6 inch-8 inch LN-on-Si Composite Substrate Ukobvu 0.3-50 μm Si/SiC/Sapphire yezvinhu

Tsananguro pfupi:

Chikamu cheLN-on-Si chine ma inch matanhatu kusvika masere chinhu chinoshanda zvakanaka chinobatanidza ma single-crystal lithium niobate (LN) thin films ane silicon (Si) substrates, ane ukobvu hunotangira pa 0.3 μm kusvika 50 μm. Chakagadzirirwa kugadzirwa kwe semiconductor yepamusoro uye optoelectronic device. Chichishandisa nzira dzekusimudzira bonding yepamusoro kana epitaxial, chikamu ichi chinovimbisa mhando yepamusoro yeLN thin film uku chichishandisa saizi hombe yewafer (6-inch kusvika 8-inch) yesilicon substrate kuti iwedzere kushanda zvakanaka kwekugadzira uye kushanda zvakanaka kwemari.
Zvichienzaniswa nezvinhu zvemazuva ano zveLN, substrate yeLN-on-Si ine mainches matanhatu kusvika masere inopa kuenderana kwakanaka kwekupisa uye kugadzikana kwemuchina, zvichiita kuti ive yakakodzera kugadzirwa kwewafer-level yakakura. Pamusoro pezvo, zvimwe zvinhu zvebase zvakaita seSiC kana sapphire zvinogona kusarudzwa kuti zvisangane nezvinodiwa zvekushandisa, zvinosanganisira zvishandiso zveRF zvine frequency yakakwira, maphotonics akabatanidzwa, uye masensa eMEMS.

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Zvinhu zvirimo

Magadzirirwo ehunyanzvi

0.3-50μm LN/LT paInsulators
Rutivi rwepamusoro
Dhayamita	6-8 inches
Kudzidziswa	X, Z, Y-42 nezvimwewo.
Zvinhu	LT, LN
Ukobvu	0.3-50μm
Substrate (Yakagadziriswa)
Zvinhu	Si, SiC, Safira, Spinel, Quartz

Zvinhu Zvikuru

Iyo substrate yeLN-on-Si composite ine 6-inch kusvika 8-inch inosiyaniswa nehunhu hwayo hwakasiyana hwezvinhu uye ma parameter anogona kugadziriswa, zvichiita kuti ishande zvakanyanya muindasitiri dze semiconductor ne optoelectronic:

1. Kuenderana kweWafer Yakakura: Saizi yewafer ine 6-inch kusvika 8-inch inoita kuti ibatane zvakanaka nemitsetse yekugadzira yesemiconductor iripo (semuenzaniso, maitiro eCMOS), kuderedza mari yekugadzira uye kubvumira kugadzirwa kwakawanda.

2. Hunhu Hwakanaka hweCrystalline: Maitiro e epitaxial kana ekubatanidza akagadziridzwa anoita kuti firimu reLN thin film rive nedenda shoma, zvichiita kuti rive rakakodzera ma optical modulators anoshanda zvakanaka, ma surface acoustic wave (SAW) filters, nezvimwe zvishandiso zvine hungwaru.

3. Ukobvu Hunogadziriswa (0.3–50 μm): Zvikamu zveLN zvakatetepa (<1 μm) zvakakodzera machipisi ephotonic akabatanidzwa, nepo zvikamu zvakakora (10–50 μm) zvichitsigira zvishandiso zveRF zvine simba guru kana masensa epiezoelectric.

4. Sarudzo Dzakawanda dzeSubstrate: Pamusoro peSi, SiC (high thermal conductivity) kana sapphire (high insulation) inogona kusarudzwa sezvinhu zvekutanga kuti ienderane nezvinodiwa zvemashandisirwo emagetsi akawandisa, tembiricha yepamusoro, kana simba rakawanda.

5. Kugadzikana kweThermal uye Mechanical: Silicon substrate inopa rutsigiro rwakasimba rwemechanical, inoderedza kukwenya kana kutsemuka panguva yekugadzirisa uye kuvandudza kugona kwemuchina.

Zvinhu izvi zvinoisa substrate ine LN-on-Si ine ma inch matanhatu kusvika masere sechinhu chinodiwa pakushandisa matekinoroji epamusoro akadai se5G communications, LiDAR, uye quantum optics.

Zvikumbiro Zvikuru

Iyo substrate yeLN-on-Si ine 6-inch kusvika 8-inch composite inoshandiswa zvakanyanya mumaindasitiri epamusoro-soro nekuda kwehunhu hwayo hwepamusoro hwe electro-optic, piezoelectric, uye acoustic:

1. Optical Communications uye Integrated Photonics: Inogonesa ma electro-optic modulators ane kumhanya kukuru, ma waveguides, uye photonic integrated circuits (PICs), zvichigadzirisa zvinodiwa zve bandwidth zve data centers uye fiber-optic networks.

Midziyo yeRF ye2.5G/6G: Iyo piezoelectric coefficient yakakwira yeLN inoita kuti ive yakakodzera kune mafirita esurface acoustic wave (SAW) uye bulk acoustic wave (BAW), zvichiwedzera mashandiro esignal mu5G base stations nemafoni.

3.MEMS neMasensa: Mhedzisiro yeLN-on-Si inobatsira ma accelerometers ane hunhu hwepamusoro, ma biosensors, uye ma ultrasonic transducers ekushandisa mukurapa nemumaindasitiri.

4. Matekinoroji eQuantum: Sezvinhu zvisina kujeka, mafirimu matete eLN anoshandiswa muzvinhu zvechiedza chequantum (semuenzaniso, ma photon pairs akakomberedzwa) uye ma integrated quantum chips.

5.MaLaser neNonlinear Optics: Ultrathin LN layers dzinogonesa michina inoshanda yesecond-harmonic generation (SHG) uye optical parametric oscillation (OPO) yekugadzirisa laser uye kuongorora spectroscopic.

Chigadzirwa chakajairika cheLN-on-Si chine mativi matanhatu kusvika masere chinoita kuti zvishandiso izvi zvigadzirwe mumhando huru dzewafer fabs, zvichideredza mari yekugadzira zvakanyanya.

Kugadzirisa uye Masevhisi

Tinopa rutsigiro rwakakwana rwehunyanzvi uye masevhisi ekugadzirisa e substrate ine 6-inch kusvika 8-inch LN-on-Si composite substrate kuti isangane nezvinodiwa zvakasiyana-siyana zveR&D nekugadzira:

1. Kugadzirwa Kwakajairwa: Ukobvu hwefirimu reLN (0.3–50 μm), kurongeka kwekristaro (X-cut/Y-cut), uye zvinhu zve substrate (Si/SiC/safira) zvinogona kugadziriswa kuti zviite kuti mudziyo ushande zvakanaka.

2. Kugadziriswa Kwemazinga Ewafer: Kuwanikwa kwakawanda kwemawafer ane 6-inch ne8-inch, kusanganisira masevhisi ekumashure akadai sekuchekerera, kupukuta, uye kuputira, zvichiita kuti zvigadziko zvive zvagadzirira kubatanidzwa kwemudziyo.

3. Kubvunzana Nehunyanzvi uye Kuedza: Kutsanangura zvinhu (semuenzaniso, XRD, AFM), kuyedza mashandiro emagetsi, uye rutsigiro rwekutevedzera michina kuti kukurumidze kusimbiswa kwedhizaini.

Chinangwa chedu ndechekugadzira substrate ine LN-on-Si ine 6-inch kusvika 8-inch composite substrate senzira huru yekushandisa optoelectronic uye semiconductor applications, tichipa rutsigiro kubva kuR&D kusvika kukugadzirwa kwakawanda.

Mhedziso

Chigadzirwa ichi chine mativi matanhatu kusvika masere eLN-on-Si, chine saizi yakakura yewafer, mhando yepamusoro yezvinhu, uye hunyanzvi hwayo, chiri kutungamira kufambira mberi mukutaurirana kwemaziso, 5G RF, uye matekinoroji equantum. Ingave iri yekugadzira yakawanda kana mhinduro dzakagadzirwa, tinopa zvinhu zvakavimbika uye masevhisi anoenderana kuti tipe simba mukuvandudza tekinoroji.