Tingaita sei kuti wafer iite "yakatetepa zvakanyanya"?

Tingaita sei kuti wafer iite "yakatetepa zvakanyanya"?
Chii chaizvo chinonzi wafer yakatetepa zvakanyanya?

Mhando dzehukobvu hwakajairika (8″/12″ mawafer semuenzaniso)

• Wafer yakajairika:600–775 μm

• Chingwa chakatetepa:150–200 μm

• Wafer yakatetepa zvikuru:pasi pe100 μm

• Wafer yakatetepa zvikuru:50 μm, 30 μm, kana kunyange 10–20 μm

Sei mawafer ari kuonda?

• Deredza ukobvu hwepakeji yese, pfupisa urefu hweTSV, uye deredza kunonoka kweRC

• Deredza kusadzivirira kupisa uye kuvandudza kupisa

• Sangana nezvinodiwa zvekupedzisira zvechigadzirwa kana zvinhu zvakatetepa zvakanyanya

Njodzi huru dzemawafers matete zvakanyanya

1. Simba remuchina rinoderera zvakanyanya

2. Kurwa kwakasimba

3. Kubata kwakaoma uye kutakurwa

4. Zvivako zvepamberi hazvina kusimba; mawafer anowanzo pwanyika/kutsemuka

Tingaita sei kuti wafer iite diki zvakanyanya?

1. DBG (Kucheka Usati Wakuya)
   Cheka wafer zvishoma (usingacheke kusvika yapera) kuitira kuti dhayi yega yega ive yakatsanangurwa kare uku wafer ikaramba yakabatana nemaoko kubva kumashure. Wobva wakuya wafer kubva kumashure kuti uderedze ukobvu, uchibvisa zvishoma nezvishoma silicon isina kuchekwa. Pakupedzisira, silicon layer yekupedzisira yakatetepa inogayiwa, ichipedzisa kupenya.

2. Maitiro eTaiko
   Chenesa nzvimbo iri pakati pewafer chete uku uchichengetedza nzvimbo iri pamucheto yakakora. Rim yakakora inopa rutsigiro rwemuchina, zvichibatsira kuderedza njodzi yekudonha kwewafer uye kubata kwayo.

3. Chisungo chenguva pfupi chewafer
   Kubatanidza kwechinguvana kunobatanidza wafer pamutakuri wenguva pfupi, ichishandura wafer isina kusimba, yakaita sefirimu kuita unit yakasimba, inogona kugadziriswa. Chinotakura chinotsigira wafer, chinodzivirira zvivakwa zvepamberi, uye chinoderedza kushushikana kwekupisa—zvichibvumira kudzikira kusvikamakumi ema micronsukuwo zvichiri kubvumira maitiro ane simba akadai sekuumbwa kweTSV, electroplating, uye bonding. Ndiyo imwe yetekinoroji dzakakosha kwazvo dzekugadzirisa mapurasitiki e3D emazuva ano.