Silicon Carbide Ceramics vs. Semiconductor Silicon Carbide: The Same Material with Two Distinct Destinies

1. Divergent Purity Zvinodiwa kune Raw Materials

 

Ceramic-giredhi SiC ine zvishoma kuchena zvinodiwa kune yayo hupfu feedstock. Kazhinji, zvigadzirwa zvegiredhi zvekutengesa zvine 90% -98% kuchena zvinogona kusangana nezvizhinji zvekushandisa zvinodiwa, kunyangwe yakakwirira-inoshanda structural ceramics ingada 98% -99.5% kuchena (semuenzaniso, reaction-bonded SiC inoda yakadzorwa yemahara silicon yemukati). Inoshivirira kumwe kusvibiswa uye dzimwe nguva nemaune inosanganisira sintering aids senge aluminium oxide (Al₂O₃) kana yttrium oxide (Y₂O₃) kuvandudza kuita sintering, kudzika kudziya tembiricha, uye kuwedzera yekupedzisira chigadzirwa density.

 

Semiconductor-giredhi SiC inoda pedyo-yakakwana kuchena mazinga. Substrate-giredhi imwe yekristaro SiC inoda ≥99.9999% (6N) kuchena, nemamwe maapplication epamusoro anoda 7N (99.99999%) kuchena. Epitaxial layers inofanirwa kuchengetedza kusachena kuri pasi pe10¹⁶ maatomu/cm³ (kunyanya kudzivirira tsvina yakadzika seB, Al, uye V). Kunyange kuronda tsvina yakaita sesimbi (Fe), aruminiyamu (Al), kana boron (B) inogona kukanganisa zvinhu zvemagetsi zvakanyanya nekukonzera kupararira kwemutakuri, kuderedza kuparara kwemunda, uye pakupedzisira kukanganisa kushanda kwechigadzirwa uye kuvimbika, zvinoda kudzora tsvina yakasimba.

 

Silicon carbide semiconductor zvinhu

 

2. Yakasiyana Crystal Zvimiro uye Hunhu

 

Ceramic-giredhi SiC inonyanya kuvepo sepolycrystalline poda kana miviri yakanyungudutswa inoumbwa neakawanda akasarudzika akatariswa SiC microcrystals. Nyaya yacho inogona kunge iine mapolytypes akawanda (semuenzaniso, α-SiC, β-SiC) pasina kutonga kwakasimba pane chaiwo mapolytypes, nekusimbisa panzvimbo pahuwandu hwezvinhu uye kufanana. Chimiro chayo chemukati chine miganhu yezviyo yakawanda uye microscopic pores, uye inogona kunge iine sintering aids (semuenzaniso, Al₂O₃, Y₂O₃).

 

Semiconductor-giredhi SiC inofanirwa kunge iri single-crystal substrates kana epitaxial layers ine yakanyanya kurongeka makristasi zvimiro. Inoda chaiwo mapolytypes anowanikwa kuburikidza nehunyanzvi hwekukura kwekristaro (semuenzaniso, 4H-SiC, 6H-SiC). Magetsi zvivakwa senge erekitironi kufamba uye bandgap anonyanya kutarisisa kusarudzwa kwepolytype, zvichida kutonga kwakasimba. Parizvino, 4H-SiC inotonga musika nekuda kwehukuru hwayo hwemagetsi hunosanganisira yakakwira inotakura kufamba uye kuparara kwemunda simba, zvichiita kuti ive yakanakira magetsi emagetsi.

 

3. Process Complexity Kuenzanisa

 

Ceramic-giredhi SiC inoshandisa nzira dzakareruka dzekugadzira (upfu kugadzirira → kugadzira → sintering), zvakafanana ne "kugadzira zvidhinha." Iyo nzira inosanganisira:

 

• Kusanganisa kutengeserana-giredhi SiC hupfu (kazhinji micron-saizi) nemabhainda
• Kugadzira kuburikidza nekudzvanya
• Yepamusoro-tembiricha sintering (1600-2200 ° C) kuti uwane densification kuburikidza nechidimbu kupararira.
  Mazhinji maapplication anogona kugutsikana ne> 90% density. Iyo yese maitiro haidi chaiyo kristaro kukura kutonga, kutarisa panzvimbo pakugadzira uye sintering kuenderana. Zvakanakira zvinosanganisira kuchinjika kwemaitiro ezvimiro zvakaoma, kunyangwe paine kuchena kwakaderera zvinodiwa.

 

Semiconductor-giredhi SiC inosanganisira zvakanyanya kuomarara maitiro (yakakwirira-kuchena poda kugadzirira → single-crystal substrate kukura → epitaxial wafer deposition → chigadzirwa chekugadzira). Matanho akakosha anosanganisira:

 

• Kugadzirira kwe substrate kunyanya kuburikidza nemuviri vapor transport (PVT) nzira
• Sublimation yeSiC poda pamamiriro akanyanya (2200-2400 ° C, yakakwira vacuum)
• Kunyatso kudzora tembiricha gradients (± 1 ° C) uye kumanikidza paramita
• Epitaxial layer kukura kuburikidza nemakemikari vapor deposition (CVD) kugadzira zvakafanana gobvu, doped layer (kazhinji akati wandei kusvika makumi emamicrons)
  Maitiro ese anoda nharaunda dzakachena (semuenzaniso, Kirasi 10 dzimba dzekuchenesa) kudzivirira kusvibiswa. Hunhu hunosanganisira yakanyanyisa mashandiro ekuita, inoda kutonga pamusoro penzvimbo dzinopisa uye magasi ekuyerera kwemazinga, ine zvinoomesesa zvinodikanwa kune ese ari maviri mbishi zvinhu kuchena (> 99.9999%) uye hunyanzvi hwekushandisa.

 

4. Yakakosha Mutengo Musiyano uye Mamiriro Emusika

 

Ceramic-giredhi SiC zvinhu:

• Raw zvinhu: Commercial-giredhi poda
• Zvikati zviri nyore maitiro
• Mutengo wakaderera: Zviuru kusvika makumi ezviuru RMB patani
• Broad application: Abrasives, refractories, uye mamwe maindasitiri anoona mutengo

 

Semiconductor-giredhi SiC zvinhu:

• Yakareba substrate kukura kutenderera
• Inonetsa defect control
• Goho rakaderera
• Mutengo wepamusoro: Zviuru zveUSD pa6-inch substrate
• Misika yakatariswa: Yepamusoro-inoshanda zvemagetsi semagetsi emagetsi uye zvikamu zveRF
  Nekukurumidza kuvandudzwa kwemotokari nyowani dzesimba uye 5G kutaurirana, kudiwa kwemusika kuri kukura zvakanyanya.

 

5. Differentiated Application Scenarios

 

Ceramic-giredhi SiC inoshanda se "industrial workhorse" kunyanya kune zvimiro zvekushandisa. Kushandisa zvakanakisa zvemuchina (kuomarara kwepamusoro, kupfeka kuramba) uye zvivakwa zvinopisa (kupisa tembiricha kuramba, oxidation kuramba), inokunda mu:

 

• Abrasives (kukuya mavhiri, sandpaper)
• Refractories (high-temperature kiln linings)
• Pfeka/inodzivirirwa nezvinhu (pombi miviri, pombi linings)

 

Silicon carbide ceramic zvimiro zvikamu

 

Semiconductor-giredhi SiC inoita se "electronic elite," ichishandisa yakafara bandgap semiconductor zvivakwa kuratidza zvakasarudzika zvakanakira mumidziyo yemagetsi:

 

• Zvishandiso zvemagetsi: EV inverters, grid converters (kuvandudza simba rekushandura simba)
• RF zvishandiso: 5G base zviteshi, radar masisitimu (inogonesa yakakwirira kushanda frequency)
• Optoelectronics: Substrate zvinhu zveblue LEDs

 

200-millimeter SiC epitaxial wafer

 

Dimension	Ceramic-giredhi SiC	Semiconductor-giredhi SiC
Crystal Structure	Polycrystalline, akawanda polytypes	Single crystal, yakanyatsosarudzwa polytypes
Process Focus	Densification uye chimiro chekutonga	Crystal mhando uye magetsi emidziyo kutonga
Performance Priority	Mechanical simba, corrosion resistance, thermal stability	Magetsi zvivakwa (bandgap, breakdown field, etc.)
Application Scenarios	Zvimiro zvekugadzira, zvipfeko zvisingagadziriswi, zvikamu zvepamusoro-tembiricha	Zvishandiso zvepamusoro-simba, ma-high-frequency devices, optoelectronic devices
Mutengo Vatyairi	Process flexibility, raw material cost	Chiyero chekukura kweCrystal, kurongeka kwemidziyo, kuchena kwezvinhu

 

Muchidimbu, musiyano wakakosha unobva pazvinangwa zvavo zvinoshanda: ceramic-giredhi SiC inoshandisa "fomu (chimiro)" nepo semiconductor-giredhi SiC inoshandisa "properties (magetsi)." Iyo yekutanga inotsvaga inodhura-inoshanda mechanicha / yekupisa kuita, nepo iyo yekupedzisira inomiririra iyo yepamusoro yezvigadzirwa zvekugadzira tekinoroji sekuchena kwepamusoro, imwe-crystal inoshanda zvinhu. Kunyangwe kugovera kwakabva kemikari yakafanana, ceramic-giredhi uye semiconductor-giredhi SiC inoratidza mutsauko wakajeka mukuchena, chimiro chekristaro, uye maitiro ekugadzira - asi zvese zviri zviviri zvinopa zvakakosha mukugadzirwa kwemaindasitiri uye kufambira mberi kwetekinoroji munzvimbo dzawo.