Zvikamu zveSemiconductor uye Epitaxy: Nheyo dzehunyanzvi dziri shure kweSimba reMazuva Ano neRF Devices

Kufambira mberi mune tekinoroji ye semiconductor kuri kuwedzera kutsanangurwa nekubudirira munzvimbo mbiri dzakakosha:zvigadzikouyezvikamu zve epitaxialZvikamu zviviri izvi zvinoshanda pamwe chete kuti zvione mashandiro emagetsi, kupisa, uye kuvimbika kwemidziyo yepamusoro inoshandiswa mumotokari dzemagetsi, nzvimbo dzemagetsi dze5G, zvigadzirwa zvemagetsi zvevatengi, uye masisitimu ekutaurirana emaziso.

Kunyange zvazvo substrate ichipa hwaro hwemuviri uye hwekristaro, epitaxial layer inoumba musimboti unoshanda apo maitiro e-high-frequency, high-power, kana optoelectronic anogadzirwa. Kuenderana kwavo—kurongeka kwekristaro, kuwedzera kwekupisa, uye hunhu hwemagetsi—zvakakosha pakugadzira michina inoshanda zvakanyanya, kuchinja nekukurumidza, uye kuchengetedza simba rakawanda.

Chinyorwa chino chinotsanangura mashandiro anoita ma substrates nema epitaxial technologies, nei zvichikosha, uye kuti zvinoumba sei ramangwana rezvinhu zve semiconductor zvakaita seSi, GaN, GaAs, safaya, uye SiC.

1. Chii chinonziChikamu cheSemiconductor?

Substrate i "puratifomu" imwe chete inogadzirwa nekristaro. Inopa rutsigiro rwechimiro, kupisa, uye template yemaatomu inodiwa pakukura kwe epitaxial yemhando yepamusoro.

Mabasa Akakosha eSubstrate

• Rutsigiro rwemakanika:Inoita shuwa kuti mudziyo wacho unoramba wakasimba panguva yekugadzirisa nekushanda.

• Template yekristaro:Inotungamira epitaxial layer kuti ikure neatomic lattices dzakarongerwa, zvichideredza zvikanganiso.

• Basa remagetsi:Inogona kutenderedza magetsi (semuenzaniso, Si, SiC) kana kushanda sechinodzivirira (semuenzaniso, safaya).

Zvinhu Zvakajairika zveSubstrate

Magadzirirwo Anoitwa Zvidimbu

1. Kucheneswa kwezvinhu:Silicon kana zvimwe zvinhu zvinonatswa kusvika zvanyatsonaka.

2. Kukura kwekristaro imwe chete:

   • Czochralski (CZ)- nzira inonyanya kushandiswa yesilicon.

   • Nzvimbo Inoyangarara (FZ)- inogadzira makristaro akachena zvakanyanya.

3. Kucheka nekupukuta wafer:Mabhora anochekwa kuita mawafers uye anokweshwa kuti aite seatomu.

4. Kuchenesa nekuongorora:Kubvisa tsvina uye kuongorora kuwanda kwezvikanganiso.

Matambudziko eUnyanzvi

Zvimwe zvinhu zvemhando yepamusoro—kunyanya SiC—zvinonetsa kugadzira nekuda kwekukura kwekristaro zvishoma nezvishoma (0.3–0.5 mm/awa chete), zvinodiwa pakudzora tembiricha zvakanyanya, uye kurasikirwa kukuru kwekucheka (kurasikirwa kweSiC kerf kunogona kusvika >70%). Kuoma uku ndechimwe chezvikonzero nei zvinhu zvechizvarwa chechitatu zvichiri kudhura.

2. Chii chinonzi Epitaxial Layer?

Kugadzira epitaxial layer zvinoreva kuisa firimu rakatetepa, rakachena zvakanyanya, rine kristalo imwe chete pachigadziko chine lattice yakatarisana zvakanaka.

Chikamu che epitaxial chinoona kutimaitiro emagetsiyemudziyo wekupedzisira.

Nei Epitaxy Ichikosha

• Inowedzera kuchena kwekristaro

• Inogonesa mapurofayiri ekushandisa zvinodhaka akagadzirwa

• Inoderedza kupararira kwezvirema zve substrate

• Inogadzira magadzirirwo akasiyana-siyana akadai se quantum wells, HEMTs, uye superlattices

Main Epitaxy Technologies

MaParamita Akakosha muEpitaxy

• Ukobvu hwechikamu:Nanometers dzematsime equantum, kusvika ku100 μm dzezvishandiso zvemagetsi.

• Kushandisa zvinodhaka:Inogadzirisa huwandu hwezvinhu zviri mumidziyo kuburikidza nekupinza tsvina nemazvo.

• Hunhu hweinterface:Inofanira kuderedza kukanganiswa uye kushushikana kunokonzerwa nekusawirirana kwelattice.

Matambudziko muHeteroepitaxy

• Kusawirirana kweLattice:Semuenzaniso, kusawirirana kweGaN nesafire ne ~13%.

• Kusawirirana kwekuwedzera kwekupisa:Zvinogona kukonzera kutsemuka panguva yekutonhora.

• Kudzora zvikanganiso zvakakwana:Inoda mabuffer layers, magraded layers, kana nucleation layers.

3. Mashandiro anoita Substrate neEpitaxy Pamwe Chete: Mienzaniso Yechokwadi

GaN LED paSapphire

• Safira haidhuri uye inochengetedza ngura.

• Mabuffer layers (AlN kana GaN inodziya zvishoma) anoderedza kusawirirana kwelattice.

• Matsime emhando dzakasiyana-siyana (InGaN/GaN) anoumba nzvimbo inoburitsa chiedza.

• Inokwanisa kuwana huremu hwakaipa huri pasi pe10⁸ cm⁻² uye inoshanda zvakanaka nechiedza.

SiC Power MOSFET

• Inoshandisa 4H-SiC substrates ine kugona kukuru kwekupwanya.

• Matanda ekudonha kwemagetsi eEpitaxial (10–100 μm) anoona chiyero chemagetsi.

• Inopa ~90% yakaderera yekurasikirwa kwemhepo kupfuura midziyo yemagetsi yesilicon.

Zvishandiso zveRF zveGaN-on-Silicon

• Zvishandiso zvesilicon zvinoderedza mutengo uye zvinoita kuti zvikwanise kubatanidzwa neCMOS.

• AlN nucleation layers uye maengineered buffers anodzora kusvuta.

• Inoshandiswa kumachipisi e5G PA anoshanda pama frequency e millimeter-wave.

4. Substrate vs. Epitaxy: Kusiyana Kwakakosha

5. Matekinoroji Aya Ari Kuenda Kupi

Saizi dzeWafer dzakakura

• Si ichichinja kuita 12-inch

• SiC inoshanduka kubva pa6-inch kuenda ku8-inch (kuderedza kukuru kwemutengo)

• Dhayamita yakakura inovandudza simba rekushandisa uye inoderedza mutengo wemuchina

Heteroepitaxy Inodhura Zvishoma

GaN-on-Si neGaN-on-saphire zviri kuramba zvichishandiswa senzira dzekushandisa panzvimbo pezvinhu zvinodhura zveGaN.

Maitiro Epamusoro Ekucheka Nekukura

• Kucheka nechando kunogona kuderedza kurasikirwa kweSiC kerf kubva pa ~75% kusvika ku ~50%.

• Magadzirirwo echoto akavandudzwa anowedzera goho reSiC uye kufanana kwaro.

Kubatanidzwa kweMabasa eOptical, Power, uye RF

Epitaxy inogonesa matsime equantum, ma superlattice, uye ma layers akasunganidzwa akakosha kune ma photonics akabatanidzwa mune ramangwana uye magetsi emagetsi anoshanda zvakanyanya.

Mhedziso

Zvidimbu ne epitaxy zvinoumba musimboti wetekinoroji wema semiconductor emazuva ano. Substrate iyi inogadza hwaro hwemuviri, hwekupisa, uye hwekristaro, ukuwo epitaxial layer ichitsanangura mashandiro emagetsi anogonesa kushanda kwemuchina wepamusoro.

Sezvo kudiwa kuri kukura kwesimba guru, mafrequency akawanda, uye kushanda zvakanaka kwazvomasisitimu—kubva kumotokari dzemagetsi kusvika kunzvimbo dzedata—matekinoroji maviri aya acharamba achichinja pamwe chete. Kuvandudzwa kwehukuru hwewafer, kudzora kukanganisa, heteroepitaxy, uye kukura kwekristaro kuchaumba chizvarwa chinotevera chezvinhu zve semiconductor uye mapurani emidziyo.