MaWafers eQuartz Akasanganiswa Akachena Kwazvo eSemiconductor, Photonics Optical Applications 2″4″6″8″12″
Dhayagiramu Yakadzama
Pfupiso yeGirazi reQuartz
Mawafer eQuartz ndiwo musimboti wezvishandiso zvemazuva ano zvakawanda zvinotungamira nyika yedhijitari yanhasi. Kubva pakufamba mufoni yako kusvika pamusimboti wezviteshi zve5G, quartz inopa chinyararire kugadzikana, kuchena, uye kunyatsojeka kunodiwa mumagetsi epamusoro-soro uye mafotoniki. Ingave inotsigira flexible circuitry, ichigonesa MEMS sensors, kana kugadzira hwaro hwequantum computing, hunhu hwakasiyana hwequartz hunoita kuti ive yakakosha mumaindasitiri ese.
"Fused Silica" kana kuti "Fused Quartz" inova chikamu chisina chimiro chequartz (SiO2). Kana ichienzaniswa negirazi reborosilicate, silica yakasanganiswa haina zvimwe zvinowedzerwa; saka iripo muchimiro chayo chakachena, SiO2. Silica yakasanganiswa ine simba rakawanda mu infrared ne ultraviolet spectrum kana ichienzaniswa negirazi rakajairika. Silica yakasanganiswa inogadzirwa nekunyungudutsa uye kusimbisazve SiO2 yakachena. Silica yakagadzirwa yakagadzirwa kubva kumakemikari ane silicon yakawanda seSiCl4 ayo anogadzirwa negasi uye obva asanganiswa mumhepo ine H2 + O2. Guruva reSiO2 rinoumbwa munyaya iyi rinosanganiswa ne silica pane substrate. Mabhuroko e silica akasanganiswa anochekwa kuita ma wafers mushure mezvo ma wafers anozopedzwa.
Zvinhu Zvikuru uye Mabhenefiti eQuartz Glass Wafer
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Kuchena Kwakanyanya (≥99.99% SiO2)
Yakanakira maitiro e semiconductor ne photonics akachena zvakanyanya uko kusvibiswa kwezvinhu kunofanira kuderedzwa. -
Range yekushanda yekupisa yakakura
Inochengetedza chimiro chayo kubva pakupisa kwe cryogenic kusvika pamusoro pe 1100°C pasina kupoterera kana kuora. -
Kutapurirana kweUV neIR kwakanaka
Inopa kujeka kwakanaka kwemaziso kubva ku deep ultraviolet (DUV) kuburikidza ne near-infrared (NIR), ichitsigira mashandisirwo ekuona akanyatsojeka. -
Kuwedzerwa Kwemafuta Kwakaderera
Inosimudzira kugadzikana kwemativi kana tembiricha ichichinja-chinja, inoderedza kushushikana uye inovandudza kuvimbika kwemaitiro. -
Kuramba Makemikoro Kwakanyanya
Haina simba kune akawanda maasidhi, maalkali, uye zvinonyungudutsa—zvichiita kuti inyatsokodzera nzvimbo dzine makemikari anopisa. -
Kugadzikana Kwepamusoro
Inowanikwa ine mafinishe akapfava, ane divi rimwe chete kana maviri akakwenenzverwa, inoenderana nezvinodiwa ne photonics uye MEMS.
Maitiro Ekugadzira Quartz Glass Wafer
Mawafer e quartz akagadzirwa nenzira dzakasiyana-siyana uye dzakarongeka:
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Kusarudzwa Kwezvinhu Zvisina Kugadzirwa
Kusarudzwa kwe quartz yechisikigo yakachena kwazvo kana manyuko eSiO₂ ekugadzira. -
Kunyunguduka uye Kusanganiswa
Quartz inonyungudutswa pa ~2000°C muzvitofu zvemagetsi pasi pemhepo inodzorwa kuti ibvise zvinhu zvinosanganisirwa uye mabhurumu. -
Kugadzira Mabhuroko
Silica yakanyungudutswa inotonhodzwa kuita mabhuroko kana ma ingot akaomarara. -
Kucheka Wafer
Macheka edhaimani chaiyo kana ewaya anoshandiswa kucheka ma ingot kuita mawafer blanks. -
Kukwesha & Kupukuta
Nzvimbo dzese dziri mbiri dzakati sandara uye dzakakweshwa kuti dzienderane nezvinodiwa chaizvo zvemaziso, ukobvu, uye kuomarara. -
Kuchenesa & Kuongorora
Mawafer anocheneswa mumakamuri ekuchenesa eISO Class 100/1000 uye anoongororwa zvakasimba kuti aone kana paine zvikanganiso uye kuti anotevedzera miganhu yacho.
Zvimiro zveQuartz Glass wafer
| chaiyo | chikwata | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Dhayamita / saizi (kana sikweya) | mm | 100 | 150 | 200 | 250 | 300 |
| Kushivirira (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Ukobvu | mm | 0.10 kana kupfuura | 0.30 kana kupfuura | 0.40 kana kupfuura | 0.50 kana kupfuura | 0.50 kana kupfuura |
| Furati huru yekutarisa | mm | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
| LTV (5mm×5mm) | μm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | μm | < 2 | < 3 | < 3 | < 5 | < 5 |
| uta | μm | ±20 | ±30 | ±40 | ±40 | ±40 |
| Kukombama | μm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm×5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Kutenderedza Mupendero | mm | Zvinoenderana neSEMI M1.2 Standard / tarisa IEC62276 | ||||
| Rudzi rwepamusoro | Rutivi Rumwe Rwakaposhwa / Rutivi Ruviri Rwakaposhwa | |||||
| Rutivi rwakakweshwa Ra | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Zvinodiwa zveKumashure | μm | general 0.2-0.7 kana yakagadziriswa | ||||
Quartz vs. Zvimwe Zvinhu Zvisina Kujeka
| Pfuma | Girazi reQuartz | Girazi reBorosilicate | Safaya | Girazi Rakajairika |
|---|---|---|---|---|
| Tembiricha Yekushanda Yakanyanya | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Kutapurirana kweUV | Yakanaka Kwazvo (JGS1) | Murombo | Kugona | Zvishoma kwazvo |
| Kuramba Kemikari | Zvakanakisa | Zviri pakati nepakati | Zvakanakisa | Murombo |
| Kuchena | Yakakwira zvakanyanya | Yakaderera kusvika pakati nepakati | Yakakwirira | Zvakaderera |
| Kuwedzera kwekupisa | Zvakaderera zvikuru | Zviri pakati nepakati | Zvakaderera | Yakakwirira |
| Mutengo | Pakati nepakati kusvika pakakwirira | Zvakaderera | Yakakwirira | Zvakaderera zvikuru |
Mibvunzo Inowanzo bvunzwa nezve Quartz Glass Wafer
Mubvunzo 1: Ndeupi musiyano uripo pakati pe fused quartz ne fused silica?
Kunyange zvazvo ese ari maviri asina chimiro cheSiO₂, fused quartz inowanzobva kuzvinhu zvakasikwa zve quartz, nepo fused silica inogadzirwa nekugadzira. Pakushanda kwayo, inopa mashandiro akafanana, asi fused silica inogona kunge iine kuchena kwakanyanya uye homogeneity.
Mubvunzo wechipiri: Mawafer e quartz akasanganiswa anogona kushandiswa munzvimbo dzine vacuum yakawanda here?
Ehe. Nekuda kwesimba rawo rekupisa zvishoma uye kusapisa zvakanyanya, mawafer equartz akagadzirwa zvakanaka kwazvo pakushandisa vacuum systems uye mumhepo.
Mubvunzo wechitatu: Mawafer aya akakodzera kushandiswa neraser yakadzika yeUV here?
Zvechokwadi. Quartz yakasanganiswa ine simba rekutumira zvinhu kusvika ~185 nm, zvichiita kuti ive yakakodzera DUV optics, lithography masks, uye excimer laser systems.
Mubvunzo wechina: Munotsigira kugadzirwa kwewafer yakagadzirwa nemaoko here?
Ehe. Tinopa kugadzirisa kwakazara kunosanganisira dhayamita, ukobvu, mhando yenzvimbo, flats/notches, uye laser patterning, zvichienderana nezvinodiwa zvako zvekushandisa.
Nezvedu
XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.
