Zviri Mukati
1. Ongororo uye Akakosha Mabasa eFOUP
2. Mamiriro uye Dhizaini Zvimiro zveFOUP
3.Kuronga uye Mashandisirwo Mazano eFOUP
4.Kushanda uye Kukosha kweFOUP muSemiconductor Manufacturing
5. Matambudziko eTechnical uye Mafambiro Ekuvandudza Kweramangwana
6.XKH's Customized Solutions uye Service Tsigiro
Mukuita semiconductor yekugadzira maitiro, iyo Front Opening Unified Pod (FOUP) mudziyo wakakosha unoshandiswa kuchengetedza, kutakura, uye kuchengetedza wafers. Iyo yemukati memukati inogona kugarisa zvidimbu makumi maviri neshanu zve300mm zvimedu, uye zvikamu zvaro zvikuru zvinosanganisira chigadziko chekuvhura-mberi uye furemu yakatsaurirwa yegonhi rekuvhura nekuvhara. Iyo FOUP ndeye musimboti inotakura mune otomatiki yekufambisa sisitimu mukati me12inch wafer machira. Iyo inowanzotakurwa yakavharwa uye inovhurika chete kana ichisundirwa kuchiteshi chemidziyo, ichibvumira mawafer kuti apinzwe muchiteshi chemidziyo yekurodha / yekuburitsa.
Dhizaini yeFOUP inochinjirwa kune micro-environment zvinodiwa. Iyo inoratidzira slots kuseri kwekuisirwa wafer, uye chivharo chakanyatsogadzirirwa kuenderana ne clamp yekuvhura. Marobhoti anobata-wafer anoshanda munzvimbo yeKirasi 1 yakachena mhepo, kuve nechokwadi kuti mawafer haana kusvibiswa panguva yekutapurirana. Uyezve, iyo FOUP inofambiswa pakati pematurusi ekugadzirisa kuburikidza neatomatiki ekubata zvinhu system (AMHS). Mazuva ano mawafer machira anonyanya kushandisa masisitimu enjanji ekufambisa, nepo machira mashoma ekare anogona kushandisa pasi-based automated guided vehicles (AGVs).
Iyo FOUP haingogonese otomatiki wafer kutamiswa asiwo inoshanda basa rekuchengetedza. Nekuda kwematanho akawanda ekugadzira, wafers anogona kutora mwedzi kuti apedze kuyerera kwese kuyerera. Yakasanganiswa neakakwira epamwedzi ekugadzira mavhoriyamu, izvi zvinoreva kuti makumi ezviuru zvewaferi mukati memucheka anogara ari munzira kana kuchengetwa kwenguva pfupi chero nguva. Panguva yekuchengetera, maFOUP anocheneswa nguva nenguva nenitrogen kudzivirira zvinosvibisa kuti zvisabate mawafer, kuve nechokwadi chekugadzirwa kwakachena uye kwakavimbika.
1. Mabasa uye Kukosha kweFOUP
Basa guru reFOUP ndere kuchengetedza mawafer kubva pakuvhundutswa kwekunze uye kusvibiswa, kunyanya kudzivirira kukanganisa goho panguva yekufambisa. Inodzivirira hunyoro nenzira dzakaita senge gasi kuchenesa uye Local Atmosphere Control (LAC), kuve nechokwadi chekuti wafers anoramba ari munzvimbo yakachengeteka achimirira danho rinotevera rekugadzira. Yayo yakavharwa uye inodzorwa sisitimu inobvumira chete anodiwa makomisheni uye zvinhu kupinda, zvakanyanya kuderedza yakashata mhedzisiro yeVOCs, okisijeni, uye hunyoro pamawaferi.
Sezvo FOUP yakazara yakazara ne25 wafers inogona kurema kusvika 9 kilogiramu, yekufambisa kwayo inofanirwa kuvimba neAutomated Material Handling System (AMHS). Kufambisa izvi, iyo FOUP yakagadzirwa neyakasiyana masanganiswa ekubatanidza mahwendefa, mapini, uye maburi, uye yakashongedzerwa neRFID ma tag emagetsi kuti zvizivikanwe uye kupatsanurwa. Uku otomatiki kubata kunoda kunenge kusingaite basa remanyorero, kudzikisa zvakanyanya mazinga ekukanganisa uye kuwedzera kuchengetedzeka uye kurongeka kwemaitiro ekugadzira.
2. Chimiro uye Kurongeka kweFOUP
Izvo zviyero zveFOUP zvingangoita 420 mm muhupamhi, 335 mm kudzika, uye 335 mm kureba. Zvikamu zvaro zvikuru zvekugadzirisa zvinosanganisira: yepamusoro OHT (mushroom musoro) yekutakura kwepamusoro hoist; Mukova wepamberi wekushandisa wafer kuwana; padivi Mabatiro, anowanzo kuvezwa mavara kuti asiyanise nzvimbo dzemaitiro dzine mazinga akasiyana ekusvibiswa; nzvimbo yeKadhi yekuisa meseji makadhi; uye yepasi RFID tag inoshanda seyakasarudzika identifier yeFOUP, ichibvumira maturusi uye pamusoro pepamusoro mahoists kuti azvizive. Iyo base yakashongedzerwa zvakare ina yekuzivikanwa uye yekumisikidza maburi ekufananidza nematurusi uye kusiyanisa maitiro enzvimbo.
Zvichienderana nekushandiswa, maFOUP akaiswa mumhando nhatu: PRD (yekugadzira), ENG (yeinjiniya wafers), uye MON (yekutarisa wafers). PRD FOUPs inogona kushandiswa kugadzira zvigadzirwa, ENG mhando dzakakodzera R&D kana kuyedza, uye MON mhando dzakatsaurirwa kugadzirisa kutarisa kwematanho seCMP neDIFF. Izvo zvakakosha kuti uzive kuti PRD FOUPs inogona kushandiswa kune ese ENG uye MON zvinangwa, uye ENG mhando dzinogona kushandiswa kuMON, asi reverse oparesheni inoisa njodzi yemhando.
Yakakamurwa nedanho rekusvibiswa, maFOUP anogona kukamurwa kuita FE FOUP (yekumberi-yekupedzisira maitiro, simbi-isina), BE FOUP (kumashure-kumagumo maitiro, ane simbi), uye ayo akasanangurwa kune chaiwo masimbi maitiro seNI FOUP, CU FOUP, uye CO FOUP. FOUPs emaitiro akasiyana anowanzosiyaniswa neruvara rwemabato epadivi kana mapaneru emasuo. FOUPs kubva kumberi-yekupedzisira maitiro anogona kushandiswa kumashure-yekupedzisira maitiro, asi kumashure-yekupedzisira FOUPs haifanirwe kushandiswa pamberi-yekupedzisira maitiro, sezvo izvi zvichikonzera njodzi yekusvibiswa.
Semutakuri akakosha mukugadzira semiconductor, iyo FOUP, kuburikidza neakanyanya otomatiki uye yakasimba kudzora kusvibiswa, inovimbisa kuchengetedzeka uye kuchena kwemawaferi panguva yekugadzira, zvichiita kuti ive chinhu chakakosha muzvigadzirwa zvemazuva ano zvewafer.
Mhedziso
XKH yakazvipira kupa vatengi vane yakasarudzika Front-Opening Unified Pod (FOUP) mhinduro, ichinyatso kuomerera kune yako chaiyo maitirwo ezvinodiwa uye michina interface. Kushandisa tekinoroji yemhando yepamusoro uye maitiro ekugadzira chaiwo, isu tinoona kuti chigadzirwa chega chega cheFOUP chinoburitsa kusadzikama kwemhepo, kuchena, uye kugadzikana kwemichina. Chikwata chedu chehunyanzvi chine hunyanzvi hweindasitiri, chinopa rutsigiro rwakakwana rwehupenyu - kubva pakusarudza kubvunza uye kugadzirisa zvimiro kusvika pakuchenesa nekugadzirisa - kuve nechokwadi chekubatanidza pasina musono uye kubatana kwakanaka pakati peFOUP uye yako Automated Material Handling System (AMHS) pamwe nekugadzirisa michina. Isu tinogara tichikoshesa kuchengetedzwa kwewafers uye kukwidziridzwa kwegoho rekugadzira sezvinangwa zvedu zvakakosha. Kuburikidza nezvigadzirwa zvehunyanzvi uye zvese-zvinobatanidza tekinoroji masevhisi, isu tinopa vimbiso yakasimba kune yako semiconductor yekugadzira maitiro, pakupedzisira inosimudzira kugadzirwa kwakanaka uye goho rechigadzirwa.
Nguva yekutumira: Sep-08-2025