Mukukura kuri kuita indasitiri ye semiconductor, kristaro imwe chete yakakwenenzverwazvingwa zvesiliconDzinoita basa guru. Dzinoshanda sezvinhu zvakakosha pakugadzira michina yakasiyana-siyana yemagetsi. Kubva kumasekete akabatanidzwa akaomarara uye akanyatsojeka kusvika kuma microprocessors anomhanya uye masensa anoshanda akawanda, kristaro imwe chete yakaporidzwazvingwa zvesiliconzvakakosha. Kusiyana kwekushanda kwavo uye zvirevo zvinokanganisa zvakananga kunaka uye kushanda kwezvigadzirwa zvekupedzisira. Heano marongero akajairika uye parameters dzema "wafers" e "single crystal silicon" akaporishwa:

Dhayamita: Saizi yemawafer esilicon emhando ye semiconductor single crystal inoyerwa nedhayamita yawo, uye anouya mumhando dzakasiyana-siyana. Dhayamita dzakajairika dzinosanganisira 2 inches (50.8mm), 3 inches (76.2mm), 4 inches (100mm), 5 inches (125mm), 6 inches (150mm), 8 inches (200mm), 12 inches (300mm), uye 18 inches (450mm). Dhayamita dzakasiyana dzakakodzera zvinodiwa zvakasiyana-siyana zvekugadzira uye zvinodiwa pakuita. Semuenzaniso, mawafer madiki edhayamita anowanzo shandiswa pamidziyo midiki, ine hunyanzvi hwe microelectronic, nepo mawafer makuru edhayamita achiratidza kushanda kwepamusoro kwekugadzira uye mabhenefiti emutengo mukugadzira macircuit makuru akabatanidzwa. Zvinodiwa pamusoro penzvimbo zvinoiswa muzvikamu zvakaita se single-side polished (SSP) uye double-side polished (DSP). Mawafers akaposhwa emhando imwe chete anoshandiswa pamidziyo inoda kupfava kwakanyanya kune rumwe rutivi, senge mamwe ma sensor. Mawafers akaposhwa emhando mbiri anowanzo shandiswa kumacircuit akabatanidzwa nezvimwe zvigadzirwa zvinoda kunyatsojeka pamativi ese ari maviri. Zvinodiwa Pamusoro (Kupedzisa): SSP yakaporishwa ine divi rimwe chete / DSP yakaporishwa ine mativi maviri.

Rudzi/Dopant: (1) Semiconductor yerudzi rweN: Kana mamwe maatomu etsvina akapinzwa mu semiconductor yemukati, anochinja conductivity yayo. Semuenzaniso, kana zvinhu zvepentavalent zvakaita senitrogen (N), phosphorus (P), arsenic (As), kana antimony (Sb) zvawedzerwa, maerekitironi avo evalence anoumba covalent bonds nemaerekitironi evalence emaatomu esilicon akakomberedza, zvichisiya erekitironi yekuwedzera isina kusungwa ne covalent bond. Izvi zvinoguma nehuwandu hwemaerekitironi hwakakura kupfuura huwandu hwegomba, zvichigadzira semiconductor yerudzi rweN, inozivikanwawo se semiconductor yerudzi rweelectron. Ma semiconductor erudzi rweN akakosha mukugadzira zvishandiso zvinoda maerekitironi semain charge carriers, senge mamwe mapower devices. (2) P-type Semiconductor: Kana zvinhu zvetsvina zvevalence zvitatu zvakaita seboron (B), gallium (Ga), kana indium (In) zvikapinzwa mu silicon semiconductor, maerekitironi evalence emaatomu etsvina anoumba covalent bonds nemaatomu esilicon akakomberedza, asi haana kana valence electron imwe chete uye haagone kuumba complete covalent bond. Izvi zvinoita kuti pave nekuwanda kwemaburi kupfuura maerekitironi, zvichigadzira semiconductor yemhando yeP, inozivikanwawo semiconductor yemhando yegomba. Semiconductor yemhando yeP inoita basa guru mukugadzira michina uko maburi anoshanda senzira huru dzekutakura machaji, dzakadai semadiode nemamwe matransistors.

Kuramba: Kuramba chinhu chakakosha chinoyera kutenderera kwemagetsi kwemawafer esilicon akaporishwa. Kukosha kwawo kunoratidza mashandiro ekufambisa kwechinhu chacho. Kuramba kwakaderera, kutenderera kwewafer yesilicon kunowedzera; zvakasiyana, kuramba kwakakwira, kutenderera kwakaderera. Kuramba kwewafer yesilicon kunoenderana nehunhu hwayo hwezvinhu, uye tembiricha ine simba guru zvakare. Kazhinji, kuramba kwewafer yesilicon kunowedzera nekupisa. Mukushandiswa kwazvino, michina yakasiyana-siyana ye microelectronic ine zvinodiwa zvakasiyana zvekudzivirira kutenderera kwemawafer esilicon. Semuenzaniso, mawafer anoshandiswa mukugadzira macircuit akabatanidzwa anoda kudzora kwakaringana kwekuramba kuti ave nechokwadi chekuti mudziyo unoshanda zvakanaka uye wakavimbika.

Kutarisa: Kutarisa kwekristaro kwewafer kunomiririra divi rekristaro resilicon lattice, rinowanzo tsanangurwa neMiller indices dzakadai se (100), (110), (111), nezvimwewo. Kutarisa kwekristaro kwakasiyana kune hunhu hwakasiyana hwepanyama, senge huwandu hwemutsara, hunosiyana zvichienderana nekutarisa. Musiyano uyu unogona kukanganisa mashandiro ewafer mumatanho ekugadzirisa anotevera uye mashandiro ekupedzisira emidziyo yemagetsi. Mukugadzira, kusarudza wafer yesilicon ine divi rakakodzera zvinoenderana nezvinodiwa zvemudziyo zvakasiyana kunogona kugadzirisa mashandiro emudziyo, kuvandudza mashandiro ekugadzira, uye kuwedzera mhando yechigadzirwa.

Flat/Notch: Mupendero wakatsetseka (Flat) kana V-notch (Notch) uri padenderedzwa resilicon wafer une basa rakakosha mukuenzanisa kristalo uye chinhu chakakosha mukugadzira nekugadzirisa wafer. Wafers dzedhayamita dzakasiyana dzinoenderana nemiyero yakasiyana yehurefu hweFlat kana Notch. Mipendero yekufananidza yakakamurwa kuita flat yekutanga neyechipiri. Flat yekutanga inonyanya kushandiswa kuona kristalo yekutanga uye referensi yekugadzirisa wafer, nepo flat yechipiri ichibatsirawo mukuenzanisa uye kugadzirisa kwakanyatsojeka, ichiona kushanda kwakarurama uye kuenderana kwewafer mumutsara wese wekugadzira.

Ukobvu: Ukobvu hwewafer hunowanzo tsanangurwa muma micrometer (μm), ukobvu hwakajairika huri pakati pe100μm ne1000μm. Mawafer eukobvu hwakasiyana akakodzera mhando dzakasiyana dzemidziyo yemagetsi. Mawafer akatetepa (semuenzaniso, 100μm - 300μm) anowanzo shandiswa pakugadzira machip anoda kudzorwa kwakasimba kweukobvu, kuderedza saizi nehuremu hwechip uye kuwedzera huwandu hwekubatanidza. Mawafer akatetepa (semuenzaniso, 500μm - 1000μm) anoshandiswa zvakanyanya mumidziyo inoda simba repamusoro remuchina, senge michina yemagetsi, kuti ive nechokwadi chekugadzikana panguva yekushanda.

Kuomarara Kwepamusoro: Kuomarara kwepamusoro ndeimwe yenzira dzakakosha dzekuongorora mhando yewafer, sezvo ichikanganisa zvakananga kubatana pakati pewafer nezvinhu zvinotevera zvakachengetwa mufirimu, pamwe nekushanda kwemagetsi kwechishandiso. Inowanzo tsanangurwa se root mean square (RMS) roughness (in nm). Kuomarara kwepamusoro kwepamusoro kunoreva kuti pamusoro pewafer pari kutsvedzerera, izvo zvinobatsira kuderedza zviitiko zvakaita sekupararira kwemaerekitironi uye kunatsiridza mashandiro echishandiso uye kuvimbika. Mumaitiro ekugadzira ma semiconductor epamusoro, zvinodiwa zvekuomarara kwepamusoro zviri kuramba zvichiwedzera kuoma, kunyanya pakugadzira macircuit akabatanidzwa epamusoro, uko kuomarara kwepamusoro kunofanirwa kudzorwa kusvika kuma nanometer mashoma kana kutodzikira.

Kusiyana Kwehukobvu Hwese (TTV): Kusiyana kwehukobvu hwese kunoreva musiyano uripo pakati pehukobvu hwepamusoro nehwepasi hwakayerwa panzvimbo dzakawanda pamusoro pewafer, hunowanzoonekwa mu μm. TTV yakakwira inogona kutungamira mukusiyana mumaitiro akadai se photolithography uye etching, zvichikanganisa kushanda kwemudziyo uye goho. Naizvozvo, kudzora TTV panguva yekugadzira wafer idanho guru mukuona kuti chigadzirwa chakanaka. Pakugadzira michina ye microelectronic yakanyatsogadzirwa, TTV inowanzo fanirwa kunge iri mukati mema micrometer mashoma.

Uta: Uta hunoreva kutsauka pakati pepamusoro pewafer nenzvimbo yakatsetseka yakakodzera, inowanzo kuyerwa mu μm. Mawafer ane kukotama kwakanyanya anogona kutyoka kana kusangana nekushushikana kusina kuenzana panguva yekugadzirisa kunotevera, zvichikanganisa kushanda zvakanaka kwekugadzira uye kunaka kwechigadzirwa. Kunyanya mumabasa anoda kutatamuka kwakanyanya, senge photolithography, kukotama kunofanirwa kudzorwa mukati mechikamu chakati kuti ive nechokwadi chekuti pateni yephotolithography yakarurama uye yakafanana.

Warp: Warp inoratidza kutsauka pakati pepamusoro pewafer nechimiro chakakodzera chedenderedzwa, chinoyerwawo mu μm. Kufanana nebow, warp chiratidzo chakakosha chekusatsetseka kwewafer. Warp yakawandisa haingokanganisi chete kurongeka kwewafer mumichina yekugadzirisa asi inogonawo kukonzera matambudziko panguva yekurongedza chip, senge kusabatana zvakanaka pakati pechip nezvinhu zvekurongedza, izvo zvinokanganisa kuvimbika kwechishandiso. Mukugadzira semiconductor yepamusoro-soro, zvinodiwa zvewarp zviri kuramba zvichiwedzera kuomesesa kuti zvisangane nezvinodiwa zvekugadzira chips yepamusoro uye maitiro ekurongedza.

Profile yeEdge: Profile yemupendero wewafer inokosha pakugadzirisa nekugadzirisa kwayo. Inowanzo tsanangurwa neEdge Exclusion Zone (EEZ), iyo inotsanangura daro kubva pamupendero wewafer uko kusagadziriswa hakubvumirwi. Profile yemupendero yakagadzirwa zvakanaka uye EEZ control chaiyo inobatsira kudzivirira kukanganisa kwemupendero, kuwanda kwekushushikana, nezvimwe zvinetso panguva yekugadzirisa, zvichivandudza kunaka kwewafer yese uye goho. Mune mamwe maitiro ekugadzira epamberi, kunyatsojeka kweprofile yemupendero kunodiwa kuti ive padanho re sub-micron.

Kuwanda kweZvidimbu: Kupararira kwezvidimbu pamusoro pewafer kunokanganisa zvakanyanya mashandiro emidziyo yemagetsi. Zvidimbu zvakawandisa kana zvakakura zvinogona kukonzera kutadza kushanda kwemidziyo, senge mashort circuits kana kubuda kwemvura, zvichideredza goho rezvigadzirwa. Saka, huwandu hwezvidimbu hunowanzo kuyerwa nekuverenga zvidimbu panzvimbo imwe neimwe, senge huwandu hwezvidimbu zvakakura kupfuura 0.3μm. Kudzora kwakasimba kwehuwandu hwezvidimbu panguva yekugadzira wafer chiyero chakakosha chekuona kuti chigadzirwa chakanaka. Tekinoroji dzekuchenesa dzepamusoro uye nzvimbo yakachena yekugadzira zvinoshandiswa kuderedza kusvibiswa kwezvidimbu pamusoro pewafer.

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