Semi-Insulating Silicon Carbide (SiC) Substrate Yakachena Kwazvo Yemagirazi eAr

Tsananguro pfupi:

Zvishandiso zvesilicon carbide (SiC) zvine hutsanana hwakanyanya kuchena zvinhu zvakagadzirwa nesilicon carbide, zvinoshandiswa zvakanyanya mukugadzira magetsi emagetsi, zvishandiso zveredhiyo (RF), uye zvikamu zve semiconductor zvinopisa zvakanyanya. Silicon carbide, sezvinhu zve semiconductor zvakafara, inopa hunhu hwakanaka hwemagetsi, hwekupisa, uye hwemakanika, zvichiita kuti ive yakakodzera kushandiswa munzvimbo dzine voltage yakawanda, high-frequency, uye high-temperature.

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Pfupiso yeChigadzirwa cheSemi-Insulating SiC Wafers

MaWafer edu eHigh-Purity Semi-Insulating SiC akagadzirirwa zvemagetsi epamusoro-soro, zvikamu zveRF/microwave, uye mashandisirwo e optoelectronic. MaWafer aya anogadzirwa kubva kumakristaro emhando yepamusoro e4H- kana 6H-SiC single, achishandisa nzira yekukura yePhysical Vapor Transport (PVT), ichiteverwa nekudzikisa huwandu hwemafuta. Mugumisiro wacho iwafer ine hunhu hunotevera:

Kuramba Kusimba Kwakanyanya: ≥1×10¹² Ω·cm, zvichideredza zvinobudirira kudonha kwemvura muzvishandiso zvekuchinja zvine simba guru.
Bandgap Yakafara (~3.2 eV): Inovimbisa kushanda zvakanaka munzvimbo dzinopisa zvakanyanya, dzine mhepo yakawanda, uye dzinoshandisa mwaranzi yakawanda.
Kufambisa Kunopisa Kunoshamisa: >4.9 W/cm·K, zvichipa kupisa kwakanaka mukushandiswa kwesimba guru.
Simba Repamusoro reMichina: Nekuomarara kweMohs kwe9.0 (kwechipiri kubva kudhaimani), kuwedzera kwekupisa kwakaderera, uye kugadzikana kwakasimba kwemakemikari.
Nzvimbo Yakatsetseka Yemaatomu: Ra < 0.4 nm uye defect density < 1/cm², yakakodzera MOCVD/HVPE epitaxy uye micro-nano magadzirirwo.

Saizi DziripoSaizi dzakajairika dzinosanganisira 50, 75, 100, 150, uye 200 mm (2"–8"), uye dhayamita dzakagadzirirwa dzinosvika 250 mm.
Ukobvu Range: 200–1,000 μm, ine kutsungirira kwe ±5 μm.

Maitiro Ekugadzira MaWafers Ekudzivirira Kupisa Asiri C

Kugadzirira Upfu hweSiC Hwakachena Zvakanyanya

Zvinhu Zvekutanga: Upfu hweSiC hwegiredhi re6N, hwakacheneswa uchishandisa vacuum sublimation ine matanho akawanda uye kurapwa kwekupisa, zvichiita kuti simbi isasvibiswe zvakanyanya (Fe, Cr, Ni < 10 ppb) uye polycrystalline inclusions shoma.

Kukura kwePVT Imwe Chena Yakagadziridzwa

Zvakatipoteredza: Pedyo ne-vacuum (10⁻³–10⁻² Torr).
Tembiricha: Chinopisirwa cheGraphite chinopiswa kusvika ~2,500 °C nekupisa kwakadzorwa kweΔT ≈ 10–20 °C/cm.
Kuyerera kweGasi & Dhizaini yeChipfukuto: Zvikamu zvinoparadzanisa zvine maburi zvakagadzirwa zvinovimbisa kupararira kweutsi zvakaenzana uye zvinodzivisa nucleation isingadiwe.
Dynamic Feed & Kutenderera: Kuzadzwa kweSiC powder ne crystal-rod nguva nenguva kunoguma nekuwanda kwe dislocation (<3,000 cm⁻²) uye kurongeka kwakafanana kwemaH/6H.

Kuwedzerwa Kwemubhadharo Wakadzika

Hydrogen Anneal: Zvinoitwa mumhepo yeH₂ patembiricha iri pakati pe600–1,400 °C kuti zviite kuti misungo ishande zvakadzika uye kuti zvigadzikane.
N/Al Co-Doping (Sarudzo): Kubatanidzwa kweAl (mugamuchiri) neN (mupi) panguva yekukura kana mushure mekukura kweCVD kuti igadzire mapeya maviri akasimba emupi-mugamuchiri, zvichikonzera kukwirira kwesimba rekudzivirira.

Kucheka Nemazvo & Kurovera Pamatanho Akawanda

Kucheka neWaya yeDaimondi: Mawafer akachekwa kuita ukobvu hwe 200–1,000 μm, asina kukuvara kwakanyanya uye anogona kushivirira ±5 μm.
Maitiro Ekubatanidza Mapaipi: Zvishongo zvedhaimani zvakatevedzana zvinobvisa kukuvara kwesaha, zvichigadzirira wafer kuti iporishwe.

Kupukuta Kwemakemikari (CMP)

Midhiya Yekukwesha: Nano-oxide (SiO₂ kana CeO₂) slurry mumushonga wealkaline wakapfava.
Kudzora Maitiro: Kupukuta kusina kumanikidzwa kunoderedza kuomarara, zvichiita kuti RMS ive yakaoma kusvika 0.2–0.4 nm uye kubvisa kukwenya kudiki.

Kuchenesa Kwekupedzisira & Kurongedza

Kuchenesa kweUltrasonic: Maitiro ekuchenesa ane matanho akawanda (organic solvent, acid/base treatments, uye deionized water washing) munzvimbo yeClass-100 cleanroom.
Kuisa Chisimbiso & Kurongedza: Kuomesa wafer ne nitrogen purge, yakavharwa mumabhegi ekudzivirira azere ne nitrogen uye yakarongedzwa mumabhokisi ekunze anodzivirira kusagadzikana, anodedera.

Magadzirirwo eSemi-Insulating SiC Wafers

Kushanda Kwechigadzirwa	Giredhi P	Giredhi D
I. Magadzirirwo eKristaro	I. Magadzirirwo eKristaro	I. Magadzirirwo eKristaro
Crystal Polytype	4H	4H
Refractive Index a	>2.6 @589nm	>2.6 @589nm
Mwero weKunyudzwa a	≤0.5% @450-650nm	≤1.5% @450-650nm
Kutumirwa kweMP (Isina kuvharwa)	≥66.5%	≥66.2%
Haze a	≤0.3%	≤1.5%
Kubatanidzwa kwePolytype a	Hazvibvumidzwe	Nzvimbo yakaunganidzwa ≤20%
Kuwanda kwepombi dze micropombi a	≤0.5 /cm²	≤2 /cm²
Hexagonal Isina chinhu	Hazvibvumidzwe	Hazvina kukwana
Kubatanidzwa Kwakabatana a	Hazvibvumidzwe	Hazvina kukwana
Kubatanidzwa kweMP	Hazvibvumidzwe	Hazvina kukwana
II. Magadzirirwo eMichina	II. Magadzirirwo eMichina	II. Magadzirirwo eMichina
Dhayamita	150.0 mm +0.0 mm / -0.2 mm	150.0 mm +0.0 mm / -0.2 mm
Kutarisa Pamusoro	{0001} ±0.3°	{0001} ±0.3°
Hurefu Hwepamusoro-soro	Notch	Notch
Kureba Kwechipiri Kwakatsetseka	Hapana furati rechipiri	Hapana furati rechipiri
Kurongeka kweNotch	<1-100> ±2°	<1-100> ±2°
Angle yeNotch	90° +5° / -1°	90° +5° / -1°
Kudzika kweNotch	1 mm kubva kumucheto +0.25 mm / -0.0 mm	1 mm kubva kumucheto +0.25 mm / -0.0 mm
Kurapa Kwepamusoro	Chiso cheC, Si-face: Chemo-Mechanical Polishing (CMP)	Chiso cheC, Si-face: Chemo-Mechanical Polishing (CMP)
Mupendero weWafer	Yakakombama (Yakatenderera)	Yakakombama (Yakatenderera)
Kuomarara Kwepamusoro (AFM) (5μm x 5μm)	Si-chiso, C-chiso: Ra ≤ 0.2 nm	Si-chiso, C-chiso: Ra ≤ 0.2 nm
Ukobvu a (Tropel)	500.0 μm ± 25.0 μm	500.0 μm ± 25.0 μm
LTV (Tropel) (40mm x 40mm) a	≤ 2 μm	≤ 4 μm
Kusiyana Kwehukobvu Hwese (TTV) a (Tropel)	≤ 3 μm	≤ 5 μm
Bow (Absolute Value) a (Tropel)	≤ 5 μm	≤ 15 μm
Warp a (Tropel)	≤ 15 μm	≤ 30 μm
III. Maparamita Epamusoro	III. Maparamita Epamusoro	III. Maparamita Epamusoro
Chip/Notch	Hazvibvumidzwe	≤ 2 pcs, imwe neimwe kureba nehupamhi ≤ 1.0 mm
Kukwenya a (Si-face, CS8520)	Hurefu hwese ≤ 1 x Dhayamita	Hurefu hwese ≤ 3 x Dhayamita
Chikamu a (Si-face, CS8520)	≤ 500 zvidimbu	Hazvina kukwana
Mutswe	Hazvibvumidzwe	Hazvibvumidzwe
Kusvibiswa	Hazvibvumidzwe	Hazvibvumidzwe

Mashandisirwo Akakosha eSemi-Insulating SiC Wafers

Zvigadzirwa zvemagetsi zvine simba guru: MaMOSFET akavakirwa paSiC, maSchottky diodes, uye mamodule emagetsi emotokari dzemagetsi (EVs) anobatsirwa nekugona kweSiC kusadzivirira zvakanyanya uye simba remagetsi rakawanda.
RF & Microwave: Kushanda kweSiC kwemafrequency akakwira uye kuramba mwaranzi kwakanakira maamplifiers e5G base-station, ma radar modules, uye kutaurirana kwesatellite.
Zvemagetsi zveOptoelectronics: MaUV-LED, ma blue-laser diodes, uye ma photodetector anoshandisa maatomu eSiC substrates kuti akure zvakaenzana mu epitaxial.
Kuona Zvakatipoteredza Zvakanyanya: Kugadzikana kweSiC pakupisa kwakanyanya (>600 °C) kunoita kuti ive yakakodzera masensa munzvimbo dzakaoma, kusanganisira maturbine egasi uye manuclear detectors.
Ndege neDziviriro: SiC inopa kugara kwenguva refu kwemagetsi emagetsi mumasetiraiti, masisitimu ezvombo, uye magetsi emundege.
Tsvagiridzo Yepamusoro: Mhinduro dzakagadzirirwa quantum computing, micro-optics, uye mamwe maapplication ekutsvaga akasarudzika.

Mibvunzo Inowanzo bvunzwa

Sei SiC inoputira zvishoma pane SiC inofambisa mhepo?
Semi-insulation SiC inopa resistivity yakanyanya, iyo inoderedza kubuda kwemvura mumidziyo ine voltage yepamusoro uye high-frequency. Conductive SiC inonyanya kukodzera kushandiswa uko kunodiwa conductivity yemagetsi.
Mawafer aya anogona kushandiswa here pakukura kwe epitaxial?
Ehe, mawafer aya akagadzirwa zvakanaka uye akagadzirirwa MOCVD, HVPE, kana MBE, nekurapwa kwepamusoro uye kudzora zvikanganiso kuti ive nechokwadi chekuti epitaxial layer yakanaka.
Unoita sei kuti uve nechokwadi chekuti wafer yakachena?
Maitiro eClass-100 cleanroom, kuchenesa kweultrasonic kwakawanda, uye kurongedza kwakavharwa nenitrogen zvinovimbisa kuti mawafer haana tsvina, masara, uye madiki-diki ekukwenya.
Inguva ipi yekutungamira maodha?
Mienzaniso inowanzo tumirwa mukati memazuva manomwe kusvika gumi ebhizinesi, nepo maodha ekugadzira achiwanzo tumirwa mukati memavhiki mana kusvika matanhatu, zvichienderana nehukuru hwewafer chaiyo uye magadzirirwo akagadzirwa.
Unogona kupa maumbirwo akagadzirwa nemaoko ako here?
Ehe, tinogona kugadzira zvinhu zvakasiyana-siyana zvakaita semahwindo akapatsanurwa, maV-grooves, malenzi akatenderera, nezvimwewo.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.