu zvinopisa zvakanyanya) nekuda kwekudzivirira kupisa kwakanyanya uye kugadzikana kwemakemikari.
2. Mubvunzo: Silicon carbide inobudirira sei kupfuura matireyi equartz/girazi?
A: Kudzivirira kupisa kwakanyanya (kusvika 1800°C zvichienzaniswa ne1100°C yequartz), kusapindira kwemagineti, uye hupenyu hurefu(makore mashanu zvichikwira zvichienzaniswa nemwedzi 6-12 yequartz).
3. Mubvunzo: Ko matireyi esilicon carbide anogona kubata nharaunda dzine acidic here?
A: Ehe. Inodzivirira ngura dzeHF, H2SO4, uye NaOH dzine ngura ye <0.01mm pagore, zvichiita kuti dzive dzakakodzera kuchenesa machira nemakemikari.
4. Mubvunzo: Matireyi esilicon carbide anoenderana here ne automation?
A: Ehe. Yakagadzirirwa kutora vacuum uye kubata marobhoti, ine pamusoro payo pakadzikama <0.01mm kudzivirira kusvibiswa kwezvikamu muzvinhu zvinogadzirwa otomatiki.
5. Mubvunzo: Kuenzanisa kwemutengo wezvinhu zvechinyakare ndekupi?
A: Mutengo wakakwira pakutanga (3-5x quartz) asi 30-50% yakaderera TCO nekuda kwehupenyu hwakareba, nguva shoma yekushanda, uye kuchengetedza simba kubva mukufambiswa kwemhepo kwakanyanya.
