Wafer Yakachekwa yeSapphire Wet & Dry Etching Solutions

Wafer Yakachekwa yeSapphire, Mhinduro dzeWet & Dry Etching Mufananidzo Wakaratidzwa

Tsananguro pfupi:

Mawafer eSapphire etched anogadzirwa achishandisa substrates dzesapphire (Al₂O₃) dzakachena zvakanyanya, dzakagadzirwa kuburikidza ne photolithography yepamusoro pamwe chete ne wet etching uye dry etching technologies. Zvigadzirwa izvi zvine mapatani akafanana, akanyatsojeka, uye kugadzikana kwemuviri nemakemikari, zvichiita kuti zvikwanise kushandiswa mu microelectronics, optoelectronics, semiconductor packaging, uye minda yekutsvagisa yepamusoro.

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Wafer Yakachekwa yeSapphire Wet & Dry Etching Solutions

Nhanganyaya yeChigadzirwa

Mawafer eSapphire etched anogadzirwa achishandisa substrates dzesapphire imwe chete (Al₂O₃) dzakachena zvakanyanya, dzinogadziriswa kuburikidza ne photolithography yepamusoro pamwe chete nematekinoroji ekucheka zvakanyorova uye matekinoroji ekucheka akaomaZvigadzirwa izvi zvine mapatani akafanana, kurongeka kwakanaka kwazvo, uye kugadzikana kwemuviri nemakemikari, zvichiita kuti zvikwanise kushandiswa zvakanyanya mu microelectronics, optoelectronics, semiconductor packaging, uye minda yekutsvagisa yepamusoro.

Safira inozivikanwa nekuoma kwayo kwakanyanya uye kugadzikana kwechimiro, ine kuomarara kweMohs kwe9, iri yechipiri kune dhaimani. Nekudzora maparamita ekutema nemazvo, madiki-diki akanyatsotsanangurwa uye anogona kudzokororwa anogona kugadzirwa pamusoro pesafira, zvichiita kuti mipendero yakapinza, geometry yakagadzikana, uye kugadzikana kwakanaka pakati pemabheti.

Tekinoroji dzeKucheka

Kuchera Kwemvura

Kucheka kwemvura kunoshandisa mishonga yemakemikari yakasarudzika kubvisa zvinhu zvesafire nekusarudza uye kugadzira ma microstructure anodiwa. Maitiro aya anopa simba rakawanda, kufanana kwakanaka, uye mutengo wakaderera wekugadzirisa, zvichiita kuti ive yakakodzera kugadzira mapatani munzvimbo yakakura uye kushandiswa nezvinodiwa zvine mwero padivi pemadziro.

Nekudzora nemazvo kuumbwa kwemushonga, tembiricha, uye nguva yekuchekerera, kudzora kwakasimba kwehudzamu hweetch uye chimiro chepamusoro kunogona kuwanikwa. Mawafer esapphire akachekerera akanyorova anoshandiswa zvakanyanya muzvikamu zve LED packaging, structural support layers, uye maapplication akasarudzwa eMEMS.

Kucheka Kwakaoma

Kucheka kwakaoma, kwakadai sekucheka kweplasma kana kukanda ion reactive (RIE), kunoshandisa maion ane simba guru kana kuti marudzi ereactive kuti akwenye sapphire kuburikidza nemaitiro emuviri neemakemikari. Nzira iyi inopa anisotropy yepamusoro, kunyatsojeka, uye kugona kutamisa mapatani kwakanaka, zvichigonesa kugadzirwa kwezvinhu zvakanaka uye ma microstructures ane chiyero chepamusoro.

Kucheka kwakaoma kwakakodzera zvakanyanya kune zvishandiso zvinoda madziro akamira, tsananguro yakajeka yechinhu, uye kutonga kwakasimba, senge zvishandiso zveMicro-LED, kurongedza kwe semiconductor yepamusoro, uye maumbirwo eMEMS anoshanda zvakanyanya.

Zvinhu Zvikuru uye Zvakanakira

Substrate yesafire yakagadzirwa nekristaro imwe chete yakachena uye ine simba rakanaka kwazvo remakanika
Sarudzo dzemaitiro anochinjika: kuchekerera kwakanyorova kana kuchekerera kwakaoma zvichienderana nezvinodiwa pakushandisa
Kuomarara kwakanyanya uye kuramba kupfeka kuti ivimbike kwenguva refu
Kugadzikana kwakanyanya kwekupisa uye makemikari, kwakakodzera nharaunda dzakaoma
Kujeka kwakanyanya kwemaziso uye zvivakwa zvakagadzikana zve dielectric
Kufanana kwepamusoro uye kuenderana kwemhando dzakasiyana

Mashandisirwo

Kurongedza nekuyedza ma LED ne Micro-LED substrates
Semiconductor chip carriers uye advanced packaging
Masensa eMEMS uye masisitimu emagetsi madiki
Zvikamu zvemaziso uye maumbirwo ekugadzirisa akarurama
Masangano ekutsvagisa nekuvandudza magadzirirwo ezvidiki zvakagadzirwa

Kugadzirisa uye Masevhisi

Tinopa mabasa akazara ekugadzirisa zvinhu, anosanganisira kugadzira mapatani, kusarudza nzira dzekutema (dzakanyorova kana dzakaoma), kudzora kudzika kwemashizha, sarudzo dzekukora kwepasi uye saizi, kutema kwemativi maviri kana maviri, uye mamakisi ekupukuta pamusoro. Maitiro ekudzora mhando nekutarisa anonyatsoita kuti wafer yega yega yakatemwa nesafire isvike pakuvimbika kwakanyanya uye pakushanda isati yatumirwa.

Mibvunzo Inowanzo bvunzwa - Mibvunzo Inowanzo bvunzwa

Mubvunzo 1: Ndeupi musiyano uripo pakati pekucheka kwakanyorova nekucheka kwakaoma kwesafire?

A:Kucheka kwemvura kunobva pakuita kwemakemikari uye kwakakodzera kugadziriswa munzvimbo yakakura uye kusingadhuri, nepo kuomarara kuchishandisa matekiniki akavakirwa paplasma kana ion kuti uwane kunyatsojeka, anisotropy iri nani, uye kutonga kwakanaka kwechimiro. Sarudzo yacho inoenderana nekuoma kwechimiro, zvinodiwa pakunyatsojeka, uye kufunga nezvemutengo.

Mubvunzo wechipiri: Ndeipi nzira yekucheka yandinofanira kusarudza pakushandisa kwangu?

A:Kucheka kwemvura kunokurudzirwa kune zvishandiso zvinoda mapatani akafanana uye akanyatsorongeka, senge ma LED substrates akajairwa. Kucheka kwakaoma kwakakodzera zvakanyanya kune ma high-resolution, high-aspect-ratio, kana ma Micro-LED neMEMS applications uko geometry chaiyo yakakosha.

Q3: Unogona kutsigira mapatani akagadzirwa uye magadzirirwo akagadzirwa here?

A:Ehe. Tinotsigira magadzirirwo akagadzirwa zvizere, kusanganisira marongerwo epatani, saizi yezvimiro, kudzika kwe etch, ukobvu hwe wafer, uye saizi ye substrate.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.