Thin-film lithium tantalate (LTOI) zvinhu zviri kubuda sesimba idzva rakakosha mumunda wakabatanidzwa optics. Gore rino, mabasa akati wandei epamusoro-soro paLTOI modulators akaburitswa, aine emhando yepamusoro LTOI wafers akapihwa naProfessor Xin Ou kubva kuShanghai Institute of Microsystem uye Information Technology, uye emhando yepamusoro waveguide etching maitiro akagadzirwa neboka raProfessor Kippenberg kuEPFL. , Switzerland. Kuedza kwavo kubatana kwakaratidza mhedzisiro inoshamisa. Pamusoro pezvo, zvikwata zvekutsvagisa kubva kuZhejiang University inotungamirwa naProfessor Liu Liu uye Harvard University inotungamirwa naProfessor Loncar yakataurawo nezve high-speed, yakakwirira-kugadzikana LTOI modulators.
Sehama yepedyo yemutete-firimu lithium niobate (LNOI), LTOI inochengetedza yakakwira-kumhanya modulation uye yakaderera-kurasikirwa maitiro elithium niobate ichipawo zvakanakira senge mutengo wakaderera, wakaderera birefringence, uye kuderedzwa kwephotorefractive mhedzisiro. Kuenzanisa kwehukuru hunhu hwezvinhu zviviri izvi zvinoratidzwa pazasi.
◆ Kufanana pakati peLithium Tantalate (LTOI) uye Lithium Niobate (LNOI)
①Refractive Index:2.12 vs 2.21
Izvi zvinoreva kuti iyo single-mode waveguide dimensions, bending radius, uye zvakajairika passive mudziyo saizi yakavakirwa pazvinhu zvese zviri zviviri zvakafanana, uye yavo fiber coupling performance inofananidzwa zvakare. Neyakanaka waveguide etching, zvese zviri zviviri zvinogona kuwana kurasikirwa kwekuiswa kwe<0.1 dB/cm. EPFL inoshuma kurasikirwa kwewaveguide kwe5.6 dB/m.
②Electro-optic Coefficient:30.5 pm/V vs 30.9 pm/V
Iyo modulation inoshanda inofananidzwa kune ese ari maviri emidziyo, ine modulation inoenderana nePockels mhedzisiro, inobvumira yakakwirira bandwidth. Parizvino, LTOI modulators inokwanisa kuwana 400G panzira yega yega kuita, ine bandwidth inodarika 110 GHz.
③Bandgap:3.93 eV vs 3.78 eV
Zvishandiso zvese zviri zviviri zvine hwindo rakajeka rakajeka, rinotsigira maapplication kubva pakuonekwa kusvika kune infrared wavelengths, isina kunyura mumabhendi ekutaurirana.
④Yechipiri-Odha Nonlinear Coefficient (d33):21 pm/V vs 27 pm/V
Kana yakashandiswa kune zvisiri zvemashandisirwo akadai seyechipiri harmonic generation (SHG), musiyano-frequency generation (DFG), kana sum-frequency generation (SFG), mashandiro ekushandura ezvinyorwa zviviri izvi anofanira kunge akafanana.
◆ Mari Inobatsira yeLTOI vs LNOI
①Lower Wafer Kugadzirira Mutengo
LNOI inoda He ion kuisirwa kwekuparadzanisa kupatsanurwa, iyo ine yakaderera ionization kunyatsoita. Kusiyana neizvi, LTOI inoshandisa H ion kuisirwa kupatsanurwa, yakafanana neSOI, ine delamination inoshanda kanopfuura kagumi kupfuura LNOI. Izvi zvinoguma nemusiyano wakakosha wemutengo we6-inch wafers: $300 vs. $2000, kuderedzwa kwe85% mutengo.
②Yakatoshandiswa zvakanyanya mumusika wevatengi zvemagetsi zveacoustic mafirita(750,000 zvikamu pagore, zvinoshandiswa neSamsung, Apple, Sony, nezvimwewo).
◆ Performance Advantages yeLTOI vs LNOI
①Zvishoma Zvikanganiso zveZvinhu, Zvisina Kusimba Photorefractive Effect, More Kugadzikana
Pakutanga, LNOI modulators yaiwanzoratidza bias point drift, zvakanyanya nekuda kwekuunganidza kubhadharisa kunokonzerwa nekukanganisa pane waveguide interface. Kana ikasagadziriswa, michina iyi inogona kutora zuva rimwechete kuti igadzikane. Nekudaro, nzira dzakasiyana dzakagadzirwa kugadzirisa nyaya iyi, sekushandisa simbi oxide cladding, substrate polarization, uye annealing, zvichiita kuti dambudziko iri rigadzirike zvakanyanya iye zvino.
Kusiyana neizvi, LTOI ine kushomeka kwezvinhu, zvinotungamira kukudzikisira zvakanyanya kudonha zviitiko. Kunyangwe pasina kuwedzera kwekugadzirisa, nzvimbo yayo yekushanda inoramba yakagadzikana. Migumisiro yakafanana yakataurwa neEPFL, Harvard, uye Zhejiang University. Zvisinei, kuenzanisa kunowanzoshandisa kusagadziriswa LNOI modulators, iyo inogona kunge isina kunyatsonaka; nekugadzirisa, kushanda kwezvose zviri zviviri zvingangofanana. Musiyano mukuru uri muLTOI inoda mashoma ekuwedzera matanho ekugadzirisa.
②Yepasi Birefringence: 0.004 vs 0.07
Iyo yakakwira birefringence ye lithium niobate (LNOI) inogona kunetsa dzimwe nguva, kunyanya sezvo waveguide bends inogona kukonzera mode coupling uye mode hybridization. Mune LNOI yakaonda, bend mune waveguide inogona kushandura zvishoma TE mwenje kuita TM mwenje, kuomesa kugadzirwa kwemamwe maturusi epasi, senge mafirita.
NeLTOI, iyo yakaderera birefringence inobvisa iyi nyaya, zvichiita kuti zvive nyore kugadzira yakakwira-inoshanda passive zvishandiso. EPFL yakataurawo mhedzisiro inocherechedzwa, kukwidza LTOI yakaderera birefringence uye kusavapo kwemodhi-yekuyambuka kuti iwane Ultra-wide-spectrum electro-optic frequency comb chizvarwa ine flat dispersion control pane yakafara spectral renji. Izvi zvakaita kuti pave ne 450 nm comb bandwidth ine mitsara inopfuura 2000 yecomb, yakakura kakawanda pane inogona kuwanikwa ne lithium niobate. Kuenzaniswa neKerr optical frequency combs, electro-optic mizinga inopa mukana wekuve-isina-chikumbaridzo uye yakagadzikana zvakanyanya, kunyangwe ichida yakakwirira-simba microwave kupinza.
③Yakakwira Optical Kukuvadza Threshold
Iyo yekuona kukuvadzwa kwechikumbaridzo cheLTOI yakapetwa kaviri yeLNOI, ichipa mukana mune zvisiri mutsara zvikumbiro (uye zvingangoita remangwana Coherent Perfect Absorption (CPO) zvikumbiro). Iyezvino optical module masimba masimba haafanire kukuvadza lithium niobate.
④Low Raman Effect
Izvi zvakare zvine chekuita neasina mutsara application. Lithium niobate ine simba reRaman mhedzisiro, iyo muKerr optical frequency comb application inogona kutungamira kune isingadikanwi chizvarwa cheRaman chiedza uye kuwana makwikwi, kudzivirira x-kutema lithium niobate optical frequency mizinga kubva kusvika kune soliton state. NeLTOI, iyo Raman mhedzisiro inogona kudzvanywa kuburikidza nekristaro yekumisikidza dhizaini, ichibvumira x-cheka LTOI kuwana soliton optical frequency comb chizvarwa. Izvi zvinogonesa iyo monolithic yekubatanidza ye soliton optical frequency macombs ane yakakwirira-kumhanya modulators, iyo feat isingagoneke neLNOI.
◆ Neiko Thin-Film Lithium Tantate (LTOI) Isina Kududzwa Kare?
Lithium tantalate ine tembiricha yakaderera yeCurie pane lithium niobate (610°C vs. 1157°C). Pamberi pekugadzirwa kweheterointegration tekinoroji (XOI), lithium niobate modulators akagadzirwa achishandisa titanium diffusion, izvo zvinoda annealing inopfuura 1000 ° C, zvichiita kuti LTOI isakodzere. Nekudaro, nekuchinja kwanhasi pakushandisa insulator substrates uye waveguide etching yekugadzira modulator, tembiricha ye610 ° C Curie inopfuura kukwana.
◆ Ko Thin-Film Lithium Tantalate (LTOI) Inotsiva Thin-Film Lithium Niobate (TFLN)?
Zvichienderana netsvagiridzo yazvino, LTOI inopa zvakanakira mukuita zvishoma, kugadzikana, uye yakakura-yakakura mutengo wekugadzira, pasina zvinooneka zvinokanganisa. Nekudaro, LTOI haipfuure lithium niobate mukuita modulation, uye nyaya dzekugadzikana neLNOI dzave kuziva mhinduro. Zvekutaurirana DR mamodule, pane kushoma kudiwa kwezvinongoita zvinhu (uye silicon nitride inogona kushandiswa kana ichidikanwa). Pamusoro pezvo, mainvestimenti matsva anodiwa kumisikidzazve wafer-level etching process, heterointegration matekiniki, uye kuvimbika kuyedzwa (kuomerwa ne lithium niobate etching kwaisava waveguide asi kuwana yakakwira-goho wafer-level etching). Naizvozvo, kukwikwidza ne lithium niobate yakagadzwa chinzvimbo, LTOI ingangoda kufumura zvimwe zvakanakira. Zvidzidzo, zvisinei, LTOI inopa yakakosha yekutsvagisa inogona kubatanidzwa pa-chip masisitimu, senge octave-inotambanudzira electro-optic mizinga, PPLT, soliton uye AWG wavelength division zvishandiso, uye array modulators.
Nguva yekutumira: Nov-08-2024