3inch High pure Semi-Insulating （HPSI）SiC wafer 350um Dummy grade Prime grade
Kushandiswa
Mawafer eHPSI SiC akakosha mukugonesa michina yemagetsi yechizvarwa chinotevera, iyo inoshandiswa mumhando dzakasiyana dzemashandisirwo epamusoro:
Masisitimu Ekushandura Simba: Mawafer eSiC anoshanda sezvinhu zvakakosha pakushandisa magetsi akadai seMOSFETs, madiode, uye maIGBT, ayo akakosha pakushandura simba zvakanaka mumasekete emagetsi. Izvi zvinowanikwa mumagetsi anoshanda zvakanyanya, madhiraivha emota, uye ma inverters emaindasitiri.
Mota dzemagetsi (mota dzemagetsi):Kuwanda kwekuda kwemotokari dzemagetsi kunoita kuti pave nekushandiswa kwemagetsi emagetsi anoshanda zviri nani, uye mawafer eSiC ndiwo ari pamberi pekuchinja uku. Mumagetsi eEV, mawafer aya anopa kugona kukuru uye kugona kushandura nekukurumidza, izvo zvinobatsira kuti nguva yekuchaja ikurumidze, kureba, uye kushanda zvakanaka kwemotokari.
Simba Rinodzokororwa:Mumasisitimu esimba rinogona kushandiswazve senge simba rezuva nemhepo, mawafer eSiC anoshandiswa muma inverters nema converters anogonesa kubata nekugovera simba zviri nani. Kufambiswa kwesimba kwakanyanya kwekupisa uye voltage yepamusoro yeSiC inoita kuti masisitimu aya ashande zvakavimbika, kunyangwe mumamiriro ezvinhu akaomarara.
Kugadzira otomatiki kwemaindasitiri uye marobhoti:Magetsi emagetsi anoshanda zvakanyanya mumaindasitiri e automation system nemarobhoti anoda michina inokwanisa kuchinja nekukurumidza, kubata magetsi akawanda, uye kushanda pasi pekumanikidzwa kwakanyanya. Ma semiconductors akavakirwa paSiC anosangana nezvinodiwa izvi nekupa kushanda kwepamusoro uye kusimba, kunyangwe munzvimbo dzakaoma dzekushanda.
Masisitimu ekukurukurirana:Muzvivakwa zvekutaurirana, uko kuvimbika kwakanyanya uye kushandurwa kwesimba zvinobudirira zvakakosha, mawafer eSiC anoshandiswa mumagetsi uye muDC-DC converters. Midziyo yeSiC inobatsira kuderedza kushandiswa kwesimba uye kusimudzira mashandiro esystem munzvimbo dzedata uye network dzekutaurirana.
Nekupa hwaro hwakasimba hwekushandisa simba guru, HPSI SiC wafer inogonesa kugadzirwa kwemidziyo inoshandisa simba shoma, zvichibatsira maindasitiri kuchinjira kune mhinduro dzakasvibira uye dzinogara kwenguva refu.
Zvivakwa
| basa | Giredhi reKugadzira | Giredhi reKutsvagisa | Giredhi reDummy |
| Dhayamita | 75.0 mm ± 0.5 mm | 75.0 mm ± 0.5 mm | 75.0 mm ± 0.5 mm |
| Ukobvu | 350 µm ± 25 µm | 350 µm ± 25 µm | 350 µm ± 25 µm |
| Kudzidziswa kweWafer | Padivi: <0001> ± 0.5° | Padivi: <0001> ± 2.0° | Padivi: <0001> ± 2.0° |
| Kuwanda kweMicropipe ye95% yemaWafers (MPD) | ≤ 1 cm⁻² | ≤ 5 cm⁻² | ≤ 15 cm⁻² |
| Kuramba kweMagetsi | ≥ 1E7 Ω·cm | ≥ 1E6 Ω·cm | ≥ 1E5 Ω·cm |
| Dopant | Yakabviswa | Yakabviswa | Yakabviswa |
| Kutungamira Kwakatsetseka Kwepakutanga | {11-20} ± 5.0° | {11-20} ± 5.0° | {11-20} ± 5.0° |
| Hurefu Hwepamusoro-soro | 32.5 mm ± 3.0 mm | 32.5 mm ± 3.0 mm | 32.5 mm ± 3.0 mm |
| Kureba Kwechipiri Kwakatsetseka | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm |
| Kudzidziswa kwechipiri kwakadzikama | Kana yakatarisana mudenga: 90° CW kubva pafurati rekutanga ± 5.0° | Kana yakatarisana mudenga: 90° CW kubva pafurati rekutanga ± 5.0° | Kana yakatarisana mudenga: 90° CW kubva pafurati rekutanga ± 5.0° |
| Kusabatanidzwa kweMupendero | 3 mm | 3 mm | 3 mm |
| LTV/TTV/Uta/Warp | 3 µm / 10 µm / ±30 µm / 40 µm | 3 µm / 10 µm / ±30 µm / 40 µm | 5 µm / 15 µm / ±40 µm / 45 µm |
| Kuoma Kwepamusoro | Chiso cheC: Chakakweshwa, Chiso cheSi: CMP | Chiso cheC: Chakakweshwa, Chiso cheSi: CMP | Chiso cheC: Chakakweshwa, Chiso cheSi: CMP |
| Mitswe (inoongororwa nechiedza chakasimba) | Hapana | Hapana | Hapana |
| Maplate eHex (anoongororwa nechiedza chakasimba) | Hapana | Hapana | Nzvimbo yakaunganidzwa 10% |
| Nzvimbo dzePolytype (dzinoongororwa nechiedza chakasimba) | Nzvimbo yakaunganidzwa 5% | Nzvimbo yakaunganidzwa 5% | Nzvimbo yakaunganidzwa 10% |
| Kukwenya (kunoongororwa nechiedza chakasimba) | ≤ kukwenya 5, kureba kwakaunganidzwa ≤ 150 mm | ≤ kukwenya gumi, kureba kwakaunganidzwa ≤ 200 mm | ≤ kukwenya gumi, kureba kwakaunganidzwa ≤ 200 mm |
| Kucheka kweEdge | Hapana chinotenderwa ≥ 0.5 mm upamhi uye kudzika | 2 dzakabvumidzwa, ≤ 1 mm upamhi uye kudzika | 5 inobvumirwa, ≤ 5 mm upamhi uye kudzika |
| Kusvibiswa kwepamusoro (kunoongororwa nechiedza chakasimba) | Hapana | Hapana | Hapana |
Zvakanakira Zvikuru
Kushanda Kwepamusoro Kwekupisa: Kufambisa kwakanyanya kwekupisa kweSiC kunoita kuti kupisa kuparare zvakanaka mumidziyo yemagetsi, zvichivabvumira kushanda nesimba rakawanda uye mafrequency asinganyanyi kupisa. Izvi zvinoreva kuti masisitimu madiki, anoshanda zvakanaka uye hupenyu hurefu hwekushanda.
Voltage Yakakura: Nekureba kwebhandi kana tichienzanisa nesilicon, maSiC wafers anotsigira mashandisirwo emagetsi ane simba guru, zvichiita kuti akwanise kushandiswa muzvikamu zvemagetsi zvine simba zvinoda kumira voltage yakakura, senge mumotokari dzemagetsi, masisitimu emagetsi ane grid, uye masisitimu esimba rinodzokororwa.
Kurasikirwa Nesimba Remagetsi: Kusasimba kwakanyanya uye kumhanya kwekuchinja kweSiC zvinoderedza kurasikirwa kwesimba panguva yekushanda. Izvi hazvingobatsiri chete kushanda zvakanaka asiwo zvinowedzera kuchengetedza simba remagetsi mumasisitimu avanoisa.
Kuvimbika Kwakawedzerwa Munzvimbo Dzakaoma: Hunhu hwakasimba hweSiC hunoita kuti ishande mumamiriro ezvinhu akaoma, akadai sekupisa kwakanyanya (kusvika 600°C), mavoltage akakwira, uye mafrequency akakwira. Izvi zvinoita kuti mawafer eSiC akodzere kushandiswa zvakanyanya mumaindasitiri, mumotokari, uye mumagetsi.
Kushanda Nesimba: Midziyo yeSiC ine simba rakawanda kupfuura michina yechinyakare yakagadzirwa nesilicon, zvichideredza saizi nehuremu hwemagetsi emagetsi ukuwo zvichivandudza kushanda kwawo. Izvi zvinotungamira mukuchengetedza mari uye kushomeka kwenzvimbo mukushandiswa kwakadai semagetsi anogona kushandiswazve uye mota dzemagetsi.
Kukwanisa Kukura: Upamhi hwe 3-inch uye kushivirira kwakanyatsogadzirwa kwe HPSI SiC wafer kunoita kuti ikwanise kukwira kugadzirwa kwehuwandu, zvichizadzisa zvinodiwa zvekutsvaga nekugadzira zvemabhizinesi.
Mhedziso
Wafer yeHPSI SiC, ine dhayamita yayo ye 3-inch uye ukobvu hwe 350 µm ± 25 µm, ndiyo chinhu chakanakira chizvarwa chinotevera chemidziyo yemagetsi inoshanda zvakanyanya. Musanganiswa wayo wakasiyana wekupisa, voltage yakanyanya kupwanyika, kurasikirwa nesimba kwakaderera, uye kuvimbika mumamiriro ezvinhu akaomarara zvinoita kuti ive chinhu chakakosha mukushandiswa kwakasiyana-siyana mukushandura simba, simba rinogona kuvandudzwa, mota dzemagetsi, masisitimu emaindasitiri, uye kutaurirana.
Iyi SiC wafer inonyanya kukodzera maindasitiri ari kutsvaga kushanda zvakanaka, kuchengetedza simba zvakanyanya, uye kuvimbika kwemasisitimu. Sezvo tekinoroji yemagetsi emagetsi ichiramba ichichinja, HPSI SiC wafer inopa hwaro hwekuvandudzwa kwemhinduro dzechizvarwa chinotevera, dzinoshandisa simba zvishoma, zvichitungamira kuchinjo kuenda kune ramangwana rakagadzikana uye risina kabhoni yakawanda.
Dhayagiramu Yakadzama
