Wafer yeSapphire yeInch 12 yekugadzira Semiconductor ine Volume Yakawanda

Wafer yeSapphire yeInch 12 yeKugadzira Semiconductor Yakawanda Mufananidzo Wakaratidzwa

Tsananguro pfupi:

Wafer yesafire ine 12 inch yakagadzirwa kuti ikwanise kusangana nekudiwa kuri kukura kwekugadzira semiconductor yakakura munzvimbo yakakura, ine simba repamusoro uye optoelectronic. Sezvo magadzirirwo emidziyo achiramba achikura uye mitsetse yekugadzira ichifambira mberi kune mafomati makuru ewafer, substrates dzesafire dzine dhayamita yakakura kwazvo dzinopa mabhenefiti akajeka mukubudirira, kugadzirisa goho, uye kudzora mutengo.

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Zvinhu zvirimo

Dhayagiramu Yakadzama

Nhanganyaya yewafer yesafire ye 12 inch

Yakagadzirwa kubva kuAl₂O₃, mawafer edu esapphire e12 inch anosanganisira simba rakanaka remuchina, kugadzikana kwekupisa, uye kunaka kwenzvimbo. Kuburikidza nekukura kwekristaro kwakagadziriswa uye kugadziriswa kwewafer nemazvo, ma substrates aya anopa mashandiro akavimbika kune epamusoro ma LED, GaN, uye ma semiconductor applications.

Hunhu hwezvinhu

Sapphire (single-crystal aluminum oxide, Al₂O₃) inozivikanwa zvikuru nehunyanzvi hwayo hwepanyama uye hwemakemikari. Mawafer esapphire ane 12 inch anogara nhaka mabhenefiti ese esapphire asi achipa nzvimbo yakakura kwazvo inoshandiswa.

Hunhu hwakakosha hwezvinhu zvinosanganisira:

Kuoma kwakanyanya uye kuramba kupfeka
Kugadzikana kwakanyanya kwekupisa uye nzvimbo yekunyunguduka kwepamusoro
Kupikisa kwakanyanya kwemakemikari kune acids uye alkalis
Kujeka kwakanyanya kwemaziso kubva kuUV kusvika kuIR wavelengths
Zvimiro zvakanaka zvekudzivirira magetsi

Hunhu uhwu hunoita kuti mawafer esapphire ane 12 inch akwanise kushandiswa munzvimbo dzakaoma dzekugadzirisa uye maitiro ekugadzira ma semiconductor anodziya zvakanyanya.

Maitiro Ekugadzira

Kugadzirwa kwewafer dzesapphire dzine hurefu hwemasendimita gumi nemaviri kunoda kukura kwekristaro uye matekinoroji ekugadzirisa zvinhu nemazvo. Maitiro ekugadzira anowanzo sanganisira:

Kukura Kwekristaro Imwe Chete
Makristaro esapphire akachena kwazvo anorimwa achishandisa nzira dzepamusoro dzakadai seKY kana mamwe matekinoroji ekukura kwekristaro ane dhayamita hombe, zvichiita kuti kristaro ienderane zvakaenzana uye kuti mukati muve nekushushikana kushoma.
Kuumba uye Kucheka Kristaro
Chigadziko chesapphire chakagadzirwa nemazvo uye chakachekwa kuita mawafer ane 12 inch uchishandisa michina yekucheka yakanyatsonaka kuderedza kukuvara kuri pasi pevhu.
Kukwesha uye Kupukuta
Maitiro ekugadzira machira akawanda uye makemikari ekupukuta (CMP) anoshandiswa kuti pave nekukombama kwakanaka, kupfava, uye kukora kwakafanana.
Kuchenesa uye Kuongorora
Wafer imwe neimwe yesafire ye 12 inch inocheneswa zvakakwana uye inoongororwa zvakasimba, kusanganisira kunaka kwechinhu, TTV, bow, warp, uye kuongororwa kwezvikanganiso.

Mashandisirwo

Mawafer esapphire ane 12 inch anoshandiswa zvakanyanya muhunyanzvi hwepamusoro uye hutsva, kusanganisira:

Zvigadziko zve LED zvine simba guru uye zvinopenya zvakanyanya
Midziyo yemagetsi yakavakirwa paGaN uye midziyo yeRF
Zvishandiso zveSemiconductor zvinotakura uye zvinodzivirira kupisa
Mahwindo ekuona uye zvikamu zvemaziso zvenzvimbo hombe
Kurongedza kwe semiconductor yepamusoro uye vatakuri vemaitiro akakosha

Dhayamita hombe inoita kuti pave nekubudirira kwakanyanya uye kuti pave nekubudirira kuri nani pakugadzira zvinhu zvakawanda.

Mabhenefiti e12 Inch Sapphire Wafers

Nzvimbo yakakura inogona kushandiswa kuti mudziyo upihwe simba rakawanda pawafer imwe neimwe
Kuvandudzwa kwemaitiro uye kufanana
Mutengo wakaderedzwa pamudziyo wega wega mukugadzirwa kwehuwandu hwakawanda
Simba rakanaka kwazvo rekushandisa michina pakubata zvinhu zvakakura
Maitiro akajairika ekushandisa akasiyana

Sarudzo dzekugadzirisa

Tinopa magadzirirwo anochinjika e12 inch sapphire wafers, anosanganisira:

Kurongeka kwekristaro (C-plane, A-plane, R-plane, nezvimwewo)
Ukobvu uye dhayamita shiviriro
Kupukuta kwedivi rimwe chete kana maviri
Dhizaini yemupendero wemucheto uye dhizaini yechamfer
Zvinodiwa zvekuomarara pamusoro uye kutsetseka

Paramita	Tsanangudzo	Zvinyorwa
Dhayamita yeWafer	12 inches (300 mm)	Wafer yakajairika ine dhayamita hombe
Zvinhu	Sapphire yekristaro imwe chete (Al₂O₃)	Kuchena kwakanyanya, giredhi remagetsi/remaziso
Kutungamirirwa neKristaro	Ndege yeC (0001), Ndege yeA (11-20), Ndege yeR (1-102)	Maitirwo esarudzo anowanikwa
Ukobvu	430–500 μm	Ukobvu hwemhando yepamusoro hunowanikwa kana wakumbira
Kushivirira kwehukobvu	±10 μm	Kushivirira kwakasimba kwemidziyo yepamusoro
Kusiyana Kwehukobvu Hwese (TTV)	≤10 μm	Inovimbisa kugadziriswa kwakafanana pamusoro pewafer
uta	≤50 μm	Yakayerwa pamusoro pewafer yese
Kukombama	≤50 μm	Yakayerwa pamusoro pewafer yese
Kupedzisa Kwepamusoro	Yakaporishwa nerutivi rumwe chete (SSP) / Yakaporishwa nerutivi rumwe chete (DSP)	Nzvimbo yepamusoro yemaziso
Kuoma Kwepamusoro (Ra)	≤0.5 nm (yakakweshwa)	Kurongeka kwemazinga eatomu kwekukura kwe epitaxial
Profile yeEdge	Mupendero weChamfer / Mupendero wakatenderera	Kudzivirira kutsemuka panguva yekubata
Kururama kweKutungamira	±0.5°	Inoita kuti pave nekukura kwakakodzera kwechikamu che epitaxial
Kuwanda Kwechikanganiso	<10 cm⁻²	Kuyerwa nekutarisa kwemaziso
Kufara	≤2 μm / 100 mm	Inovimbisa kuti madziro emadziro akafanana uye kukura kwe epitaxial
Kuchena	Kirasi 100 - Kirasi 1000	Inoenderana nekamuri rekugezesa
Kutapurirana Kwemaziso	>85% (UV–IR)	Zvinoenderana nehurefu hwewavelength uye ukobvu

Mibvunzo Inowanzo bvunzwa Yekuti Wafer yeSapphire ine Mainches 12

Mubvunzo 1: Kobvu hwewafer yesafire ye 12 inch hwakaita sei?
A: Ukobvu hwakajairika hunobva pa430 μm kusvika 500 μm. Ukobvu hwakagadzirwa hunogonawo kugadzirwa zvichienderana nezvinodiwa nevatengi.

Mubvunzo wechipiri: Ndeapi magadzirirwo ekristaro anowanikwa kumawafers esapphire ane 12 inch?
A: Tinopa nzira dzekutarisa C-plane (0001), A-plane (11-20), uye R-plane (1-102). Dzimwe nzira dzekutarisa dzinogona kugadziriswa zvichienderana nezvinodiwa nemudziyo chaiwo.

Mubvunzo wechitatu: Ndeipi musiyano weukobvu hwese (TTV) hwewafer?
A: Mawafer edu esapphire ane 12 inch anowanzova neTTV ≤10 μm, zvichiita kuti aonekwe akafanana pamusoro pewafer yese kuti agadzire michina yemhando yepamusoro.

Nezvedu

XKH inonyanya kugadzira, kugadzira, uye kutengesa magirazi egirazi egirazi uye zvinhu zvitsva zvekristaro. Zvigadzirwa zvedu zvinopa zvigadzirwa zvemagetsi, zvemagetsi zvevatengi, uye zvemauto. Tinopa zvikamu zveSapphire optical, malenzi efoni, Ceramics, LT, Silicon Carbide SIC, Quartz, uye mawafer egirazi esemiconductor. Tine hunyanzvi uye michina yemazuva ano, tinobudirira mukugadzirisa zvigadzirwa zvisiri zvemazuva ano, tichivavarira kuva bhizinesi rinotungamira rezvigadzirwa zvemagetsi.