Nekuvandudzwa kuri kuramba kuchiitwa tekinoroji yesemiconductor, muindasitiri yesemiconductor uye kunyangwe muindasitiri ye photovoltaic, zvinodiwa zvemhando yepamusoro yewafer substrate kana epitaxial sheet zvakanyanya kuomarara. Saka, ndezvipi zvinodiwa zvemhando yepamusoro yewafers?chimedu chesafiriSemuenzaniso, ndezvipi zviratidzo zvinogona kushandiswa kuongorora mhando yepamusoro yemawafers?
Ndezvipi zviratidzo zvekuongorora mawafers?
Zviratidzo zvitatu
Kune mawafer esapphire, zviratidzo zvawo zvekuongorora zvinosanganisira kutsauka kukuru kwehukobvu (TTV), kukotama (Bow) uye Warp (Warp). Aya ma parameter matatu pamwe chete anoratidza kufanana kwe silicon wafer, uye anogona kuyera mwero we ripple yewafer. Corrugation inogona kusanganiswa ne flatness kuti iongorore mhando ye wafer pamusoro.
Chii chinonzi TTV, BOW, Warp?
TTV (Kusiyana Kwehukobvu Hwese)
TTV ndiyo musiyano uripo pakati peukobvu hwepamusoro nehwepasi hwewafer. Iyi parameter inhamba inokosha inoshandiswa kuyera kufanana kweukobvu hwewafer. Mukuita kwe semiconductor, ukobvu hwewafer hunofanira kunge hwakafanana pamusoro pese. Kuyerwa kunowanzoitwa panzvimbo shanu pawafer uye musiyano unoverengerwa. Pakupedzisira, kukosha uku ndiko kwakakosha pakutonga mhando yewafer.
uta
Mukugadzira semiconductor zvinoreva kukotama kwewafer, zvichisunungura daro riri pakati pepakati pewafer isina kubatwa nereferensi. Izwi iri ringangodaro rinobva pakutsanangura chimiro chechinhu kana chakakombama, sechimiro chakakombama cheuta. Kukosha kweBow kunotsanangurwa nekuyera kutsauka pakati pepakati nepamucheto wewafer yesilicon. Kukosha uku kunowanzo ratidzwa muma micrometer (µm).
Kukombama
Warp imhando yepasi rose yemawafers anoyera musiyano uripo pakati penzvimbo yepamusoro nepadiki pakati pepakati pewafer isina kuvharwa uye nzvimbo yekureferensi. Inomiririra daro kubva pamusoro pewafer yesilicon kusvika kune imwe nzvimbo.
Musiyano uripo pakati peTTV, Bow, Warp ndeupi?
TTV inotarisa pakuchinja kweukobvu uye haina hanya nekukombama kana kukanganiswa kwewafer.
Bow inotarisa pakukombama kwese, kunyanya tichifunga nezvekukombama kwepakati penzvimbo uye mupendero.
Kukombama kwakazara, kusanganisira kukotama nekumonyorora pamusoro pewafer yese.
Kunyangwe ma parameter matatu aya ane chekuita nechimiro uye hunhu hwejometri hwe silicon wafer, anoyerwa uye anotsanangurwa zvakasiyana, uye kukanganisa kwawo pamaitiro e semiconductor uye kugadziriswa kwe wafer kwakasiyanawo.
Kana ma parameter matatu ari madiki, zviri nani, uye kana parameter yacho yakakura, kukanganisa kwakaipa kunowedzera pamaitiro e semiconductor. Saka, semunyanzvi we semiconductor, tinofanira kuziva kukosha kwema wafer profile parameters emaitiro ese, kuita maitiro e semiconductor, uye tinofanira kutarisisa zvakadzama.
(kudzora)
Nguva yekutumira: Chikumi-24-2024