Kukura imwe yakawedzera layer yesilicon maatomu pane silicon wafer substrate kune akawanda mabhenefiti:
MuCMOS silicon maitiro, epitaxial kukura (EPI) pane wafer substrate inhanho yakakosha.
1, Kuvandudza mhando yekristaro
Yekutanga substrate kukanganisa uye kusvibiswa: Panguva yekugadzira, iyo wafer substrate inogona kunge iine humwe hurema uye kusvibiswa. Kukura kweiyo epitaxial layer inogona kuburitsa yemhando yepamusoro monocrystalline silicon layer ine yakaderera kudzika kwehurema uye kusvibiswa pane substrate, iyo yakakosha kune inotevera kugadzirwa kwechigadzirwa.
Uniform crystal structure: Epitaxial kukura inovimbisa imwe yunifomu yekristaro chimiro, kuderedza kukanganiswa kwemiganhu yezviyo uye kukanganisa mu substrate material, nekudaro inovandudza huwandu hwekristani hwemhando yewafer.
2, kuvandudza kushanda kwemagetsi.
Kugadzirisa hunhu hwechishandiso: Nekukura epitaxial layer pane substrate, iyo doping yekumisikidza uye mhando yesilicon inogona kunyatsodzorwa, ichigonesa mashandiro emagetsi echishandiso. Semuenzaniso, iyo doping ye epitaxial layer inogona kugadziridzwa zvakanaka kudzora chikumbaridzo voltage yeMOSFETs uye mamwe magetsi paramita.
Kuderedza kuvuza ikozvino: Yepamusoro-mhando epitaxial layer ine yakaderera density, iyo inobatsira kuderedza kuvuza ikozvino mumidziyo, nekudaro inovandudza mashandiro echishandiso uye kuvimbika.
3, kuvandudza kushanda kwemagetsi.
Kuderedza Hukuru hweChimiro: Mune madiki process node (se7nm, 5nm), saizi yemidziyo inoramba ichidzikira, ichida zvimwe zvakanatswa uye zvemhando yepamusoro. Epitaxial kukura tekinoroji inogona kusangana nezvido izvi, ichitsigira kugadzirwa kwepamusoro-kuita uye yakakwirira-density yakabatanidzwa maseketi.
Enhancing Breakdown Voltage: Epitaxial layers inogona kugadzirwa ine yakakwirira breakdown voltages, iyo yakakosha pakugadzira yakakwirira-simba uye yakakwirira-voltage michina. Semuyenzaniso, mumidziyo yemagetsi, epitaxial layers inogona kunatsiridza kuparara kwechishandiso, ichiwedzera yakachengeteka inoshanda renji.
4, Maitiro Kuenderana uye Multilayer Zvimiro
Multilayer Structures: Epitaxial kukura tekinoroji inobvumira kukura kweakawanda zvimiro pane substrates, ine akasiyana akaturikidzana ane akasiyana doping kutarisisa uye marudzi. Izvi zvinobatsira zvakanyanya pakugadzira yakaoma CMOS zvishandiso uye kugonesa matatu-dimensional kubatanidzwa.
Kugarisana: Iyo epitaxial yekukura maitiro inoenderana zvakanyanya neiyo iripo CMOS yekugadzira maitiro, zvichiita kuti zvive nyore kubatanidza mune yazvino yekugadzira workflows pasina kudiwa kwekuchinja kwakakosha kumatanho ekuita.
Pfupiso: Iko kushandiswa kwe epitaxial kukura muCMOS silicon maitiro anonyanya kukoshesa kusimudzira wafer crystal mhando, optimize mudziyo wemagetsi kuita, kutsigira advanced process node, uye kusangana nezvinodiwa zvepamusoro-kuita uye yakakwirira-density yakabatanidzwa yedunhu kugadzira. Epitaxial kukura tekinoroji inobvumira kunyatso kudzora kwezvinhu doping uye chimiro, kuvandudza kuita kwese uye kuvimbika kwemidziyo.
Nguva yekutumira: Oct-16-2024