Mawafer eSilicon vs. Mawafer eGirazi: Chii Chatinochenesa Chaizvoizvo? Kubva paMaterial Essence kusvika kuProcess-Based Cleaning Solutions

Kunyangwe zvese silicon negirazi wafers zvakafanana nechinangwa cheku "cheneswa," matambudziko uye nzira dzekukundikana dzavanosangana nadzo panguva yekuchenesa zvakasiyana zvikuru. Kusiyana uku kunobva muhunhu hwezvinhu zviripo uye zvinodiwa zvesilicon negirazi, pamwe ne "pfungwa" dzakasiyana dzekuchenesa dzinobva mukushandiswa kwadzo kwekupedzisira.

Kutanga, ngatitsanangurei: Chii chaizvo chatiri kuchenesa? Ndezvipi zvinhu zvinosvibisa zvirimo?

Zvinosvibisa zvinogona kuiswa muzvikamu zvina:

1. Zvinosvibisa Zvidimbu

   • Guruva, zvidimbu zvesimbi, zvidimbu zveorganic, zvidimbu zvinogumbura (kubva muCMP process), nezvimwewo.

   • Zvinhu izvi zvinogona kukonzera zvikanganiso zvemapatani, zvakaita semashort kana ma open circuits.

2. Zvinosvibisa zveOrganic

   • Zvinosanganisira zvinoramba zviri mu photoresist, zvinowedzerwa mu resin, mafuta eganda revanhu, zvinoramba zviri mu solvent, nezvimwewo.

   • Zvinhu zvinosvibisa zvechisikigo zvinogona kugadzira mamasiki anotadzisa kuchekwa kana kuiswa kwemaion uye kuderedza kunamira kwemamwe mafirimu matete.

3. Zvinosvibisa Ion zveSimbi

   • Iron, copper, sodium, potassium, calcium, nezvimwewo, izvo zvinonyanya kubva mumidziyo, makemikari, uye kusangana nevanhu.

   • Muma semiconductors, ma ions esimbi "anouraya" tsvina, achiunza huwandu hwesimba mubhandi rakarambidzwa, izvo zvinowedzera kubuda kwemhepo, kupfupisa hupenyu hwemutakuri, uye kukuvadza zvakanyanya hunhu hwemagetsi. Mugirazi, zvinogona kukanganisa kunaka uye kunamira kwemafirimu matete anotevera.

4. Rutivi rweOkisidhe rweNative

   • Kune mawafer esilicon: Rutivi rutete rwesilicon dioxide (Native Oxide) runoumbwa pamusoro pemhepo. Ukobvu uye kufanana kwerutivi urwu rweoxide zvakaoma kudzora, uye runofanira kubviswa zvachose panguva yekugadzira zvivakwa zvakakosha zvakaita segate oxides.

   • Kune magirazi ewafers: Girazi pacharo imhando ye silica network, saka hapana dambudziko re "kubvisa oxide layer yemuno." Zvisinei, pamusoro payo panogona kunge pakashandurwa nekuda kwekusvibiswa, uye jira iri rinofanira kubviswa.

I. Zvinangwa Zvikuru: Kusiyana Pakati Pekushanda Kwemagetsi Nekukwana Kwemuviri

• Zvidimbu zveSilicon

  • Chinangwa chikuru chekuchenesa ndechekuona mashandiro emagetsi. Magwaro anowanzo sanganisira kuverengwa kwezvikamu uye saizi dzakasimba (semuenzaniso, zvikamu ≥0.1μm zvinofanira kubviswa zvinobudirira), kuwanda kwemaion esimbi (semuenzaniso, Fe, Cu inofanira kudzorwa kusvika ≤10¹⁰ maatomu/cm² kana pasi), uye mazinga ezvisaririra zveorganic. Kunyangwe kusvibiswa ne microscopic kunogona kutungamira kuma circuit shorts, leakage currents, kana kutadza kushanda zvakanaka kwegate oxide integrity.

• Mawafer egirazi

  • Sezvinhu zvinogadziriswa, zvinodiwa zvikuru ndezvekukwana kwemuviri uye kugadzikana kwemakemikari. Maitiro acho anotarisa pazvinhu zvakaita sekusava nemavanga, mavara asingabvisike, uye kuchengetedza kushata kwepakutanga uye geometry. Chinangwa chekuchenesa ndechekuona kuchena uye kunamira zvakanaka kwemaitiro anotevera akadai sekuputira.

II. Zvisikwa Zvenyama: Musiyano Mukuru Pakati Pekristaro NeAmorphous

• Siriki

  • Silicon chinhu chakaita sekristalo, uye pamusoro payo panobva pakura silicon dioxide (SiO₂) oxide layer. Iyi oxide layer inokanganisa mashandiro emagetsi uye inofanira kubviswa zvakanaka uye zvakaenzana.

• Girazi

  • Girazi inetwork ye silica isina chimiro. Zvinhu zvayo zvakawanda zvakafanana nesilicon oxide layer yesilicon, zvinoreva kuti inogona kukurumidza kuchekwa ne hydrofluoric acid (HF) uye inogonawo kukanganiswa ne alkali zvakanyanya, zvichiita kuti pave nekuomarara kana kushanduka kweganda. Musiyano uyu mukuru unoti kuchenesa silicon wafer kunogona kutsungirira kuchekwa kwakajeka, kwakadzorwa kuti kubvise tsvina, nepo kuchenesa girazi wafer kuchifanira kuitwa nekungwarira kwakanyanya kudzivirira kukuvadza zvinhu zvepasi.

III. Kuenzanisa kweMhinduro dzeKuchenesa

Zvichibva pazvinangwa zvataurwa pamusoro apa uye hunhu hwezvinhu, mhinduro dzekuchenesa dze silicon ne glass wafers dzakasiyana:

• Maitiro Ekuchenesa Girazi reWafer

  • Parizvino, mafekitori mazhinji ekugadzira magirazi anoshandisa nzira dzekuchenesa zvichibva pane hunhu hwegirazi, achinyanya kushandisa mishonga yekuchenesa isina alkaline.

  • Hunhu hweMumiririri wekuchenesa:Mishonga iyi yekuchenesa yakasarudzika inowanzova isina alkaline yakawanda, ine pH inosvika 8-9. Kazhinji ine ma surfactants (semuenzaniso, alkyl polyoxyethylene ether), simbi chelating agents (semuenzaniso, HEDP), uye organic cleansing aids, yakagadzirirwa emulsify nekuparadza tsvina yeorganic yakadai semafuta neminwe, ukuwo ichingoparadza zvishoma girazi.

  • Kuyerera Kwemaitiro:Maitiro ekuchenesa anowanzo sanganisira kushandisa huwandu hwakasiyana hwezvinhu zvekuchenesa zvisina kusimba zvealkaline patembiricha inotangira patembiricha yemukamuri kusvika 60°C, pamwe chete nekuchenesa kwe ultrasonic. Mushure mekuchenesa, mawafer anosukurudzwa kakawanda nemvura yakachena uye kuomeswa zvinyoro nyoro (semuenzaniso, kusimudza zvishoma nezvishoma kana kuomeswa ne IPA vapor). Maitiro aya anosangana zvinobudirira nezvinodiwa zvewafer yegirazi kuti ionekwe zvakanaka uye ionekwe zvakanaka.

• Maitiro Ekuchenesa Silicon Wafer

  • Pakugadzirisa ma semiconductor, ma silicon wafers anowanzo chenurwa neRCA, inova nzira yekuchenesa inoshanda zvikuru inokwanisa kugadzirisa mhando dzese dzezvinhu zvinosvibisa, ichiva nechokwadi chekuti zvinodiwa zvemagetsi zvemidziyo ye semiconductor zvinosangana nazvo.

IV. Kana Girazi Richisangana Nemitemo Yepamusoro Yekuchena

Kana magirazi ewafer akashandiswa mukushandiswa kunoda kuverengwa kwezvikamu zvakaomesesa uye mazinga esimbi (semuenzaniso, sezvikamu zvepasi mumabasa e semiconductor kana kuti panzvimbo dzakanaka dzekuisa firimu rakatetepa), maitiro ekuchenesa mukati mechinhu anogona kunge asisina kukwana. Muchiitiko ichi, misimboti yekuchenesa semiconductor inogona kushandiswa, zvichiunza nzira yekuchenesa yeRCA yakagadziriswa.

Chinangwa chikuru cheiyi nzira ndechekuderedza nekugadzirisa maganhuro eRCA akajairika kuti agone kugadzikana nehunhu hwegirazi:

• Kubviswa Kwezvinhu Zvinosvibisa Mumuviri:Mhinduro dzeSPM kana mvura isina kunyorova yeozone inogona kushandiswa kuoresa tsvina yeorganic kuburikidza nekuoxidation yakasimba.

• Kubviswa kweZvidimbu:Mushonga weSC1 wakasanganiswa zvakanyanya unoshandiswa pakupisa kwakaderera uye kwenguva pfupi yekurapa kuti ushandise simba rawo rekudzora simba uye micro-etching effects kubvisa zvidimbu, ukuwo uchideredza ngura pagirazi.

• Kubviswa kweIoni yeSimbi:Mhinduro yeSC2 yakasanganiswa kana mhinduro dze hydrochloric acid/nitric acid dzakasanganiswa dzinoshandiswa kubvisa tsvina yesimbi kuburikidza ne chelation.

• Zvinorambidzwa Zvakasimba:DHF (di-ammonium fluoride) inofanira kudzivirirwa zvachose kudzivirira ngura yegirazi.

Mukuita kwese kwakagadziriswa, kusanganisa tekinoroji ye megasonic kunowedzera zvakanyanya kushanda kwekubvisa kwezvikamu zvidiki-diki uye kunyorova pamusoro.

Mhedziso

Maitiro ekuchenesa mawafer esilicon negirazi ndiwo mugumisiro usingadzivisike we reverse engineering zvichienderana nezvinodiwa zvekupedzisira zvekushandisa, hunhu hwezvinhu, uye hunhu hwemuviri nemakemikari. Kuchenesa mawafer esilicon kunotsvaga "kuchena kweatomu" kuti magetsi ashande zvakanaka, ukuwo kuchenesa mawafer egirazi kunotarisa pakuwana nzvimbo "dzakakwana, dzisina kukuvara". Sezvo mawafer egirazi ari kushandiswa zvakanyanya mumashandisirwo ema semiconductor, maitiro avo ekuchenesa achachinja zvisingadzivisike kupfuura kuchenesa kwetsika kwealkaline, kugadzira mhinduro dzakagadziriswa, dzakagadziriswa senge maitiro eRCA akagadziriswa kuti asvike pamazinga ehutsanana hwepamusoro.