Zvinorevei TTV, BOW, WARP, uye TIR muWafers?

Pakuongorora ma semiconductor silicon wafers kana substrates dzakagadzirwa nezvimwe zvinhu, tinowanzo sangana nezviratidzo zvehunyanzvi zvakaita se: TTV, BOW, WARP, uye pamwe TIR, STIR, LTV, pakati pezvimwe. Ndezvipi zviratidzo izvi zvinomiririrwa?

TTV — Kusiyana Kwehukobvu Hwese
HUTA — HUTA
WARP — Warp
TIR — Kuverengwa Kwakaratidza Huwandu
STIR — Kuverengwa Kwese Kwakaratidzwa paSaiti
LTV — Kusiyana kweUkobvu hweMunharaunda

1. Kusiyana kweHukobvu Hwese — TTV

Musiyano uripo pakati peukobvu hwepamusoro nehwepasi hwewafer uchienzaniswa nereferensi kana wafer yakasungirirwa uye iri pedyo. Inowanzo ratidzwa muma micrometer (μm), inowanzo miririrwa se: ≤15 μm.

2. Kukotama — Kukotama

Kutsauka pakati pedaro diki nerepamusoro kubva pakati penzvimbo yewafer kuenda kunzvimbo yekureferensi kana wafer iri mumamiriro akasununguka (asina kuvharwa). Izvi zvinosanganisira zvese zviri zviviri concave (negative bow) uye convex (positive bow). Inowanzo ratidzwa muma micrometer (μm), kazhinji inoratidzwa se: ≤40 μm.

3. Warp — Warp

Kutsauka pakati pedaro diki nerepamusoro kubva pamusoro pewafer kuenda kunzvimbo yekureferensi (kazhinji pamusoro pekumashure kwewafer) kana wafer iri mumamiriro akasununguka (asina kuvharwa). Izvi zvinosanganisira zvese zviri zviviri concave (negative warp) uye convex (positive warp). Inowanzo ratidzwa muma micrometer (μm), kazhinji inoratidzwa se: ≤30 μm.

4. Kuverengwa Kwakaratidza Huwandu — TIR

Kana wafer yakasungirirwa uye yakabatana, uchishandisa nzira yekutarisa inoderedza huwandu hwenzvimbo dzese dziri munzvimbo yemhando yepamusoro kana nzvimbo yakatarwa yenzvimbo pamusoro pewafer, TIR ndiyo nzira yekutsauka pakati pedaro guru nediki kubva pamusoro pewafer kuenda kune iyi nzira yekutarisa.

Yakavakirwa pahunyanzvi hwakadzama muzvinhu zve semiconductor zvakaita seTTV, BOW, WARP, uye TIR, XKH inopa masevhisi ekugadzirisa wafer akagadzirwa nenzira chaiyo akagadzirirwa zvinodiwa muindasitiri. Isu tinopa uye tinotsigira zvinhu zvakasiyana-siyana zvinoshanda zvakanaka zvinosanganisira safira, silicon carbide (SiC), silicon wafers, SOI, uye quartz, tichiona kuti kutsetseka kwakanaka, kusimba kwakasimba, uye kunaka kwepamusoro pemashandisirwo epamusoro mu optoelectronics, zvishandiso zvemagetsi, uye MEMS. Tivimbei kuti tipe mhinduro dzakavimbika dzezvinhu uye machining akanyatsonaka anosangana nezvinodiwa zvenyu zvekugadzira zvakanyanya.