Silicon Carbide Ceramics vs. Semiconductor Silicon Carbide: Chinhu Chimwechete Chine Magumo Maviri Akasiyana

1. Zvinodiwa zveKuchena kwakasiyana-siyana kwezvinhu zvisina kugadzirwa

 

SiC yemhando yeCeramic ine zvinodiwa zvekuchena zvishoma zvehupfu hwayo. Kazhinji, zvigadzirwa zvemhando yekutengeserana zvine hutsvene hwe90%-98% zvinogona kusangana nezvinodiwa zvakawanda, kunyangwe zvigadzirwa zveceramic zvinoshanda zvakanyanya zvingada kuchena kwe98%-99.5% (semuenzaniso, SiC ine reaction-bonded inoda huwandu hwesilicon hwakagadziriswa). Inoshivirira mamwe marara uye dzimwe nguva inobatanidza nemaune zvinhu zvinobatsira pakuchenesa senge aluminium oxide (Al₂O₃) kana yttrium oxide (Y₂O₃) kuti ivandudze mashandiro ekuchenesa, kuderedza tembiricha yekuchenesa, uye kuwedzera huwandu hwechigadzirwa.

 

SiC yemhando yeSemiconductor inoda mwero wekuchena wakakwana. SiC yemhando yeSubstrate inoda kuchena kwe≥99.9999% (6N), uye mamwe mashandisirwo epamusoro anoda kuchena kwe7N (99.99999%). Epitaxial layers inofanira kuchengetedza huwandu hwekusvibiswa huri pasi pe10¹⁶ maatomu/cm³ (kunyanya kudzivirira kusvibiswa kwakadzika senge B, Al, uye V). Kunyangwe kusvibiswa kwakaderera senge iron (Fe), aluminium (Al), kana boron (B) kunogona kukanganisa zvakanyanya hunyanzvi hwemagetsi nekukonzera kupararira kwecarrier, kuderedza kuputsika kwesimba remunda, uye pakupedzisira kukanganisa mashandiro emudziyo nekuvimbika, zvichida kudzora kusvibiswa kwakasimba.

 

Silicon carbide semiconductor zvinhu

 

2. Magadzirirwo eKristaro Akasiyana uye Hunhu

 

SiC yemhando yeCeramic inonyanya kuwanikwa sehupfu hwepolycrystalline kana miviri yakasanganiswa yakaumbwa nema microcrystals akawanda eSiC akarongeka zvisina kurongeka. Chinhu ichi chinogona kunge chine ma polytypes akawanda (semuenzaniso, α-SiC, β-SiC) pasina kudzora zvakanyanya ma polytypes chaiwo, pachinzvimbo chekuwanda kwezvinhu uye kufanana. Maumbirwo ayo emukati ane miganhu yakawanda yetsanga uye maburi madiki, uye anogona kunge aine zvinhu zvinobatsira pakupisa (semuenzaniso, Al₂O₃, Y₂O₃).

 

Semiconductor-grade SiC inofanira kunge iri single-crystal substrates kana epitaxial layers ine ma crystal structures akarongwa zvakanaka. Inoda ma polytypes chaiwo anowanikwa kuburikidza nehunyanzvi hwekukura kwe crystal (semuenzaniso, 4H-SiC, 6H-SiC). Hunhu hwemagetsi hwakadai se electron mobility uye bandgap hunonyanya kugadzikana ne polytype yakasarudzwa, zvichida kudzorwa kwakasimba. Parizvino, 4H-SiC ndiyo inonyanya kutengeswa mumusika nekuda kwehunhu hwayo hwemagetsi hwakanaka hunosanganisira kufamba kwakanyanya kwe carrier uye simba rekupwanyika kwesimba, zvichiita kuti ive yakakodzera michina yemagetsi.

 

3. Kuenzanisa Kuoma Kwemaitiro

 

SiC yemhando yeCeramic inoshandisa nzira dzakareruka dzekugadzira (kugadzira hupfu → kugadzira → kusvina), zvakafanana ne "kugadzira zvidhinha." Maitiro acho anosanganisira:

 

• Kusanganisa upfu hweSiC hwemhando yepamusoro (hunowanzova hukuru hwema micron) nemidziyo yekubatanidza
• Kugadzira nekudzvanya
• Kupisa kwakanyanya (1600-2200°C) kuti zviwanikwe zvichiwedzera simba kuburikidza nekupararira kwezvikamu
  Mashandisirwo mazhinji anogona kugutsa huwandu hwe >90% yehuwandu. Maitiro ese haadi kudzora kukura kwekristaro, asi anotarisa pakuumba uye kugadzikana kwechinhu. Zvakanakira zvinosanganisira kuchinjika kwemaitiro kune maumbirwo akaomarara, kunyangwe paine zvinodiwa zvishoma zvekuchena.

 

SiC yemhando ye semiconductor inosanganisira maitiro akaomarara (kugadzirira upfu hwakachena zvakanyanya → kukura kwe substrate ye crystal imwe chete → epitaxial wafer deposition → kugadzirwa kwemudziyo). Matanho makuru anosanganisira:

 

• Kugadzirira substrate kunyanya kuburikidza nenzira yekufambisa utsi hwemuviri (PVT)
• Kuisa pasi pevhu reSiC pamamiriro ezvinhu akaipisisa (2200-2400°C, high vacuum)
• Kudzora kwakanyatsojeka kwemazinga ekupisa (±1°C) uye maparamita ekumanikidzwa
• Kukura kweEpitaxial layer kuburikidza ne chemical vapor deposition (CVD) kugadzira layer dzakakora zvakaenzana (dzinowanzova dzakawanda kusvika kumakumi ema microns)
  Maitiro ese aya anoda nzvimbo dzakachena zvakanyanya (semuenzaniso, dzimba dzekuchenesa dzeClass 10) kudzivirira kusvibiswa. Hunhu hunosanganisira kunyatsoita zvinhu nemazvo, zvinoda kudzora nzvimbo dzinopisa uye mwero wekuyerera kwegasi, pamwe nezvinodiwa zvakasimba zvekuchena kwezvinhu zvakabikwa (>99.9999%) uye hunyanzvi hwemidziyo.

 

4. Kusiyana Kwakakosha Kwemitengo uye Maitiro Emusika

 

Zvinhu zveCeramic-grade SiC:

• Zvinhu zvakabikwa: Upfu hwemhando yepamusoro hwekutengeserana
• Maitiro ari nyore
• Mutengo wakaderera: Zviuru kusvika makumi ezviuru RMB patani
• Mashandisirwo akakura: Ma-abrasives, ma-refractories, uye mamwe maindasitiri anonyanya kudhura

 

Zvinhu zveSiC yegiredhi reSemiconductor:

• Kukura kwenguva refu kwe substrate
• Dambudziko rekudzora zvikanganiso
• Goho rakaderera
• Mutengo wakakwira: Zviuru zveUSD pa substrate ine 6-inch
• Misika yakatarisana: Zvigadzirwa zvemagetsi zvinoshanda zvakanyanya sezvishandiso zvemagetsi uye zvikamu zveRF
  Nekukura nekukurumidza kwemotokari itsva dzemagetsi uye kutaurirana kwe5G, kudiwa kwemusika kuri kukura zvakanyanya.

 

5. Mamiriro Ekushandisa Akasiyana

 

SiC yemhando yeCeramic inoshanda se "basa remaindasitiri" kunyanya pakushandiswa kwechivakwa. Ichishandisa hunhu hwayo hwakanaka hwemakanika (kuomarara kwakanyanya, kuramba kupfeka) uye hunhu hwekupisa (kuramba kupisa kwakanyanya, kuramba oxidation), inobudirira mu:

 

• Mabhurasitiki (mavhiri ekukuya, sandpaper)
• Zvinodzivirira kupisa (machira emoto wemoto anopisa zvakanyanya)
• Zvinhu zvinodzivirira kupfekwa/kuora (pombi, mapaipi)

 

Zvikamu zvesimbi zvesimbi zvesimbi zvesilicon carbide

 

SiC yemhando yeSemiconductor inoshanda se "electronic elite," ichishandisa hunhu hwayo hwakakura hwe semiconductor kuratidza mabhenefiti akasiyana mumidziyo yemagetsi:

 

• Zvishandiso zvemagetsi: ma EV inverters, ma grid converters (kuvandudza mashandiro ekushandura simba)
• Midziyo yeRF: 5G base stations, radar systems (inoita kuti mafrequency ekushanda akwire)
• Optoelectronics: Substrate zvinhu zve LED dzebhuruu

 

Wafer yeSiC epitaxial ine mamirimita mazana maviri

 

Chiyero	SiC yemhando yeCeramic	SiC yegiredhi reSemiconductor
Chimiro cheKristaro	Polycrystalline, mapolytype akawanda	Kristaro imwe chete, polytypes dzakasarudzwa zvakanyanya
Kutarisa Maitiro	Kuwanda kwesimbi uye kutonga chimiro	Hunhu hwekristaro uye kutonga kwemidziyo yemagetsi
Kukosha Kwekuita	Simba remuchina, kuramba ngura, kugadzikana kwekupisa	Zvimiro zvemagetsi (bandgap, break field, nezvimwewo)
Maitiro Ekushandisa	Zvikamu zvechivakwa, zvikamu zvisingapfeki, zvikamu zvinopisa zvakanyanya	Midziyo ine simba guru, michina ine mafrequency akawanda, michina ye optoelectronic
Vatyairi veMari	Kuchinjika kwemaitiro, mutengo wezvinhu zvakabikwa	Mwero wekukura kwekristaro, kunyatsorongeka kwemidziyo, kuchena kwezvinhu zvakabikwa

 

Muchidimbu, musiyano mukuru unobva pamabasa avo akasiyana: SiC yegiredhi receramic inoshandisa "chimiro (chimiro)" nepo SiC yegiredhi resemiconductor inoshandisa "zvimiro (zvemagetsi)." Yekutanga inotsvaga mashandiro emakanika/kupisa asingadhuri, nepo yekupedzisira ichimiririra hunyanzvi hwekugadzira zvinhu sezvinhu zvine kuchena kwakanyanya, zvinoshanda nekristaro imwe chete. Kunyangwe ichigovana mavambo akafanana emakemikari, SiC yegiredhi receramic negiredhi resemiconductor inoratidza musiyano wakajeka mukuchena, chimiro chekristaro, uye maitiro ekugadzira - asi ese ari maviri anopa mipiro yakakosha mukugadzirwa kwemaindasitiri nekufambira mberi kwetekinoroji munzvimbo dzawo.